10

R R: Gripping point distance [mm] 6 MHL2 Series Construction 10 16 to 25 e r t u w y @4 @0 @1 @2 !7 !5 !8 @3 !3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.

Cylinder with Lock Series CNS

GB GA FA 4-J 4-FD Rc(PT) BP Unlocking port 2-Rc(PT) P Cylinder port GL GR G G Width across flats KA MM Q D EA E FY BF V FT VA AL A K F BN N N M C B FX FZ H S + Stroke ZZ + Stroke With rod boot 75 15 40 l h + l ZZ1 + l + Stroke Long strokes Rc(PT) BQ Plug with breathing hole BC element M GA T 4-J Width across flats KA 2-Rc(PT) P Cylinder port G G Rc(PT) BP Unlocking port GL GR GB 4-FD FA MM

Rotary Table

The basic formula for finding the moment of inertia is shown below. 2 r m I = m : Weight [ kg ] r : Center of gravity of load and distance of rotational axis [ m ] This represents the moment of inertia for a shaft with mass m, which is located at distance r from the shaft. The formula for finding the moment of inertia depends on the shape of the object.

39

L M N O P Q J K L M N O P Q Part no.

CL

3 m 5 m None Solid state switches marked with are produced upon receipt of order.

Cylinder with Lock

L1 l1 (Min.) l2 R SR (Max.)

IDU/IDF

Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

Environment

LEL M PA LEM M U D LEY K Note 2) 4 x O1 thread depth R L S M Y 4 x O1 thread depth R M EH PC A + Stroke B + Stroke LES LEPY LEPS XA H9 depth XA 6 x MO thread depth MR LER Section XX details MH LEH LEY -X5 LEY -X5 MA ML + Stroke MC MD Section XX XB 11LEFS XA XA H9 (MB) 11LEJS 25A[mm] LEC Size Stroke range [mm] A B C D EH EV H J K L M O1 R PA PB V LEC S 25 15 to 100 130.5 116 13 20 44 45.5

XM, XY

Nil Right flange surface Left flange surface A F J K M With indicator With indicator Without indicator Without indicator Flange side Flange side t Auto switch type r Temperature specifications XLA Symbol Auto switch Without auto switch (without built-in magnet) Remarks Temperature range 5 to 60C 5 to 150C Symbol Nil M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

LEC-OM02904

m i m 4 8 1 . 5 1 6 1 ( 1 8 . 5 5 ) m a x .

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Cylinder

F UJ ' r-, ~\\ _ \. / r\ o .-: . <-III o ~ \ ~ r c-~~ ~ d" -, Rod end without L --' thread r~ \ A~OSW'tCh MM 8 NN LZ --' l S (Across H at) .. s .I w J 2051 3Gst 1561 I (mm) ,5 st lost ~ 1551 sst l. l0S" 20" 1.30>1. P .

15

Dimensions: Motor Top/Parallel LEY25, 32, 63 ZZ Y2 Motor flange Motor LEF Rod operating range Note 1) (Stroke + G mm) H thread depth C LEJ T U M LEL EV J LEM D 4 x O1 thread depth R K Note 2) LEY Y1 B + Stroke L S M 4 x O1 M EH thread depth R LES XA H9 depth XA 6 x MO thread depth MR LEPY LEPS Section XX details MH LER LEH MD MC ML + Stroke Section XX XB XA H9 XA LEY -X5 L MA 11LEFS IP65

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: ø6 One-touch Fitting, Elbow Type, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: ø4 One-touch Fitting, Straight Type, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8)