Body Option: Internal Pilot, Port Size: NPT1/4, Style: 34 [Twist Selector (2 Position)], Suffix: Push Button Selector Color Red, Accessory: -

Body Option: Internal Pilot, Port Size: NPT1/4, Style: 34 [Twist Selector (2 Position)], Suffix: Push Button Selector Color Green, Accessory: -

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 06 (Roller Plunger), Suffix: S (Roller Material Hard Steel)

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= mg 0.2 1 0.8 0.6 0.4 0.4 0.6 0 0.2 0.8 1 Mass m Operating pressure (MPa) Operating pressure (MPa) Operating pressure (MPa) Static torque calculation Movement Load Tf = F x l (Nm) Allowable Load g = 9.8 m/s2 l Lever Do not allow the load and moment applied to the table to exceed the allowable values shown in the table below.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

ZQ-OM01401

00-N () 70 ZQMA-K15L-F-0 () 70 -10 N.O. +2 +5 +20 Assy +25 +45 +50 [g] ZZQ101-BSB 115 ZZQ101-BSC 130 ZZQ101-BPB 150 ZZQ101-BPC 155 ZZQ101-OB 105 ZZQ101-OC 120 1 +2 (x ) + () + (1 x ) ZQ1-V114-5LU-A ZQ1-V124-5MU-A ZQ1-VQ110L-5L-A / DC24V -10 to 10 (%) 0.4W 1W L M L ( 2 1.7mm 0.2 to 0.33mm ) V100VQ100 33 - No.ZQ-OM01401-B 9.4 ZSE10 [kPa] 0 to -101 -100 to 100 [kPa]

VQ

L size Blank plate with 2 screws and gasket 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. L size 40 510.5 2.9-15

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M H L M E W Y 1/8 LQ1H11-F LQ1H12-F LQ1H21-F LQ1H22-F LQ1H23-F LQ1H24-F LQ1H31-F LQ1H32-F LQ1H33-F LQ1H34-F LQ1H35-F LQ1H36-F LQ1H41-F LQ1H42-F LQ1H43-F LQ1H44-F LQ1H51-F LQ1H52-F LQ1H53-F LQ1H54-F LQ1H61-F LQ1H62-F LQ1H63-F LQ1H64-F 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 11.5 18.5 10 10 26.5 1/8" Class 1 Rc (NPT) Port size VC 18.5 35 1/8" 16.5 14 15 14 L VDW 21.5

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Square 8 3 A 44 26.5 11 6 50 29 14.5 10 60 33 20.5 N S U F GN GS J K ZP3 Y 10 13 16 B B5 15 63 46.5 10 20 70.5 54 JB K 4 Dimensions Per Vacuum Inlet: One-touch Fitting 15 Model D E F Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

Compact Guide Cylinder

33 10.5 17 17 37 37 The value of W in the table means the amount of auto switch protrusion from the body end surface.

•

(psi) Nominal ~upport bracket nominal ~ymbo l symbol ~nd~cJjemallc diagram " Rod f1ang~: Head flange: --i '< "C II> 92 113 103 Fooi: L 44 G .F. " [I" , , III 1 L,F 73 79 70 86 :.T w~ 102 58 66 72 44 45 47 38 en 3 0 0 ~ "'i f" 27 73 34 33 G 22 102 27 26 (') 'cS. ,j" C. r '\ ~ T .

AS-FPQ/AS-FPG

33 36 17.7 6 12.8 26.8 18.5 33 36 33 40.3 35.3 R 1/4 17 18.5 34.8 29.4 (18.2) 8 15.2 29.4 20.5 35 35 38.6 (40.8) (35.8) 10 18.5 37.3 23 38 38 46.5 18.3 (18.8) 6 12.8 29.4 18.5 59 40.9 55 8 15.2 31.9 20.5 61 43.4 57 19.8 45.8 40.8 R 3/8 19 23 40.6 35.6 10 18.5 33.6 45.1 23 63 59 (20.9) (46.9) (41.9) 12 20.9 34.8 46.3 24 65 61 10 18.5 35.6 49.9 23 107 100 24.5 57.2 49.7 R 1/2 24 28.6 49.9

AS-FPQ/AS-FPG

33 36 17.7 6 12.8 26.8 18.5 33 36 33 40.3 35.3 R 1/4 17 18.5 34.8 29.4 (18.2) 8 15.2 29.4 20.5 35 35 38.6 (40.8) (35.8) 10 18.5 37.3 23 38 38 46.5 18.3 (18.8) 6 12.8 29.4 18.5 59 40.9 55 8 15.2 31.9 20.5 61 43.4 57 19.8 45.8 40.8 R 3/8 19 23 40.6 35.6 10 18.5 33.6 45.1 23 63 59 (20.9) (46.9) (41.9) 12 20.9 34.8 46.3 24 65 61 10 18.5 35.6 49.9 23 107 100 24.5 57.2 49.7 R 1/2 24 28.6 49.9

RZQ

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SQ1531 33 or less 0.14 0.20 0.59 0.19 0.21 0.79 25 or less Rubber seal 100 Dual 3 port valve A B C SQ1 31 33 or less 25 or less 0.15 0.28 0.59 0.15 0.28 0.59 Rubber seal 95 Note 1) Values for the cylinder port size of C6.

3 Position Cylinder Series RZQ

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Air Cylinder Series MB

Note 1) In case of types with no air cushion, a rubber bumper is used. 4 Series MB Without Mounting Bracket Cushion valve Basic/(B) WV Port G 2-RcP MM G With rod boot E E D e MB Effective thread 2 x 4-J C B A K F N MA 13 9 f l N h S + Stroke H ZZ + Stroke Without air cushion Bore size (mm) Bore size (mm) S ZZ S ZZ Model without air cushion is designed to include rubber bumpers.

VXP21/22/23

LQ Thread type Nil T F N For 32A For 40A For 50A 32 40 50 Rc NPTF G NPT Flange LVN Refer to the table (1) given below for availability.

Tie-rod Type Hydraulic Cylinder

T T V V 2 x Rc P 4 x J GA F GA A MA a CHM A MA a Cushion adjustment screw Air release R (max.)