One-touch Fittings

15.6 50.4 45.3 15.6 15.9 10.1 8 4.2 40 28.4 9.4 33.4 1/2 KQ2U10-04GS 22 15.9 15.6 54.6 48.2 15.6 15.9 10.1 8 4.2 40 28.4 9.4 61.3 H Connection thread (With sealant) Q Q 12 1/4 KQ2U12-02GS 19 18.5 18.2 53 48.3 17 18.5 11.4 8 4.2 57.4 45.4 9 36 3/8 KQ2U12-03GS 19 18.5 18.2 54.4 49.3 17 18.5 11.4 8 4.2 57.4 45.4 11 38.9 1/2 KQ2U12-04GS 22 18.5 18.2 58.6 52.2 17 18.5 11.4 8 4.2 57.4 45.4 11.6 61

KT10

3000 Max. 0.25 (6.4) Panel Thickness 17.2 2500 2000 13.8 To 6.88 (174.7) 1500 10.3 1000 6.9 500 3.4 0.75 (19.1) 0.50 (12.7) 3.84 (97.5) Min. 1.50 (38.1) 0 0.0 0 1000 2000 3000 4000 5000 6000 Flow rate (slpm, N2) 3.25 (82.6) Clearance For Panel Mounting 2.12 (53.8) [4P porting] 2.30 (58.4) [4PN porting] 2.22 (56.4) 0.28 (7.1) 2.80 (71.1) Vespel, Viton, are registered trademarks of DuPont. 61

Wireless System

White/Green 1 2 3 4 5 6 7 8 1 2 3 4 Pair 3 4 Pair Plug connector pin arrangement D-coded Connections (Straight cable) Plug connector pin arrangement Green Shield Item Specifications Cable O.D. 6.4 mm Nominal cross section 0.14 mm2/AWG26 Wire diameter 0.98 mm Min. bending radius 26 mm (Fixed) Cable with connector Field wireable connector PCA-1446566 (Plug) PCA-1446553 50 5000 47.3 14.8 17.5 61

99

High Precision Filter for Liquids FGH Series Filtration efficiency: 99% or more FGD FGE HEPO2element Filtration accuracy: 2, 4, 6 or 13 m (Filtration efficiency 99%) FGG FGA FGC Membrane element Filtration accuracy: 0.2 or 0.4 m (Filtration efficiency 99.9%) FGF FGH FGH FQ1 FN EB ES 61 High Precision Filter for Liquids FGH Series Filtration efficiency: 99% or more Prevents particle generation

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

10 FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54 -04 FH54 -06 FH54 -08 FH54 -10 FH54 -12 FH541-16 FH640-03 FH64 -04 FH64 -06 FH64 -08 FH64 -10 FH64 -12 FH641-16 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 5 213 57 275 156 80 50 1.8 96 105 2 x M8 x 1.25 19 0 236 61

Thermo-con/Rack Mount Type

HECR-A Air-cooled Water-cooled HECR-W Model Selection Specific Product Precautions Options Optional Accessories Warning/Caution label (10) 400 33 Air Caution label/Electricity 430 27 Air Ventilation hole (air inlet) Display/Operation panel Power switch Handle (for carrying the product) Tank lid (with gasket) 403 166 10 84 Fluid fill port 0 7 151 176 134 139.7 105 125 139.7 38 38 0 10 0 61

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

22 31.8 44.3 32.8 69 43.3 21 67 17.9 19 19 AS321F-03-06 AS321F-03-07 6 1/4" 12.8 17 27.8 39.3 27.8 55 39.3 17 55 13.2 AS321F-03-08 AS321F-03-09 8 5/16" 15.2 18.5 29.5 41 23 29.5 57 41 18.5 57 19.8 45.4 40.4 40.2 35.2 15.2 3/8 45.4 40.4 40.2 35.2 19.8 23 3/8 AS321F-03-10 AS321F-03-11 31.8 43.3 21 59 17.9 10 18.5 21 43.3 31.8 59 3/8" AS321F-03-12 AS421F-04-11 12 3/8" 20.9 22 44.3 32.8 33.6 61

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

42.8 12 20.9 5/16" 15.2 37.8 18.5 63 23 AS321FG-03-06 AS321FG-N02-11 31.8 43.3 55 17 27.8 39.3 6 12.8 3/8" 17.9 21 67 AS321FG-03-08 AS321FG-N03-07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19.8 29.5 19 41 59 21 45.4 31.8 43.3 40.4 40.2 10 18.5 5/16" 15.2 35.2 18.5 57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61

Series AK1000

Connection ) 1.50 (38.1) 50 0.34 40 0.28 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.50 (63.5) 10 0.07 0.88 (22.4) 0 0.00 0 40 80 120 160 200 Flow Rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AK1400TA Inlet pressure: 0 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg abs) -21 600 Delivery pressure (kPa) -35 500 -48 400 -61

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

Compact Manifold Regulator

8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1/4 3/8 5/32 1/4 5/32 1/4 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size VCHC AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 ASS 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 ASR ASQ Note 1) L7: Reference dimensions Dimensions: AS5000 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9) 2

, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 2000 Series 5 Port Valve, 4/5 PORT SOLENOID VALVE, 61

, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 2000 Series 5 Port Valve, 4/5 PORT SOLENOID VALVE, 61

, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 2000 Series 5 Port Valve, 4/5 PORT SOLENOID VALVE, 61

, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 2000 Series 5 Port Valve, 4/5 PORT SOLENOID VALVE, 61

, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 2000 Series 5 Port Valve, 4/5 PORT SOLENOID VALVE, 61

, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 2000 Series 5 Port Valve, 4/5 PORT SOLENOID VALVE, 61

, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 2000 Series 5 Port Valve, 4/5 PORT SOLENOID VALVE, 61

, Operating pressure range: 0.1 - 0.7MPa, Effective area mm 2 (Cv): metal seal 2.0 (0.11) - 12.6 (0.7); rubber seal 3.1 (0.17) - 16.2 (0.9), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W, high pressure 1.5W: metal seal 25 or less; rubber seal 30 or less, Ambient & fluid temperature: -10 to 50°C, 2000 Series 5 Port Valve, 4/5 PORT SOLENOID VALVE, 61