Air Slide Table Series MXQ

F A F Lr 6 6 6 Lr = 40mm MXQ6-30 0.015 0.03 0.05 MXQ6-10 MXQ6-20 MXQ6-30 MXQ6-30 MXQ6-50 MXQ6-50 MXQ6-40 Table displacement mm Table displacement mm Table displacement mm MXQ6-50 0.04 MXQ6-20 MXQ6-40 0.010 0.02 MXQ6-20 MXQ6-40 0.03 0.02 MXQ6-10 0.01 0.005 MXQ6-10 0.01 0 0 40 80 120 10 20 30 10 20 30 0 Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Note 4) Except valves. 581 A 5 Port Solenoid Valve/Plug-in Unit 10-SQ1000 Kit (D-sub connector) F Directional Control Valves Air Grippers Modular F. R.

VM

P.T. 20 N F.O.F. 30 O.T. 50 T.T.

LX Series Compact Electric Actuators

l Cross section C-C Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

E-P HYREG

N T Rc G(2) Symbol Power source voltage DC Command signal DC Input impedance Power source/Command signal NPT NPTF Nil 1 to 5 V 10 k 67 k 1 0 to 10V Note 2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Applicable

CE

) Black F 0V (power supply) (Shield) G Shield 3 High Precision Scale Cylinder Series CEP1 Construction 12, 20 !

SZ3000

solenoids possible) Specified layout (Up to 25 solenoids possible) 20 20 20 stations 20 stations Connector entry direction 1: Perpendicular connector 2: Lateral connector PG: Flat ribbon cable connector (20 pins) PH: Flat ribbon cable connector (10 pins) Note Symbol 02 Note Symbol 02 Stations Stations LOCK FREE LOCK FREE 2 stations 2 stations Double wiring specifications Double wiring specifications

Hydraulic Cylinders

across flats E b e g H h + Stroke X with thread depth Y Note) J C B + Stroke Rod end male thread A + Stroke A B C D d E F G H J Y X Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 12 M6 x 1 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 12 M6 x 1 32 63 51 12 18 15 13 M10 x 1.5 12 7 8.5 16 M8 x 1.25 40 69 55 14 22.4 19 16 M12 x 1.75 15 8 10 20 M10 x 1.5 50 75 60 15 28 24 21 M16 x 2 20 9.5

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

E-P HYREG ® Series VY1 1

Sensitivity 0.5% F.S. 1% F .S. 1.5% F .S. 2% F .S. Repeatability 0.5% F.S. 1% F.S. 1% F.S. 2% F.S.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

NVFR2l00 NVFR22C)0 NVFR2300. 2400. 2sO0 Gasket NBR AXr624-20-2 AXr624-20-2 N{r624-20-2 Valve mounting bolt Steel AXr624-26 (M3X31) AXT624-26 (M3X31) AXI624-26 (M3X31) @ Pilot Ass'y Refer to "Pilot Operalor Ass'y/How to Order" on page 8. Series NVFRzOOO:Base Mounted Tlpe Pilot Operatar Ass'g/How to Order NVFR2000 Series enty and lndicat!

-fl Seies

NVFR2l00 NVFR22C)0 NVFR2300. 2400. 2sO0 Gasket NBR AXr624-20-2 AXr624-20-2 N{r624-20-2 Valve mounting bolt Steel AXr624-26 (M3X31) AXT624-26 (M3X31) AXI624-26 (M3X31) @ Pilot Ass'y Refer to "Pilot Operalor Ass'y/How to Order" on page 8. Series NVFRzOOO:Base Mounted Tlpe Pilot Operatar Ass'g/How to Order NVFR2000 Series enty and lndicat!

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

flats C G E H B NN Effective thread length T (R) NA Q N F NA I F N CC 0.1 + 12-CY3B50, 63 12-CY3B6 to 15 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20

Aluminum High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

Environment

kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500 1500 Mep 1000 1000 1000 L3 [mm] L3 [mm] L3 [mm] m L3 Z 500 500 500 0 0 0 0 10 20 30 40 50 60 Work load [kg] 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 1500 1500 1500 L4 1000 1000 1000 L4 [mm] L4 [mm] L4 [mm] X 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1500 1500

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Modular F.

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

VDW

Types 10, 20 Types 10, 20 VVDW 0 2 C 1 01 2 VVDW 2 0 4A Series Series 1 2 10 20 1 2 10 20 Thread type VC Rc G NPT Nil F N Material VDW C S C37 SUS Type 30 VQ VVCW20-4A OUT port size Stations Symbol M5 01 Port size M5 1/8 (6A) For 2 stations For 3 stations 1 2 VX2 VX Type 10 is M5 only.

4/5 Port Air Operated Valve Series SYJA3000 1

1 4/5 Port Air Operated Valve Series SYJA3000 How to Order SA VA Bracket With bracket F Nil Without bracket SA SYJA3 20 1 M3 Body ported VA VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Base mounted (4 port) VR (Manifold use only) SYJA3 30 2 VH VHS Base mounted