Rotary Table/

Auto Switch Internal Circuits Auto Switch Weights Unit: g D-F8N D-F8N D-F8P D-F8B Model DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 32 32 Main switch circuit Main switch circuit Main switch circuit OUT Black 5 52 52 52 DC () Blue Auto Switch Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting thread M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC

5 Port Air Operated Valve

] 52 1504 5 Port Air Operated Valve VFA3000/5000 Series Single Unit Base Mounted RoHS How to Order Valve VFA 3 1 4 0 Base mounted (VFA1000: Not available) 02 Pilot port direction Series 3 5 VFA3000 VFA5000 Nil: Upward P: Lateral Pilot port Not available with the VFA1000.

VCW

AZ-T-VCW Valve model no. on page 17-2-52/57. Tilt the screwdriver down in direction q so that the clip slides out in direction w. Seal part no.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 Built-in silencer P.1.10-48 P.1.10-52 C C6 (6) C8 (8) C8 (8) kit N7 (1/4) N9 (5/16) N9 (5/16) Built-in silencer P.1.10-48 P.1.10-52 C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) Built-in silencer P.1.10-80 P.1.10-82 1.10-5 Cylinder Speed Chart Series VQ0 Cylinder bore size (mm) Series CA1 Pressure 0.5MPa Load factor

MXS

60 85 130 I 10 10 10 10 22 43 52 NN 2 2 2 3 3 4 5 H 40 40 40 25 36 36 38 G 15 15 15 17 15 25 35 ZZ 80 80 80 92 112 158 212 N 4 4 4 4 6 6 6 M 71 71 71 83 103 149 203 GA 15 15 15 42 51 61 111 KA Z 70 70 70 82 102 148 202 NA 2 2 2 2 2 4 4 Refer to "Dimensions" of MXS 12 on p.3.11-17 for one with shock absorber as symmetric.

Title not found

L1 L2 L2 Main circuit power supply L3 L3 Regenerative converter N P1 P2 N DC reactor Connect between P1 and P2. (Connected at time of shipping.) P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D L11 L21 Connect between P and D. (Connected at time of shipping.)

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H

VN-OMP0001

) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) Air operated Solenoid Port VNC02 12 (P1) External pilot Bleed port External pilot 10 (P2) Bleed port External pilot Pilot exhaust Ass Ass Ass Ass y y y y VNH VNH VNH VNH () 3 3 3 3 (VNH (VNH (VNH (VNH ) ) ) ) VNH13 3 5MPa 7 VN-OMP0001 VNC VNC VNC VNC VNH VNH VNH VNH / / / / (VNC (VNC (VNC (VNC ) ) ) ) /30m /30m 0.49MPa

Adsorption Plate

A B ZCUK AMJ Rc 1/8 Rc 1/8 AFJ AMV P1 P1 ZH -X185 P1 P2 P3 Base part no. Adsorption surface size SP1130 SP1230 SP1330 SP1430 SP1530 SP1630 50 x 50 55 40 10 Related Products 100 x 100 95 50 10 P2 P3 P2 P3 150 x 150 120 75 10 200 x 200 145 100 10 Rc 1/8 Rc 1/8 P3 P3 250 x 250 170 125 10 300 x 300 195 150 10 Square Rc 1/8 Rc 1/8 P1 P2 Base part no.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

52 14 41 118 2 1 1/4, 1 1/2, 2 (IN, OUT port) 105 Note) External pilot port (PA port) 1/4 is processed for threads in external pilot model only.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 10 10 14 18 18 22 26 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/8 1/2 1/2 84 90 98 116 126 146 159 170 204 215 RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-4-17

Table of Contents

46 55 63 69 S 33 36 40 46 50 52 Z 46 52 56 65 73 79 6 10 16 20 25 32 7 9 12 16 20 24 6 depth 4.8 6 depth 5 7.6 depth 6.5 9.3 depth 8 9.3 depth 9 11 depth 11.5 5 7 Free Mount Cylinder Double Acting, Single Rod Series CU Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A9 D-M9 D-F9W 22 (24.5) ( ): Denotes the values of D-A93.

MLGP

Bore size (mm) c e b d a 40 50 63 5.5 7.5 10 11 13.5 18.5 10.5 13.5 17.8 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64

Ionizer

L KJH04-M5-X34 14 14 16 36 20 30 19 14 4 x M4 x 0.7 depth 5 (For mounting, opposite side: Same) 16 20 17 52 58 Emitter cartridge Maintenance detection level selection switch Frequency selection switch Balance adjustment trimmer n (Number of emitter cartridges), L Dimension, Weight Part no. n L (mm) IZS31-460--X10 IZS31-540--X10 IZS31-700--X10 IZS31-860--X10 IZS31-940--X10 IZS31-1020--X10

48

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 51 5 2 101 10 D-M9W 1 52 2 102 10 D-M9WV D-M9AV 1 52 2 10 D-M9A 1 52 2 102 1 Confirm that it is possible to secure the min. bending radius of 10 mm of the

Slider Type Ball Screw Drive/11-LEFS Series

with lock [kg] S4: 0.7/S8: 0.7 523 523 11-LEFS Series AC Servo Motor Clean Room Specification Dimensions: Ball Screw Drive 11-LEFS25 +0.025 0 3H9 ( ) depth 3 (102) Encoder cable (7) 64 4 x M5 x 0.8 thread depth 8.5 Motor cable (6) Body mounting reference plane Note 1) 45 38 50 3.5 +0.025 0 3H9 ( ) depth 3 Motor option: With lock Encoder cable (7) Lock cable (4.5) (2.2) L Motor cable (6) (52

LFE-OMY0008

No.LFE*-OMY0008 / / / / / / / / LFE# SMC SMC SMC SMC 2 11 13 14 16 18 19 21 24 26 26 F1 OUT1 28 F2 OUT2 36 F3 40 F10 41 F20 45 F22 46 F30 47 F32 48 F33 50 F34 51 F80 52 F81 53 F82 54 F90 55 F98 56 F99 57 58 60 61 64 66 67 70 71 1 No.LFE*-OMY0008 (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

JXCx-OMT0030CN

JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23

MLGP

Bore size (mm) c e b a d 40 50 63 5.5 7.5 10 10.5 13.5 17.8 11 13.5 18.5 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64