VER2000/4000

VER2000 Repeatability 3% F .S. Sensitivity 0.5% F .S. 1.5% F .S. Linearity 3% F .S. Lubrication Not required (Use turbine oil Class 1, ISO VG32 if lubricated.)

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

0.2 MHZ2-16D 7 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 14.9 20.9 6.6 12.6 11.6 2.1 4 MHZ2-20D 9 5 M5 x 0.8 M5 x 0.8 M5 x 0.8 16.3 26.3 7.2 17.2 14 2.1 4 MHZ2-25D 6 12 M5 x 0.8 M5 x 0.8 M5 x 0.8 19.3 33.3 8.8 22.8 19 3.5 4 Note) Through-hole mounting is not possible for 10. 925 Standard Type / Series MHZ2 Finger Option 1122Air Preparation Equipment Pressure Control Equipment Flow Control Equipment

Rotary Gripper Series MRHQ

MRHQ10D MRHQ10D 20 20 Gripping force N Gripping force N 15 15 Pressure 0.6MPa Pressure 0.6MPa 0.5MPa 0.5MPa 10 10 0.4MPa 0.3MPa 0.4MPa 0.3MPa 5 5 0.2MPa 0.2MPa 0 10 20 30 40 50 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm F F MRHQ16D MRHQ16D 50 50 External gripping Pressure 0.6MPa Pressure 0.6MPa 40 40 Gripping force N Gripping force N 0.5MPa 0.5MPa 30 30 0.4MPa 0.3MPa 0.4MPa

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 q i !3 Description No. Material PBT PBT Brass Brass Note White Black (1) Body A Handle Body B Needle q w e r Electroless nickel plated Electroless nickel plated Electroless nickel plated, M5 type only y Needle guide Brass t M5 type U10/32 type M5 type U10/32 type Seat ring Lock nut U seal Electroless nickel plated Electroless nickel plated (3) Brass Brass (2) y u i HNBR o !

MVGQ

x 0.8 R port (with plug) MK(2) RS Q G 54.4 (GZ: 55.1) [56.1] RS H A RZQ MI W S M5 x 0.8 P port CEP1 C + Stroke B + Stroke A + Stroke M5 x 0.8 R port CE1 CE2 [ ]: Denotes AC.

10

How to Order 50 L Q 32 F MB With auto switch MDB L Q 32 50 F M9BW With auto switch (Built-in magnet) Made to Order Number of auto switches Mounting type B Basic L Axial foot F Rod flange G Head flange C Single clevis D Double clevis T Center trunnion Nil 2 pcs. S 1 pc. 3 3 pcs. n n pcs.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Control Valves Air Grippers Modular F.

Compressed Air Preparation Filter

Combination example q A Spacer with bracket F S 2 x P (Port size) J M Line Filter AFF30-03-D 1 pc. Mist Separator AM30-03-D 1 pc. Spacer with Bracket Y300T-D 1 pc. R V1 V2 Q1 Q21 Q1 C Y300T-D U G Maintenance space E AFF30-03-D AM30-03-D 1 Q2 (Sizes 20, 40) Q1 (Size 30) Combination example w A Spacer with bracket N F 2 x P (Port size) J M S Mist Separator AM30-03-D 1 pc.

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

53

Applicable model HRS-WL003 HRS090-mm-20/40 Parts List q No.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

x 0.8 Rc 1/8 Rc 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5 G 8.5 10.7 15.5 N 20 25 40 C 3.3 5.4 32.5 M 7 9 13 B 6.5 9.5 14 LW 83 123 161 A 80 105 165 (LL) 40 49.6 75 LE 4 5 6 NC 14 21.3 32.4 NT 3.5 5.3 6.5 NE 27 35.5 56.5 NH 2 3 4 NX 5.8 8.5 10.5 NW 48.2 71.8

MB

Also dimensions with boot is same as the basic style (Double acting, Single rod). 6-6-25 25 Air Cylinder: Low Friction Type Double Acting, Single Rod Series MBQ 32, 40, 50, 63, 80, 100 How to Order MB L F 32 50 Q Without auto switch Number of auto switches Nil S 3 n 2 1 3 n MDB L Y7BW F 32 50 Q With auto switch Built-in magnet Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

Round Type Hydraulic Cylinder

4 o i q !3 e r !2 !1 u t w y CHK CHN CHM CHM CHS CH2 o !

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

Check Valve Series AK 1

u r y e w e y q y u r y e w u i t q i t q i t q r y e w AS e w q w ASP o Free flow Female thread Male thread ASN Free flow One-touch fitting Male thread AQ ASV AK Component Parts ASS Description Material Note No.

With Factory Installed

When using seal tape, leave one thread exposed when wrapping fitting or pipe. 0.25 f-t-+-t---t-+--j--+--:--t--+-I Set point -~V '" Q. ::; O Mount vertically. c.> 0.2 :; :2 l' Q. Qi '5 0 ~ 5l :r 0. 31<.-t-~-+---="I--;;::'--t-t_1 Q. 0.15 f-t.,---+t--t-+---1--+-t--t-l 8Tightening torque of mounting screw (M3) for gauge is 3-Skgf . cm.

PFxx-OMX0002

[F 30] Setting of accumulated value hold completed : The value is stored in memory every 2 or 5 minutes.

Ionizer

trimmer 4 x M4 x 0.7 depth 5 (For mounting, opposite side: Same) Bar length (mm) 300, 380, 620, 780 1100, 1260, 1500, 1900, 2300 Fitting M-5P-X112 KJH04-M5-X34 Note) Note) Plug (M-5P-X112) 1 pc. is shipped together.