Valve Single Unit

548 37 560.5 38 573 39 585.5 40 598 41 610.5 42 623 43 635.5 Mounting screw tightening torques L dimension 44 648 45 660.5 46 673 47 685.5 No. 48 698 49 710.5 50 723 51 735.5 52 748 53 760.5 54 773 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm L dimension 55 No. 785.5 56 798 57 810.5 58 823 59 835.5 60 848 61 860.5 62 873 63 885.5 64 898 65 910.5 L dimension 66 923 67 935.5 68 948 69 960.5 No. 70 973 71

3 Port Solenoid Valve Series VQ100

DXT170-71-1 VQ Crimping of lead wires and sockets VKF Peel 3.2 to 3.7 mm of the tip of lead wire, enter the core wires neatly into a socket and crimp it with a special crimp tool. Be careful so that the cover of lead wire does not enter into the crimping part. (Crimping tool part no.: DXT170-75-1) VQZ Note) Ensure the locking type manual override is unlocked before using.

VHK

1.2 31 54 14 32 59 17 6 8 VHK-B1A 44.5 14.5 27 22 16.5 26 9.7 7.2 1 4 22 46 73.8 30.5 43.3 76.3 31.5 44.8 21.5 4 20.8 21.8 14 3.2 49 68 19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17 40 60 6 8 VHK-B1A 44.5 11.5 27 22 16.5 26 9.7 7.2 3 8 22 46 74.8 30.5 44.3 77.3 31.5 45.8 21.5 4 20.8 21.8 14 3.2 51 68 19 64 71

e

Nominal size Stroke Nominal size: 16 101.7 (74.7) (40) 60 80 Workpiece mounting center line 70 27 27 74.7 (60) LJ1 LJ1 72 40 Motor 102 42 60 LG1 LG1 43.5 71 (60) 60 LTF LTF 123 43 129 72.4 4 x counterbore depth 3.5 22 21.3 40 LC1 LC1 32 3.5 through 9.8 LC7 LC7 4 5 6 16.5 28 4 x M4 x 0.7 depth 7 LC8 LC8 T-slot section for mounting 4 5.6 (Max. 8.6) 14.4 152 + Stroke LXF LXF Encoder cable on

3 Port Solenoid Valve Series VQ100 1

DXT170-71-1 VQ Crimping of lead wires and sockets VKF Peel 3.2 to 3.7 mm of the tip of lead wire, enter the core wires neatly into a socket and crimp it with a special crimp tool. Be careful so that the cover of lead wire does not enter into the crimping part. (Crimping tool part no.: DXT170-75-1) VQZ Note) Ensure the locking type manual override is unlocked before using.

VHK

1.2 31 54 14 32 59 17 6 8 VHK-B1A 44.5 14.5 27 22 16.5 26 9.7 7.2 1 4 22 46 73.8 30.5 43.3 76.3 31.5 44.8 21.5 4 20.8 21.8 14 3.2 49 68 19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17 40 60 6 8 VHK-B1A 44.5 11.5 27 22 16.5 26 9.7 7.2 3 8 22 46 74.8 30.5 44.3 77.3 31.5 45.8 21.5 4 20.8 21.8 14 3.2 51 68 19 64 71

Air Catch Sensor Series ISA

With n stations, it attaches to the first switch and the nth switch. 3 105 36 4 140 71 5 175 106 6 210 141 2 70 Station L1 L2 PSE IS ISG ZSM Body Manifold With DIN rail L1 Lead wire (5 m) 35 (18) Deviation level indicator light Deviation level indicator light SUP port 25 25 Rc 1/8 90 SUP DIN rail center 4.5 90 35 4.5 35 40 30 (4.5) 35 70 Setting dial Gauge Gauge L2 L3 12 EXH port Station

Electric Slide Tables

phase (800 pulse/rotation) 24 VDC 10% 68 9 (Horizontal)/23 (Vertical) 102 Non-magnetizing lock Actuation type Guide type Operating temperature range [C] Operating humidity range [%RH] Motor size Motor output [W] Motor type 20 10 42 36 Encoder (Angular displacement sensor) Rated voltage [V] Power consumption [W] Note 4) 97 16 (Horizontal)/32 (Vertical) 111 42 8 (Horizontal)/19 (Vertical) 71

3 Position Cylinder Series RZQ

(mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 32 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc 1/8 24.5 14 10 5.5 7 4.5 49.5 14 40 110 92 28 14 M10 x 1.5 26 57 16 52 35 9 69 5 24 18 40 5.5 M6 x 1.0 9 Rc 1/8 14 10 5.5 7 4.5 14 50 118.5 96.5 M8 x 1.25 35 14 M10 x 1.5 30 71 16 64 37 12 86 7 30 22 50 6.6 11 Rc 1/4 17 14 3 8 5.5 19

2/3 Port Valve for Various

$ ' $ # ' ,*# ./ 01 ( *# ./ 2 01 $ ./ 23 ##4 #1 /47 .81 < :# /4; .71 + + 47 ./1 + /4 ./31 /;3 /;> /3 /3 17-3-4 Series VX / VXZ22/23 VXH22 VXF21/22 VX31/32/33 . !"! !#! !"! !"! !"! 0 !#! 0"!#! !"! 0 !#! 0" #!

Direct Operated

VX31 VX31 VX32 VX33 1/8 1/4 1/4, 3/8 1/4, 3/8 46 91.5 1.5, 2.2, 3 Mounting hole 4 x 5.5 30 48.5 41 65.5 42 53.5 100.5 41 69.5 R S 1.5, 2.2, 3 2.2, 3, 4 2.2, 3, 4 33 36 56 51.5 51 68.5 52 56.5 103.5 51 72.5 105 64.5 54 59.5 71 60.5 59 106 59.5 75 113 (mm) Grommet Conduit DIN terminal Electrical entry (DC, AC/Class H) B Model Orifice diameter A Bracket mounting Port size P C D E F H Conduit

Digital Flow Switch (Integrated display type)

Refer to the dimension drawing of the bracket (page 71) for mounting hole dimensions. DIN rail mounting (using ZS-33-R) Mount the DIN rail mounting parts using DIN rail mounting screws and joint screws supplied.

Rotary Actuator/Vane Style Series CRB1

) 110 95 22 48 4 100 17 29 14 38 62 (63) 124 (139 ) 36 1/8 140 (155 ) 70 (71) 140 125 22 48 4 100 23.5 29 14 38 62 (63) 124 (139 ) 42.5 1/8 128 Series CRB1 (Size: 50, 63, 80, 100) Simple Specials: -XA1 to -XA24: Shaft Pattern Sequencing Shaft shape pattern is dealt with simple made-to-order system (Refer to front matter 33).

Electric Actuator

to 100 106.1 76.5 16 16.1 6.6 2.8 5.4 101 to 300 126.1 96.5 LG 15 to 100 136.6 99 25 19.8 6.6 3.5 8.4 LY 101 to 400 161.6 124 LH LT 20 to 100 155.7 114 32 19.2 6.6 4 11.3 101 to 500 185.7 144 4 x LD LX X X Y Y Stroke range (mm) LZ LS + Stroke LH LT LX LY LZ X Y Size A + Stroke 10 to 100 16 24 2.3 48 40.3 62 9.2 5.8 Special cap bolt 101 to 300 Outward mounting 15 to 100 25 30 2.6 57 51.5 71

Mechanically Jointed Rodless Cylinder Series MY1

head taper plug) A N Z + Stroke Rc 1/2 (Hexagon socket head Rc 1/2 (Port) taper plug) (WW) (WW) XX XX Rc 1/2 (Hexagon socket head taper plug) Rc 1/2 (Port) VV VV 2 x Rc 1/2 2 x Rc 1/2 (Hexagon socket head taper plug) (Hexagon socket head taper plug) MY1BG MY1BG (mm) PA PB Model A G GB H L LD LL LW MM N NN NW M NC NH PE 80 65 MY1B 80 345 60 71.5 150 340 14 175 112 M10 x 1.5 85 35 140 20 71

/

N.O. 2-port 7 MPa 59 14 19 63 19 61 3 MPa 7 MPa 3 MPa 7 MPa 52 59 52 59 71 56 59 56 59 71 79 55 17 14 17 14 7 7 14 7 14 7 9 9 22 19 22 19 12 12 19 12 19 12 15 15 56 63 56 63 75 60 63 60 63 75 83 59 22 19 22 19 12 12 19 12 19 12 15 15 54 61 54 61 73 58 61 58 61 73 81 57 SGH200 3-port 3-port dual pressure type N.C.

5 Port Solenoid Valve Series VQZ1000/2000/3000

DXT170-71-1 + Connector Lead wire Hook Circuit breaker q, e: Examples of anti-surge measures w: Valve equipped with diode to prevent reverse current 976 DC power supply Series VQZ Specific Product Precautions 2 Be sure to read before handling. Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port Solenoid Valve Precautions.

Pilot Operated

.): VXD2272/2382/2392 Grommet: G N J K Approx. 300 C M F (P.C.D) D B IN OUT 8-18 L E H A DIN terminal: D Conduit: C Approx. 280 N (N) J J (44) G 1/2 M M G 1/2 Cable 6 to 12 (Q) Conduit terminal: T J (N) 32 25 G 1/2 M (mm) Grommet Conduit DIN terminal Conduit terminal Electrical entry (AC/Class B coil) Model M 93 N 33 36 36 M 88 N 51.5 54 54 M 89 N 68.5 71 71 Q 56.5 59 59 M 88 N 103.5 Q 72.5

Air Slide Table Series MXQ

-50 12 6.5 NA x M6 x 1 thread depth 6 12 36 48 25 K 12 6.5 41.5 0.5 6.5 46 Z ZZ (NN-1) x H G H 26 10.5 26 10.5 A B 5.1 5.1 9.5 9.5 11 11 29 6 B A NN x M6 x 1 thread depth 12 5H9 depth 5 HA GA 5H9 depth 5 +0.030 0 Section AA Section BB +0.030 0 (mm) ZZ 108 108 108 118 136 169 226 254 282 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5 K 31 41 51 61 71

VDW

P Series 200 VCL VDW20 15A 1 VCS P Series 300 VCW VCW20 12 01A 257 Series VDW200/300 Dimensions VDW250-lF VDW350-lF 40 30 27 20 6.35 6.35 11.4 14 34 25 20 27 SMC 3 (N.O.) port M5, 1/8 (Bracket mounting hole) 2 x 3.5 3 (N.O.) port 1/8, 1/4 4 x 5 9 36.5 9 29.6 28 10.5 17.5 20.5 14.3 6.7 (for grounding) M3.5 (for grounding) M3.5 0.8 0.8 86 (82.5) 71 *-***-*-* VDW250-*F*-***-*-* VDW350-*F46.2