VXA21/22

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 8 The VX series will be revised shortly.

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

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Tokyo 105 JAPAN Te/:03-3502-2740 Fax:03-3508-2480 1st pnnhng February 1995.D-036,P-53{M) November 1997, 67 5(RP) SpeclilCatlons are subject to change without pnor notICe Printed In Smgapore and any obltgaltOn on the pa r1 01 the manifacture.

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

2–4

6 q e r t !5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.

CUJ

1 r y o e t !2 For 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !0 Built-in magnet Without magnet Rod end male thread Parts list Replacement parts: Seal kits (double acting) Contents Note No. Description Material Kit no. Bore size 1 Hard anodized Aluminum alloy 4 CUJB4-PS Cylinder tube 2 Above numbers 11, 12, 13 and an exclusive grease pack.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

VHS20/30/40/50

AC20 AC25 AC30 AC40 AC50 VHS20 VHS30 VHS40 VHS50 5-8-19 2 Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Optional specifications Pressure relief 3 port valve Description Symbol B R Z Knob color: Black Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

AC20 AC25 AC30 AC40 AC50 VHS20 VHS30 VHS40 VHS50 Conforming to OSHA Standard Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50 How to Order 30 03 RZ VHS Optional specifications Pressure relief 3 port valve Description Symbol B R Z Knob color: Black Body size Flow direction: Right to left Symbol 20 30 40 50 Standard port size 1/8 3/8 1/2 3/4 PSI as unit displayed on label Note

Stations: 8 Stations, A, B Port: 03 (Side 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 8 Stations, A, B Port: 03 (Side 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 03 (3/8), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 7 Stations, A, B Port: 03 (Side 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 03 (3/8), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 3 Stations, A, B Port: 03 (Side 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 4 Stations, A, B Port: 03 (Side 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 03 (3/8), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 9 Stations, A, B Port: 03 (Side 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 7 Stations, A, B Port: 03 (Side 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 5 Stations, A, B Port: 03 (Side 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 6 Stations, A, B Port: 03 (Side 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 2 Stations, A, B Port: 03 (Side 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 3 Stations, A, B Port: 03 (Side 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 03 (3/8), P, R Port Location: B (Both Sides), Thread: Rc