4 ZL3 only Supply valve/Release valve Vacuum pressure sensor Ejector q Max. suction flow rate w Standard supply pressure e Vacuum (2/V) port size/ Supply (1/P) port applicable tubing O.D. r Exhaust method 3 300 L/min (ANR)*1 M 0.35 MPa H 0.50 MPa Nil Silencer exhaust 6 600 L/min (ANR)*1 Symbol Vacuum (2/V) port Supply (1/P) port 06 Rc3/4 P Port exhaust (Rc1, G1, NPT1)*3 *1 Branch, Port exhaust
) 8 8 . 0 ( 4 9 . 1 ) 0 . 1 ( 1 2 . 2 ) 5 1 . 1 ( 4 5 . 2 ) 5 8 . 1 ( 8 0 . 4 ) 9 . 1 ( 9 1 . 4 ) d r a d n a t s ( d r a u g l w o B t e k c a r B P 4 4 B P 1 4 4 B P 1 5 4 B P 2 5 4 B P 6 4 B F 8 6 e r u t a r e p m e T , 2 3 G V 1 # l i o e n i b r u t e s u , n i m / s p o r d 5 e t a r p i r d l i o g i s p 3 7 f o e r u s s e r p y l p p u s h t i W * s e i r e S T L A N k n a T
S07B5 4(A) 2(B) 5(R1) 3(R2) 1(P) 5 (R1) 4 (A) 1 (P) 2 (B) 3 (R2) y t N.O. + N.O. Component Parts S07C5 2(B) No.
8 1/4 3/8 1/2 11/2 1 2 Display unit Sensor unit range l/min PFA510 550 511 521 551 PFA710 750 711 721 751 703H 706H 712H P P P 1 to 10 PFA30m P P P 5 to 50 P P P 10 to 100 31m P P P 20 to 200 P P P 50 to 500 P P P P 150 to 3000 P P P P 300 to 6000 P P P P 6000 to 12000 Series variations For Water Flow rate Remote type Output specification Port size (Rc, NPT, G) Integrated measurement display
A R 04 Z A q w e r u t y N Common Supply Type 1.
A U T O S W I T C H C A P A B L E N U M B E R O F S W I T C H E S Not Switch Capable D Switch Capable With Built-In Magnet 2 Pieces S 1 Piece n n Pieces M O U N T I N G B O R E S I Z E See NCJ2 Accessories Section A P P L I C A B L E A U T O S W I T C H B Basic L Axial Foot F Rod Side Flange D Double Clevis (Except for 6) 6 (1/4) 10 (3/8) 16 (5/8) P O R T L O C AT I O N O N H E A D C O V
A R 1 04 A Z Common supply type 1 2 3 4 5 6 1.
A R 1 04 A Z Common supply type 1 2 3 4 5 6 1.
Combination example q A Spacer with bracket F S 2 x P (Port size) J M Line Filter AFF30-03-D 1 pc. Mist Separator AM30-03-D 1 pc. Spacer with Bracket Y300T-D 1 pc. R V1 V2 Q1 Q21 Q1 C Y300T-D U G Maintenance space E AFF30-03-D AM30-03-D 1 Q2 (Sizes 20, 40) Q1 (Size 30) Combination example w A Spacer with bracket N F 2 x P (Port size) J M S Mist Separator AM30-03-D 1 pc.
(mm) Mounting screw P L1 H2 D W1 L2 H1 W2 W3 Model (Nominal x Length) 6 4 TM-04 TM-06 TM-08 TM-10 TM-12 6 3.25 72.5 4.5 5.5 6 6.5 6.5 10 5 7.5 7.5 8 12 12 8 10 11 12 12 17 21 23 25 25 2.2 2.8 2.8 3.2 3.2 2 x 6 4.5 91.5 9.5 5.5 77.5 6 12.5 7.5 77.5 6 15 9 93 6.5 2.6 x 8 2.6 x 8 3 x 8 3 x 8 12 10 8 16.3 8.8 14.3 7.5 12 9.8 How to Use Caution 1.
absorbers Intemal shock absorbers ' M S O P / B 1 , 2 . 3 & 7 o n y .
Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K L M C D E H I A A B F 5.5 P M5 x 0.8 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 14 7 34 33 Rc 1/8 7.5 10.5 13 16 45 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 14 7 40 Rc 1/8 8 11 13 16 52 69 11 8 M10 x 1.5 50 Rc 1
Center trunnion: CS2WT z+ 1 '2 stroke Width across ilats KA 2, P G -! P IRe ,NPT , G) ...,.,l\ With rod boot Width across flats KA , I J I ~ G M ~1<;lL, 1~ '-~ {~ ~~j I" OJ > -~ I ~ ~ rI< I AL ~ ~ " I 0 c ~ c .s.!! ~ H S + Stroke Ji.'.
3 (R) port 3 1 (R) (P) 7.4 3 (13) M plug connector (M) L plug connector: 10-VQD1151-L-M5 M plug connector: 10-VQD1151-M-M5 5 5 5.5 2(B) 4(A) Direct manual override Lead wire length 300 mm 27 Indicator light 17.6 5.5 12 11.2 3 3(R) 9 2-3.5 mounting hole 10.9 9.1 5.5 33.5 28.5 37 38 1(P) 1(P) 4-M5 x 0.8 13 L plug connector (L) (P, A, B, R port) 49 50.5 M plug connector (M) 634 4 port direct
) 03 (3, 1/8"), 04 (4), 06 (6), 07 (1/4") only Table 1 Tubing Size Symbol Metric size Inch size Tubing O.D. 3 03 4 04 6 06 8 08 10 10 12 12 19 19 25 25 1/8" 03 1/4" 07 3/8" 11 1/2" 13 3/4" 19 1" 25 Symbol Note 1) GPS GB GB GPS Fitting type Note 1) Sizes with the same symbol number and 06 and 07 are common sizes. 6 c Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN
Silencer Compact resin type Metal body type High noise reduction type Part Part number number AN20-02 AN30-03 AN40-04 AN500-06 AN600-10 AN202-02 AN302-03 AN402-04 ANA1-06 ANA1-10 Piping size 1/4 3/8 1/2 3/4 1 1/4 3/8 1/2 3/4 1 AMA20#-##C-#-#L# NC AMA20#-##D-#-#L# NO AMA30#-##C-#-#L# NC AMA30#-##D-#-#L# NO AMA40#-##C-#-#L# NC AMA40#-##D-#-#L# NO AMA60#-##C-#-#L# NC AMA60#-##D-#-#L# NO -147No.PF-OMA1007
Solenoid direction Port size Opposite side of A port Nil 1 8 Rc G NPT NPTF 01 Rc Nil C4 4 cassette F N T Same side of A port S C6 6 cassette P port: Rc 1/8 R port: Rc 1/8 A port: Rc 1/8 Valve stations Type S42 (Solenoids on the same side of A port) 01 1 station CE-compliant VV061 20 20 stations Q CE-compliant Nil P port: Rc 1/8 R port: Rc 1/8 VV100 Note) Applicable only for DIN terminal
A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000
MM N NA NN P Z ZZ S TD TT TX TY TZ Bore (mm) 20 30 M20 x 1.5 36 1/8 200 52 146 8 10 32 32 M8 x 1.25 20 25 34.5 M26 x 1.5 40 1/8 204 60 146 9 10 40 40 M10 x 1.25 20 32 42.5 M26 x 1.5 40 1/8 217 60 159 9 10 40 40 M10 x 1.25 22 40 51 M32 x 2 44.5 1/4 247 77 181 10 11 53 53 M14 x 1.5 26.5 Head side trunnion style: RECT (Rc, NPT, G) 2 x P -0.025 -0.061 TDe9 G G 2 x NN H1 Plugged (M5 x 0.8) Width
MM N NA NN P Z ZZ S TD TT TX TY TZ Bore (mm) 20 30 M20 x 1.5 36 1/8 200 52 146 8 10 32 32 M8 x 1.25 20 25 34.5 M26 x 1.5 40 1/8 204 60 146 9 10 40 40 M10 x 1.25 20 32 42.5 M26 x 1.5 40 1/8 217 60 159 9 10 40 40 M10 x 1.25 22 40 51 M32 x 2 44.5 1/4 247 77 181 10 11 53 53 M14 x 1.5 26.5 Head side trunnion style: RECT (Rc, NPT, G) 2 x P -0.025 -0.061 TDe9 G G 2 x NN H1 Plugged (M5 x 0.8) Width