.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T2 (-100 to 200 KPa), Option: MY (Plug for Individual Supply, Blocking the Air Supply Passage to D Side + Vacuum "V" port Release to Atmosphere Type, Check Valve: 1 pc)

.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T2 (-100 to 200 KPa), Option: R (with Manual Override for Residual Pressure Release)

Nominal Nozzle Size: ø1.0, Vacuum Port, Supply Port: Metric; Vacuum Port: ø8; Supply Port: Plug, Exhaust: Port Exhaust, Exhaust Sealing Valve: Exhaust Sealing Valve, Combination of Supply and Release Valve: Supply Valve: N.C.; Release Valve: N.C., Rated Voltage: 24VDC, Light/Surge Voltage Suppressor: Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar, Pressure Sensor: -100

Nominal Nozzle Size: ø1.0, Vacuum Port, Supply Port: Metric; Vacuum Port: ø6; Supply Port: Plug, Exhaust: High-noise Reduction Silencer Exhaust, Exhaust Sealing Valve: Exhaust Sealing Valve, Combination of Supply and Release Valve: Supply Valve: N.C.; Release Valve: N.C., Rated Voltage: 24VDC, Light/Surge Voltage Suppressor: Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar

Nominal Nozzle Size: ø0.7, Vacuum Port, Supply Port: Inch; Vacuum Port: ø5/16"; Supply Port: Plug, Exhaust: High-noise Reduction Silencer Exhaust, Exhaust Sealing Valve: Exhaust Sealing Valve, Combination of Supply and Release Valve: Supply Valve: N.C.; Release Valve: N.C., Rated Voltage: 24VDC, Light/Surge Voltage Suppressor: Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar

Nominal Nozzle Size: ø0.7, Vacuum Port, Supply Port: Inch; Vacuum Port: ø1/4"; Supply Port: ø1/4", Exhaust: High-noise Reduction Silencer Exhaust, Exhaust Sealing Valve: Exhaust Sealing Valve, Combination of Supply and Release Valve: Supply Valve: N.C.; Release Valve: N.C., Rated Voltage: 24VDC, Light/Surge Voltage Suppressor: Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Title not found

10SW-T2 10SW-T3 10SW-T1 Page 6 Distributed by Power Aire, Inc

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Shock Absorbers and Rate Controls

Compretied (lbr.) 0ttt.tftt(8) .24 0.28 l2-t30 50 0,000 2t5 0,5 0 I 0ffil.t 5tjl(B) 0.38 r 2. r30 l0 168,000 200 0.8 1.7 80 2 0tlt.25(B) 0.38 t2-130 50 178.000 200 0.8 1.7 8r 2 tR0EI[.25(B] .25 0.38 3 5 0 50 r78.000 200 0.8 1.7 100 2 0tfl.35(Bl .28 0.50 t2-r30 r50 300,000 450 1.0 2.2 t20 3 r.R0r .35(B) ,n 0.50 3-50 150 300.000 450 1.0 2.2 200 3 0 r . 5 ( B ) .44 0_50 t2-180 250 284.000 775

Integrated Controller

T4 = 0.15 [s] T2 = [s] L 0.5 V (T1 + T3) V The cycle time can be found as follows.

HRX-OM-X071

Option1 Null None Option2*2 With electric conductivity control DM function, Applicable to T1 Inverter pump DI water piping T2 High pressure inverter pump Applicable to DI water piping M Be sure to select either one. When multiple options are combined, indicate symbols in alphabetical order.

Table of Contents

(Sequence in selection graph (4), ) T2: 12 seconds.

Vacuum Equipment

(Sequence in selection graph (4), ) T2: 12 seconds.

240

Time [s] LEC SS-T T1 T2 T3 T4 T1 = V/a1 [s] T3 = V/a2 [s] LEC Y T2: Constant speed time can be found from the following equation.

Slider Type Ball Screw Drive/11-LEFS Series

T2 = T1 T2 T3 T4 200 0.5 300 (0.1 + 0.1) 300 = L : Stroke [mm] (Operating condition) V : Speed [mm/s] T1 = V/a1 [s] T3 = V/a2 [s] = 0.57 [s] T4 = 0.05 [s] T2: Constant speed time can be found from the following equation. (Operating condition) a1: Acceleration [mm/s2] Therefore, the cycle time can be obtained as follows.

Stability of suction position,

Adsorption Response Time with the Formula Adsorption response times T1 and T2 can be obtained through the formulas given below.

Table of Contents

ASS Dimensions ASR AS220M-01 02 AS120M ASF H 8 (Hexagon width across flats) L1 T2 24.8 (MAX. 29.8) 28.2 (MAX. 33.2) M5 x 0.8 L2 A L3 D1 9 10.3 10 M5 x 0.8 10-32 UNF D2 T1 9 Dimensions A L2 L3 T1 T2 H L1 D1 D2 Model Min. Min. Max. Max.

Environment

L Speed: V [mm/s] Cycle time T can be found from the following equation. a1 a2 T = T1 + T2 + T3 + T4 [s] T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. Time [s] T1 = V/a1 [s] T3 = V/a2 [s] T1 T2 T3 T4 T2: Constant speed time can be found from the following equation.

Vacuum

Voltage output Output voltage: I to 5V 12 5% F.S. or less (with rated pressure range) Linearity: 11% F.S. or less; Output impedancei Approx 1ko Outpul current: 4 to 20mA; t2 5% F.S. or less (wilh rated pressure range) Linearity: !