MXF www.stevenengineering.com 37 CX 5H9 depth 5 +0.030 0 5H9 depth 5 +0.030 0 92 DNN-4.2 26 11.5 NN-8 -X 208.5 H 2-M5 x 0.8 thread depth 12 Data 5.5 NN-M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104
San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9.5 34 6 24.5 63.5 64.5 34 34 32 7 32 7 6 20 20 11 6 15 NS 15.5 52.5 + Stroke 68 + Stroke 32 4-M5 x 0.8 depth 8 10 + Stroke 15 20 (mm) Stroke (mm) LB LT NS LA J 5 64 20 4 10 10 20 64 4 10 15 25 20 74 4 20 74 25 20 4 25 84 40 4 30 30 40 84 4 30 40 50 20 20 94 6 50 25 104
pilot) -100kPa to 0.7MPa (external pilot, pilot pressure range) 0.25 - 0.7MPa , Effective area mm 2 (Cv): body ported 10.6 (0.59); base mounted 12.6 (0.7) , Coil rated voltage: 3, 5, 6, 12, 24VDC; 100, 110, 200, 220VAC , Response time (0.5MPa) w/o indicator light & surge voltage suppressor: 32ms or less , Ambient & fluid temperature: 50°C 4/5 PORT SOLENOID VALVE. 5 port solenoid valve. 104
Parallel input Parallel output 11 inputs (Photo-coupler isolation) 13 outputs (Photo-coupler isolation) A/B phase, Line receiver input Resolution 800 p/r A/B/Z phase, Line receiver input Resolution 800 p/r Compatible encoder RS485 (Modbus protocol compliant) EEPROM LED (Green/Red) one of each Forced-lock release terminal I/O cable: 5 or less Actuator cable: 20 or less Natural air cooling 32 to 104
temperature range [C] 5 to 40 Operating humidity range [%RH] 90 or less (No condensation) Motor size 42 56.4 Motor type Step motor (Servo/24 VDC) Electric specifications Encoder Incremental A/B phase (800 pulse/rotation) Rated voltage [V] 24 VDC 10% Power consumption [W] Note 10) 40 50 Standby power consumption when operating [W] Note 11) 15 48 Max. instantaneous power consumption [W] Note 12) 48 104
40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104
Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F Weight IDF-TR500-1 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 500 VA Singlephase Singleturn 78 94 100 64 75 4.2 x 7 (Long hole) 1.5 kg 100 VAC (50 Hz) 100, 110 VAC (60 Hz) 110 VAC (50 Hz) 110 to 120 VAC (60 Hz) IDF-TR1000-1 IDF11E-10, 15E1-10 IDU6E-10, 11E-10, 15E1-10 1 kVA 104 122 134 75 114 4.2 x 9 (Long hole) 4 kg
Minimum inlet temperature 35F Maximum inlet temperature 122F Minimum ambient temperature 41F IDW4N-IDW35N IDW45N-IDW365N Purge rate 20% IDW04N-IDW175N IDW215N-IDW365N Dryer correction factors Operating pressure (psig) 58 72 87 100 116 130 145 160 174 189 203 218 232 Pressure correction factor (PCF)* 0.62 0.75 0.87 1 1.12 1.25 1.37 1.5 1.62 1.75 1.87 2.0 2.12 Temperature (F) 68 77 86 95 104
Piston area [mm2] Operating pressure [MPa] 0.2 0.3 0.4 0.5 0.6 0.7 Refer to page 8 for cylinders with auto switches. 12 6 OUT 113 23 34 45 57 68 79 IN 85 17 25 34 42 51 59 Auto switch proper mounting position (detection at stroke end) and mounting height Minimum stroke for auto switch mounting Operating range Auto switch mounting 16 6 OUT 201 40 60 80 101 121 141 IN 173 35 52 69 86 104
Relation between Operating Temperature and Maximum Operating Pressure Particulate Generation Classifications 105 1.2 Particle concentration (Particles/m3) Maximum operating pressure MPa ISO class 6 1.0 104 ISO class 5 0.8 103 ISO class 4 0.6 102 ISO class 3 0.4 10 0.2 0.1 0.5 1 1 0 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to SMC Pneumatic Clean Series (CAT.E02
For 200 mm stroke or more) Vent hole (20) 88 Required space: J5 Opposite end [Origin end]2 Rod operating range1 Origin end2 (35.6) [Opposite end] Setup communication connector (M12) Width across fats 144 Stroke 2 2 4 x M4 x 0.7 thread depth 7 M5 x 0.8 27 23 32 thread depth 10 Parallel I/O connector (M12) (96) 0.2 35.5 33.75 18 0.2 16 25.5 Power supply connector (M12) 25.5 10.5 B + Stroke 104
cleaning fluid, Industrial water (Vessel material: Stainless steel) Oil-based coolant, Cutting oil (Vessel material: Carbon steel) Cover Case Legs Seal Stainless steel 304 [FGFS/L] Stainless steel 304 Note 6) Material Carbon steel NBR or FKM Note 2) [FGFC/R] Carbon steel 100(4B)JIS10KFF Rc2 150(6B)JIS10KFF Port size Internal volume Weight Pressure gauge Note 4) Note 3) 23 L 13 kg 35 L 16 kg 104
Dimensions Differential pressure indication switch 62 F Differential pressure indicator Blanking cap (65) A 2 x Rc (d) (34) C D C C IN OUT IN IN OUT OUT E (Element removal dimension) Differential pressure indicator Differential pressure indication switch B DRAIN (mm) d A B C D E F Weight (kg) Model FH100-06 FH100-08 FH100-10 FH100-12 FH100-16 FH100-20 FH100-24 3/4 102 90 35 200 290 2.5 1 104
HRSH HRSH Breaker handle Note) Circulating fluid outlet Rc1 Overflow port Rc1 HRSE Circulating fluid return port Rc1 1235 556 851 1114 Contact input/output communication connector HRZ Serial communication (RS-485/RS-232C) connector D-sub female receptacle Fluid level indicator 428 421 278 110 108 HRZD C C Signal cable entry (Hole 40) (Grommet with membrane) HRW Power terminal 382 305 270 104
As regards rated current, refer to Applicable circuit breaker capacity on pages 93, 96 and 99. 104 B IDFAE/F Series Specific Product Precautions 2 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 6 to 8 for Air Preparation Equipment Precautions.
2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dust-protected SI unit: L5 = 10.5n + 97, L6 = L3 + 25, L7 = L4 + 25 Formula L1 = 10.5n + 44.5, L2 = 10.5n + 72.5 n: Station (Maximum 16 stations) 2 L n Dimensions 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 (L3) (L4) 65.5 76 86.5 97 107.5 118 128.5 139 149.5 160 170.5 181 191.5 202 212.5 93.5 104
(P.124) 104 Series AP3000 Diaphragm Valve for Ultra High Purity Air operated type (For high pressure) AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material S 316L SS secondary remelt Electropolish + Passivation H Wetted Parts Body Surface finish Diaphragm Seat Hastelloy
ARP IR-A IN (Common IN, with plug) IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104
AW2001 AW3001 AW4001 6) Valve ass'y Brass NBR 1349160 131521 6A 13 16212A e Filter element Bronze 11 294-5B 11 1511-5B 11 104-5B Baffle ABS resin 11295 111522 111622 0 Diaphragm ass'y NBR 131445A 131 52 15A 1316211A Deflector ABS resin 112961 11158 11167 Ci) Bowl ass'y 1'<0'., Polycarbonate C200F C300F C400F 0 Valve spring Stainless steel 13491 58 131525 131625 C!!)
AS2052F-08 AS3002F-06 AS3002F-08 AS3002F-10 AS3002F-12 AS4002F-10 AS4002F-12 AS-31B AS-32B AS-33B AS-34B AS-35B AS-36B AS-37B AS-38B AS-41B AS-42B AS-43B AS-44B AS-45B AS-46B AS-47B AS-48B AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 AS-31B AS-32B AS-33B AS-34B AS-35B AS-34B 38 62 72 90 104