Support Guide/11-LEFG Series

100 100 LEH LEY -X5 10 10 11LEFS 11LEFS Suction flow rate: 30 L/min Suction flow rate: 30 L/min 11LEJS 1 1 0 0.1 0.6 0.5 0.4 0.3 0.2 0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5

One-touch Fittings Series KQ2

22.5 15.5 9.6 17.5 10 2.5 25.5 24.5 13.7 15.4 14.29 7 18 2.7 8 9 18 5 10 19 3.2 10 20 32 12 20 28 16 23 33 59 28 36 62 10-32UNF 12.7 2.3 9.3 15.6 1 16 22 11.11 5 32 23 16 1 8 1 4 10.4 10 18 3 26 25 14.29 KQ2L05-32 10-32UNF 20 22 2.3 11.11 11.4 10 19.5 3 16 1 8 1 4 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 24 26 16.5 3.5 14.29 10-32UNF 2.3 18.1 13.6

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

Multi-Axis Step Motor Controller

4 r t y u i !5 !6 No.

REA/REB

Speed 600 mm/s REAS25 8 4 7 10 11 6.5 26.4 16 8.5 70 54 40 20 14 REAS32 8 5 7 12.5 14 8 33.6 20 9.5 86 66 46 24 16 REAS40 10 5 10 12.5 14 8 41.6 25 10.5 104 76 57 25 20 J x K HP HS HT L LD M MM N NN Model REAS15 M8 x 1.0 39 15 21 M6 x 1.0 x 9.5 60 5.6 8 M5 x 0.8 7.5 REAS20 M10 x 1.0 45 25.5 10 M6 x 1.0 x 9.5 70 5.6 10 M6 x 1.0 9.5 REAS25 M14 x 1.5 53 23 10 M8 x 1.25 x 10 70 7 10 M6 x 1.0

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Metal Seal Series MQQ (mm) Foot type: MQQLL 10, 16, 20 Special cap bolt B + Stroke L Bore size (mm) Stroke range (mm) A B L LD LG LH 10 10 to 40 61.5 74.3 8 4.5 2.8 19 LH LY 16 10 to 60 70.5 87.7 10 6.6 4 24 20 10 to 60 79 96.2 10 6.6 4 26 4-LD X X LG LS + Stroke Y Y LT 25 10 to 50,75,100 84.5 103.7 12 6.6 4 30 LX LZ 30 10 to 50,75,100 104 123.2 12 6.6 4 33 A + Stroke 40 10 to 50,75,100

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

17 140 14.5 10 17 160 13 10 17 180 14 10 17 200 14.5 10 17 D-Z7/Z80 D-A3/A44/A5/A6 D-A59W D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W D-F5BAL/F5NTL/F59F D-G39/K39 12 13 7 7.5 8 6 6 7 7 7 6 6 5 5.5 5 11 11 10 10 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Y-Z015A Y-G02 Y-G03 5 5 8 10 IY-G012 5 5 8 10 +0.048 0 +0.058 0 +0.058 0 +0.048 0 +0.058 0 +0.058 0 28 M6 x 1 12 16.6 IY-J015 10.3 11.5 14 34 M8 x 1.25 16 21 IY-G02 10.5 M10 x 1.25 12.8 41 20 25.6 IY-G03 Inch Threads Inch Threads NDH10 (inch) NX Bore size (mm) 12 16 20 25 Bore size (mm) E1 ND H10 NX NZ L Part No.

Basic Type/Direct Mount Type

0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

The set value can be copied to up to 10 switches simultaneously.

e-Rodless Actuator

Wall mounting Set acceleration degree a 4.9 m/s2 Note) y z Mounting orientation Wall mounting Wb: MGGLB25-200 (4.35 kg) x y E-MY2H25-500TAN x z 3. Ceiling mounting Wc: MHL2-16D1 (795 g) x y z Wa: Connection plate t=10 (880 g) Wd: Workpiece (1500 g) 2 Load blocking Weight and center of gravity for each workpiece 42.5 150 Center of gravity 5 65 Work piece no.

Thermo-chiller

Existing model 15 10 Heating functions are required to maintain a constant temperature particularly in the winter when the ambient temperature is low. 5 0 0 5 10 15 Time [Minute] Anti-freezing function is also available!

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

Vacuum

FtH (with no condensation) Withstand voltagc '1000VAC for 1 min. beh,veen live parts and enclosure lnsulation tesistance 50MQ or more between live pads and enclosure (at 500VDC) Vibration resistanc 10 to 150H2, 1 smm amplitude in X, Y, Z directions for 2 hours each lmpact r-sistance 100m/s2 in X, Y.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

Vacuum

FtH (with no condensation) Withstand voltagc '1000VAC for 1 min. beh,veen live parts and enclosure lnsulation tesistance 50MQ or more between live pads and enclosure (at 500VDC) Vibration resistanc 10 to 150H2, 1 smm amplitude in X, Y, Z directions for 2 hours each lmpact r-sistance 100m/s2 in X, Y.

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z A B A + B + 90 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 +0.058 0 11 57 35 65 15 85 10 9 17 8 40 52 60 10 234 10 +0.070 0 11 12 57 35 65 18 85 10 9 17 8 40 52 70 10 261 +0.070 0 13.5 12 60 162 67 40 80 25 105 12.5 11 22 10 50 66 85 10 280 16 +0.084 0 16.5 93 60 100 31.5 130 15 13.5 24 12 65 90 102 12 337 20 +0.084 0 16.5 93 60 100 35.5 130 15 13.5

CNA

DL DD DA DU DC DX DE DO DR DT DS DH DF B W1 Z A B A + B + 90 CA1-B04 CA1-B05 CA1-B06 CA1-B08 CA1-B10 +0.058 0 11 57 35 65 15 85 10 9 17 8 40 52 60 10 234 10 +0.070 0 11 57 35 65 18 85 10 9 17 8 40 52 70 10 261 12 +0.070 0 13.5 12 60 162 67 40 80 25 105 12.5 11 22 10 50 66 85 10 280 16 +0.084 0 16.5 20 93 60 100 31.5 130 15 13.5 24 12 65 90 102 12 337 +0.084 0 16.5 93 60 100 35.5 130 15 13.5

Digital Flow Switches

or less) IP65 Operating: 0 to 50C, Stored: 25 to 85C (with no condensation and freezing) 1000VAC for 1 min. between external terminal and case 50M (500VDC) between external terminal and case 10 to 500Hz at whichever is smaller: 1.5mm amplitude or 98m/s2 acceleration, in X, Y, Z directions for 2 hrs. each (de-energized) 490m/s2 in X, Y, Z directions 3 times each 1000Vp-p, Pulse width 1s,

Digital Flow Switches, Series PF2A, Series PF2W

or less) IP65 Operating: 0 to 50C, Stored: 25 to 85C (with no condensation and freezing) 1000VAC for 1 min. between external terminal and case 50M (500VDC) between external terminal and case 10 to 500Hz at whichever is smaller: 1.5mm amplitude or 98m/s2 acceleration, in X, Y, Z directions for 2 hrs. each (de-energized) 490m/s2 in X, Y, Z directions 3 times each 1000Vp-p, Pulse width 1s,