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Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2013 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing PP printing RQ 8150DN Printed in Japan. D-G

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2006 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing KQ printing KQ 120DN Printed in Japan.

Do not use in atmospheres where the valve is in direct contact with corrosive gases, chemicals, salt water, water or steam. 2. Do not use in an explosive atmosphere. 3. Do not use in locations subject to vibration or impact. Confirm the specifications in the main section of the catalog. 4. Use a protective cover, etc., to shield valves from direct sunlight. 5.

Metric size Inch size 3 4 6 8 10 12 19 25 1/8" 3/16" 1/4" 3/8" 1/2" 3/4" 1" Type Body class Seat Applicable tubing size Body class Metric size 1, 2 03 (3) 5, 6 19 (19) 6 25 (25) 1 Note) 03 04 Note) 03 Tubing O.D.

The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% Conditions MB, CA2 series CS1, CS2 series Series Condition 10A x 1 m SGP (Steel pipe) dia. x Length VQ4100--03 VQ4101--03 AS420-03 Speed controller AN30-03 Silencer 10A x 1 m SGP (Steel pipe) dia. x Length VQ5100--04 VQ5101--04 AS420-04 Speed controller AN40-04 Silencer 448 INDEX Page 446 Base

Connection Be sure that chips from the pipe threads and sealing material do not get inside the piping. Further, when sealant tape is used, leave 1.5 to 2 thread ridges exposed at the end of male threads. Do not use with gases. 4.

Do not use valves where there is direct contact with, or in atmospheres of, corrosive gases, chemicals, salts water or steam. 2. Do not use in an explosive atmosphere. 3. Do not use in locations subject to vibration or impact. Confirm the specifications for each series. 4 - 4. A protective cover should be used to shield valves from direct sunlight. 5.

Do not use in locations where static electric charges will be a problem. Please consult with SMC regarding use in this kind of environment. 2. Do not use in locations where spatter occurs. There is a danger of spatter causing a fire. 3. Do not use in environments where there is direct contact with liquids such as cutting oil, lubricating oil or coolant oil, etc.

Do not use in locations having an explosive atmosphere. 2. Do not operate in locations where vibration or impact occurs. 3. In locations near heat sources, block off radiated heat. 1. Confirm model number, size, etc. before installing. Check if there is damage, gouge, crack, etc. on the tube. 2.

Do not use in an atmosphere having corrosive gases, chemicals, sea water, water, water steam, or where there is direct contact with any of these. 2. Do not use in locations influenced by vibrations or impacts. 3. This vacuum regulator always uses atmospheric air, therefore, do not use in dusty environments. 4.

PA02] 0 0 Select a regenerative option. 00: Regenerative option is not used. 00: 100 W 0.2 kW 7 kW 11 kW 22 kW 01: FR-BU2FR-RC FR-CV 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50 () 08: MR-RB31 09: MR-RB51 () 0B: MR-RB3N 0C: MR-RB5N ( ) FA: 11 kW 22 kW UP For drivers of LECSN-T5, do not use a regenerative resistor.

Do not use pressure sensors with corrosive and/or flammable gases. 7. The applicable fluids are air, non-corrosive gas and non-flammable gas. Consult with SMC if the switch is to be used with other types of fluids. Caution Connection Caution 1. Do not drop, bump, or apply excessive impacts (100 m/s2) while handling.

Connection Be sure that chips from the pipe threads and sealing material do not get inside the piping. Further, when sealant tape is used, leave 1.5 to 2 thread ridges exposed at the end of male threads. Do not use with gases. 4.

Do not use in a location having an explosive atmosphere. 2. Do not operate in locations where vibration or impact occurs. 3. Do not use in locations where radiated heat will be received from nearby heat sources. Maintenance Warning 1. Maintenance should be performed in accordance with the procedures in the Operation Manual.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2018 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing VQ printing WQ 10270SZ Printed in Japan. D-G

Do not separate the cylinder from the valve. 2. Do not disassemble or modify the guide rod. 3. This product should not be used as a stopper. Cushion Rubber bumper Stroke length tolerance dose not include the amount of bumper change.

Do not apply negative pressure. It may result in malfunction. Should they remain, they could cause malfunction. 3. When connecting pipes and fittings, etc., be sure 3. Do not supply air pressure from ports other than that neither chips from the pipe threads nor sealing material get inside the valve.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2018 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printing WY 9520KS Printed in Japan. D-G

AD48 AD47 AD38 AD37 Y300 AKM3000-(01) 02 IS1000M-30 Y310-(01) 02 Float type auto drain Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y500 Y600 Spacer Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 VHS50-06 10 VHS20-01 02 VHS30