Seal Type: Metal, Configuration: 3-Position, Dual Exhaust Center, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply

Seal Type: Metal, Configuration: 2-position, Dual Pressure, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply

Seal Type: Metal, Configuration: 3-Position, Exhaust Center, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: Side 1/4, Option: External Pilot Supply

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: Side 3/4, Option: External Pilot Supply

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: Side 1/2, Option: External Pilot Supply

CEx-OMQ0011

c. d. - 3. 3. 3. 3. 1. 1. 1. 1. a.560 b.2585%RH c. d. e.

Ionizer

circuit (Photocoupler) Yellow: OUT2 Isolation circuit (Photocoupler) Purple: OUT3 Isolation circuit (Photocoupler) Analog input Load Dark green: OUT4 10 k or more PNP output Ionizer Brown: DC1 (+) Blue: DC1 () 0 V: 24 VDC 10% +24 V: Ionizer driving power supply FG Input/Output signal circuit Red: DC2 (+) Black: DC2 () 0 V: 24 VDC 10% +24 V: Input/Output signal power supply +24 V OUTPUT PLC

VQ5000

Specify the wiring specifications on the manifold specification sheet. 12 12 stations Note 1) U D U D Note 2) Note 3) 2-6-10 11 Base Mounted Series VQ5000 Plug-in Unit Electrical wiring specifications Standard wiring D-sub connector assembly (AXT100-DS25) Wire colors 015 030 050 D-sub connector Terminal no.

,

117.5 75.5 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 14 4 2 12 12 26 35 45 14 Indicator light 5 1 3 Manual override 39 36.5 41.5 2-5.5 mounting holes 44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151

VER2000/4000

VS7-8-FG-D-3M 1 pc. (Third station of manifold where 1 piece of VS7-8-FG-D-3M is added to the basic unit of VER2000-A and VS7-8-FG-S-3N.) AL Dimensions DXT334-X72-04R-04U L side U side D side Exhaust port R side Rc 1/2 supply port (L side) 2-Rc 1/2, Output port 14-9-23

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

(between lead wire and case) OUT Black [White] Indication light Lights when ON Ambient temperature 10 to 60C Operating time 1ms or less DC () Blue [Black] Impact resistance 1000m/s D-Y7GL Auto switch part no. D-F9B N.C.

,

117.5 75.5 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 14 4 2 12 12 26 35 45 14 Indicator light 5 1 3 Manual override 39 36.5 41.5 2-5.5 mounting holes 44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151

Shock Absorbers and Rate Controls

(Irtodel) Al d mensiDns in millimeters. (lhlog No. (I$odell A A I D E t H WT $tl oEfio.l il{s} 57.0 6i.0 l(10 x 1.0 3.0 N/A 8.6 49.4 8.6 10.? N/A r{/A N/A 0 t.t5rir(B) 8 t . 8 91.1 Ml2 x 1.0 3.3 l.l/A 8,6 71.4 0.9 14.2 N/A .0 9.7 (r.R)0Efl.251rr(r)8r.8 9 1 . ?

A_HEC-OM-J017

Terminating resistance FG FG FG FG Connector Connector Connector shell shell shell 2201/2W + + + 1 1 1 + 2 2 2 SG 5 SG 5 SG 5 SG Internal connection Internal connection Internal connection Pin No. Symbol Pin No. Symbol Pin No.

LC6D/LC6C

F (LC6D-2 only) +24V GND CW+ CW CCW+ CCW PD+ PD A B C D E 7 6 3 10 CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

117.5 75.5 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 14 4 2 12 12 26 35 45 14 Indicator light 5 1 3 Manual override 39 36.5 41.5 2-5.5 mounting holes 44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Elbow Universal 2 3 AS-FE KE AS-FG Control type Applicable tubing O.D. Note) AS-FP Inch size Metric size Meter-out Meter-in 0 1 02 23 01 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS-FM 03 05 07 09 11 13 04 06 08 10 12 AS-D AS-T With One-touch fitting ASP Thread type M3 Port size Note) For applicable tubing O.D. selection, refer to the Model on page 484. Use 1/8" tube.

Speed Controller with Uni One-touch Fitting AS Series

M Weight (g) Model Applicable tubing O.D. d D3 L3 L4 AS231F-U01-23 AS231F-U01-04 AS231F-U01-06 AS231F-U01-08 AS231F-U02-04 AS231F-U02-06 AS231F-U02-08 AS231F-U02-10 AS331F-U02-06 AS331F-U02-08 AS331F-U02-10 AS331F-U02-12 AS331F-U03-06 AS331F-U03-08 AS331F-U03-10 AS331F-U03-12 AS431F-U04-10 AS431F-U04-12 3.2 4 6 8 4 6 8 10 6 8 10 12 6 8 10 12 10 12 7.8 8.9 11.0 15.2 8.9 11.0 15.2 18.5 11.0

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

6 8 10 12 12 10 6 8 10 Tubing O.D.