Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

P, E port location U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) Pilot type Internal pilot External pilot Nil R Valve stations Series 10-SV1000 Series 10-SV2000 P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins P: Flat ribbon cable 26 pins PH: Flat ribbon cable 10 pins 02 02 02 02 2 stations 2 stations 2 stations 2 stations Double wiring

Table of Contents

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

Standard Combinations

ACG20 GB3-10AS GB3-3AS AD37 AD38 Y300 Y300T AKM3000-(01), 02 IS1000M-30 VHS30-02, 03 ACG30 GB4-10AS GB4-3AS AD47 AD48 Y400 Y400T AKM4000-(02), 03 IS1000M-40 VHS40-02, 03, 04 ACG40 Model Description GB2-10AS GB2-3AS AD27 Y200 Y200T AKM2000-01, (02) IS1000M-20 VHS20-01, 02 0 to 1.0 MPa 0 to 0.3 MPa Standard Optional Normally closed Normally open (1) Pressure gauge Attachment Accessory (2)

Membrane Air Dryer

Port size Symbol Port size Size 30 50 60 75 100 02 03 04 Bracket Assembly (Accessory) Part No. $ $ 1/4 $ $ $ $ $ 3/8 Part no.

2/3 Port Valve

-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360-03 VX2260-04 VX2360-04 2.0 1.5 2.0 1.5 1.5 1.5 1.0 1/8 (6A) 0.9 0.5 1.1 0.6 0.5 0.5 1.0 Construction/Components 260 0.4 0.2 0.45 0.2 0.2 0.15 0.45 2.0 1.5 2.0 1.5 1.5 1.5 1.0 Water oil air 3.0 Steam 1.0 VX21/22/23 (Orifice

Tamper Proof and Flat Head Screw

27.2 36.4 12.8 6 27.8 39.3 33.9 43.2 20 21 AS221F-N02-11ST AS321F-02-08ST 3/8" 17.9 15.2 8 18.5 29.5 41 55.3 49.3 21.8 R 1/4 19 1.5 23 9.5 AS321F-N02-07ST AS321F-02-10ST 18.5 1/4" 13.2 27.8 39.3 17 31.8 10 21 43.3 AS321F-N02-09ST AS321F-02-12ST 23 9.5 NPT1/4 19 20.9 21.8 55.3 1.5 49.3 5/16" 15.2 29.5 41 18.5 12 22 44.3 32.8 AS321F-N02-11ST AS321F-03-06ST 12.8 17.9 3/8" 31.8 43.3 21 27.8

Speed Controller with One-touch Fitting

-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 20 (21) AS321F-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6

Gun Type Ionizer

Static Neutralization Characteristics e Pressure Flow Rate Characteristics IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment IZG10-mm-01/IZG10-mm-02 Mode setting switch: Continuous blow 500 450 400 Flow rate [L/min (ANR)] 350 Flow setting: Max.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Port size 1/4 02 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors In the case of alone Terminal block Sub-plate 02 PW VQ2000 Dimensions 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Port size 1/4 02 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors In the case of alone Terminal block Sub-plate 02 PW VQ2000 Dimensions 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <

5 Port Air Operated Valve Series SYA3000/5000/7000 1

-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

Speed Controller with Indicator

30.2 (30.3) 23 (24) AS221FS-02-03 (S) 5/32" 8.2 AS221FS-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FS-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8"

Series SV

-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions

Vacuum Pad

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

Vacuum Pad

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

Vacuum Pad

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

Vacuum Pad

41 41 43 43 43 154 189 225 156 191 227 103 103 103 103 128 128 128 128 63 63 63 65 65 65 115 151 191 226 115 151 191 226 186 222 262 297 186 222 262 297 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 57 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPX HB -A18 01 ZPX HB -A18 63 80 01 ZPX HB -A22 100 125 Width across flat 17 (Hexagon) 1/8 (Rc, NPT, NPTF) 50 21 M22

Thermo-chiller

type 1.8 [1.0] 41 to 95 [5 to 35] (400 V as standard) HRSH090 Inverter type 0.18 [0.1] 41 to 104 [5 to 40] Indoor use (400 V as standard) UL Standards (To be obtained) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.18 [0.1] 41 to 95 [5 to 35] (200 V only as an option) 4 Thermo-chiller Standard Type Series HRS100/150 Circulating Fluid Temperature Controller

Sine Cylinder Series REC

NT-02 NT-03 NT-04 26 30 25.5 M20 x 1.5 8 13 15.0 12.5 M8 x 1.25 5 32 37 31.5 M26 x 1.5 8 17 19.6 16.5 6 M10 x 1.25 41 47.3 40.5 M32 x 2.0 10 22 25.4 21.0 8 M14 x 1.5 Trunnion Nut Material: Carbon steel (mm) C D d H B Applicable bore size (mm) 20 25, 32 40 Part no.