VQC

COM External pilot Low wattage type (0.5 W) Nil K N R Y (A) 4 (B) 2 Note 1) C Note) 5 (R1) 3 (R2) 1 (P) Seal type 5 (R1) 3 (R2) 1 (P) Note 2) 0 1 N.C N.O Metal seal Rubber seal 3 position closed center Note) For rubber seal type only.

5 Port Solenoid Valve Series SQ1000/2000

How to Order Applicable Valves B C6 SQ 2 3 5 1 Y 1 Series SQ2000 C G B B A A A B A B A A D F E D Coil voltage Type of actuation A 1 2 Note 1) 5 24VDC 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure center Dual 3 port valve N.C. + N.C. Dual 3 port valve N.O. + N.O. Dual 3 port valve N.C. + N.O.

Secondary Batteries

3 position closed center 3 position exhaust center 3 position pressure center 4 position dual 3 port valve: N.C.

smcmaintenancepartslist

Qty. u Kit no. r (Nominal) 1 1 3 3 5 Element AMF800 AMF801 AMF900 AMF901 AMF1000 AL-61S AL-60S AL-63S AL-62S AL-31S 1 1 3 3 5 1 3 5 1 1 1 1 1 1 1 3 3 5 OD112XID90XT3 e KA00061 1A-G35 63271 63148 OD112XID90XT3 Drain N-3 OD112XID90XT3 251 252 Industrial Filters 1 Indication of replacement of elements, inspection items Actuators Modular F.R.L.

PFxx-OMJ0005CN

1. 2. 3. 4

modular-press-e

25-MLA [ISE35-N-25-M (Switch body only)] ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] AD37 AD38 Square embedded type Note 3) GC3-10AS GC3P-010AS 0.02 to 0.2 MPa setting GC3-2AS GC3P-010AS NPN output/Wiring bottom entry ISE35-N-25-MLA ISE35-N-25-M t ISE35-R-25-MLA ISE35-R-25-M NPN output/Wiring

Modular F.R.L. Pressure Control Equipment

25-MLA [ISE35-N-25-M (Switch body only)] ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] AD37 AD38 Square embedded type Note 3) GC3-10AS GC3P-010AS 0.02 to 0.2 MPa setting GC3-2AS GC3P-010AS NPN output/Wiring bottom entry ISE35-N-25-MLA ISE35-N-25-M t ISE35-R-25-MLA ISE35-R-25-M NPN output/Wiring

Intrinsically Safe Valve

SY 53 20 01 Thread type UL/CSA compliant Nil F N T Rc G Series NPT 5 7 NPTF 53-SY5000 53-SY7000 Thread piping A, B port size Type of actuation Symbol Port size Applicable series 1 2 3 4 5 A Note) 01 02 1/8 53-SY5000 2-position single 1/4 53-SY7000 2-position double 3-position closed center One-touch fitting (Metric size) Note) 3-position exhaust center Symbol C4 C6 C8 C8 C10 Port size Applicable

3 Port Solenoid Valve Metal Seal Series VZ200 1

(Pilot EXH) (Pilot EXH) 2-M5x0.8 2-M5 x 0.8 (Pilot EXH) 300 (Lead wire length) 300 (Lead wire length) 76 68.5 2-M5 x 0.8 (Pilot EXH) Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 22 2 43 54 3 59 70 4 75 86 5 91 102 6 107 118 7 123 134 8 139 150 9 155 166 10 171 182 Symbol L1 L2 4-15-8 9 3 Port Solenoid Valve Metal Seal, Body Ported/Base Mounted Series VZ200 Dimensions: Common Exhaust

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

3 port valve Single Double Closed center Exhaust center Pressure center Dual 3 port valve 77.1 83.7 2 position C4 4 One-touch fitting SZ360--C4 3 position 87.6 4 position 84 73.5 80.2 2 position C6 6 One-touch fitting SZ360--C6 84.1 3 position 4 position 81 68.3 75 2 position SZ360--M5 M5 x 0.8 3 position 78.8 4 position 75 30 Series SZ3000 Dimensions/SZ3000: Plug-in Stations SS5Z3-60GD

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

. *2 Excludes the PF2M725 *3 Made to order (Produced upon receipt of order) Flow ratio*2 100: 1 25 50 100 200 Flow range [L/min] Port size Smallest settable increment 0.1 0.01 0.05 0.02 0.3 0.5 1 2 3 5 10 0.01 1 0.001 PF2M701 0.02 2 C43, C6, 1/8 PF2M702 0.05 5 PF2M705 0.01 0.1 10 PF2M710 0.3 25 PF2M725 C6, N7, 1/8 0.5 50 PF2M750 0.1 1 100 PF2M711 C8, N7, 1/4 2 200 1 PF2M721 New New Compatible

New

suppressor 5/32 4 N 100 VAC 10 one-touch fitting M 9/32 7 P 110 VAC A B C D E F 13/64 5 Q 200 VAC 1/4 5/16 8 R 230 VAC 25/64 10 S Conduit 24 VDC Aluminum 13/64 5 With surge voltage suppressor 3/8 5/16 8 VX2 T 100 VAC 25/64 10 Single U 110 VAC 3 Size 3 G H Unit 1/2 25/64 10 V 200 VAC N.C. 13/64 5 W 230 VAC J 10 one-touch fitting 5/16 8 K L 25/64 10 Faston terminal Resin 13/64 5 M N Y 12 one-touch

Table of Contents

8 (Hexagon socket head taper plug) Rc 3/8 (Hexagon socket head taper plug) Stopper bolt adjusting unit Cylinder for driving (MY1BH-) RR SS RR SS NH H EY HL UU (TT) N A Rc 3/8 (Port) Rc 3/8 (Port) Z + Stroke T-slot section for mounting UU (TT) PL Rc 3/8 (Hexagon socket head taper plug) Rc 3/8 (Port) Rc 3/8 (Port) Rc 3/8 (Hexagon socket head taper plug) MY1HTG MY1HTG (mm) A EY H HL L LL N NH

Proposals for Energy Saving

Hysteresis mode OFF n-1 n-2 Pressure [n] H (fixed hysteresis) = 2 digits (ZSE5B) or 3 digits (ISE5B) H H ON Window comparator mode NO OFF n-1 n-2 Pressure 122 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO Digital Pressure Switch With Backlight Series ZSE5B/ISE5B Pressure Setting Setting procedure 1. Setting Value Input Mode 2. OUT1 Setting Value (1) Input 3.

PSxx-OMM0006CN

,M8(3).

Model: VDW40, Voltage: 24VDC, Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 4.5 mm, Port Connection Type: One-touch fitting for ø8, Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: Bottom Mounting Insert Type

Model: 4 (VDW40), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 4 (4.5 mm), Port Connection Type: C8 (One-touch fitting for ø8), Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: N (Bottom Mounting Insert Type)

MY1

100 FE = x a x g x m = x 200 x 9.8 x 6.525 = 179.1 (N) ME M1E: Moment Z ME max (from 4 of graph MY1M/M where 1.4a = 280mm/s) = 42.1 (Nm) M 1 3 1 3 ME = x FE x Z = x 179.1 x 37.4 x 10= 2.23 (Nm) Load factor = ME/ME max = 2.23/42.1 = 0.05 M M3E: Moment Y FE ME max (from 5 of graph MY1M/M where 1.4a = 280mm/s) = 5.7 (Nm) ME 1 3 1 3 ME = x FE x Y = x 179.1 x 29.6 x 10= 1.77 (Nm) Load

Plug-in Unit

Connector: Input no. 0, 2, 4, 6 Input no. 1, 3, 5, 7 SW + SIGNAL -n + 1 SW SIGNAL -n PE 1 2 3 4 5 1 2 3 4 5 Description No. Function Drain 1 Drain/Shield 3 2 V + (+) Circuit power supply 2 5 Caution () Circuit power supply V 3 When IP65 or equivalent enclosures are required, install a waterproof cover on the input connector that is not being used. Order waterproof covers separately.

SYA3000/5000/7000

N NPT Port size Without sub-plate Symbol Applicable series Nil NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 1 4 Port size Without sub-plate Symbol Nil With sub-plate 02 SYA5000 1 4 3 position closed center 02 With sub-plate 3 3 8 With sub-plate 03 3 position exhaust center 4 3 position pressure center 5 1728 5 Port Air Operated Valve Series SYA3000/5000/7000 Specifications