3 Way,3 Port Solenoid Valve NVZ Series

n"*, "".""",o Apdlcable Y6lv.3 r{v2110-ooo-M5 NVZ120-8OO-M5 (Pressure to R) Top po ed NW32l-Or-O1 (Special Order onty) Notes .lt ls impossiblo to use NVZl10 and NVZ'I20 together on the standard manifold base. R Pod 20 stations lf there are more than 10 stations, exhaust from both sides of manifold. .In cas of NVZ120 manifold type, Supply air to "R" port of manitold base.

NVZseies

n"*, "".""",o Apdlcable Y6lv.3 r{v2110-ooo-M5 NVZ120-8OO-M5 (Pressure to R) Top po ed NW32l-Or-O1 (Special Order onty) Notes .lt ls impossiblo to use NVZl10 and NVZ'I20 together on the standard manifold base. R Pod 20 stations lf there are more than 10 stations, exhaust from both sides of manifold. .In cas of NVZ120 manifold type, Supply air to "R" port of manitold base.

High Vacuum Angle Valve, XL Series

(10-32 nominal) Rc(PT) 1/8 XLF Actuation port size M5 (10-32 nominal) Ports P, R Rc(PT) 1/8(Port P): M5(10-32 nominal) (Port) XLFV 0.06 0.09 0.11 0.15 0.4 0.5 Actuating solenoid valve recommended Cv factor (XLF) Service life (Million cycles) 3 2 0.25 (0.55) 0.45 (0.99) 1.1 (2.43) 1.6 (3.52) 3.0 (6.61) 4.8 (10.58) XLF Weight kg (lb) XLFV 0.29 (0.64) 0.49 (1.08) 1.14 (2.51) 1.66 (3.65) 3.06

5 Port Solenoid Valve SY Series

For R and U, DC voltage is only available. Power saving circuit is only available in the "Z" type.

VFR

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

R.

ZQ

ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP

Bernoulli Gripper

The pressure sensor is shipped together with the product but does not come assembled. 12 ZNC Series Dimensions: 30, 40, 60 Basic type M5 x 0.8 thread depth 4 Air supply port PB1 M5 x 0.8 thread depth 4 Multi-port2, 4, 6 4 x H thread depth J R 16.5 Counterbore diameter P, depth Q Counterbore diameter P, depth Q 6.5 45 45 30 M5 x 0.8 thread depth 4 Air supply port PA1, 4 120 120 A Counterbore

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

X 0.8 thread depth 10 P.C.D43 (Mounting thread) 80 120 15.5 120 C A 54 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 14 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 25 25 6-M5 X 0.8 thread depth 10 (A, B, C common view) 50 3-5 +0.02 0 depth 10 16h9 0 0.043 (A, B, C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 -0.05 5 0 0.03 5 0 0.03 4 Open: 37 Closed:19 2-M5 X

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

Modular Type Filter Regulator Series AW

r r u u u Drain Drain Drain Parts list Material No.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

M5 x 0.8 (External pilot port) 15.5 15.5 4 48 Manual override 4 Insulation: Black () B A 17.5 17.5 A B PE X P EB EA Insulation: Red (+) 35 17 17 56 65.4 62.5 M5 x 0.8 (Pilot EXH. port) 153.6 L 66.5 (For E type) (Lead wire length) 1.55 0.3 mm2 22 18 18 9.5 28 5 x 1/4" (Piping ports) L plug connector with cover (LL) 52-SY5240 (R) -LL-02 L 143.4 (Lead wire length)

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE

Air Slide Table

M5 x 0.8 5.4 7.4 MXQ16B M5 x 0.8 5.4 10.3 MXQ20B M6 x 1 9.2 14.5 MXQ8C M3 x 0.5 1.1 6.3 MXQ12C M4 x 0.7 2.7 8.5 8.

ARJ1020F

0.8 VEX NPT 1/8 NPT 1/8, M5 x 0.8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting 5/32" One-touch fitting NPT 1/8, M5 x 0.8 ITV 1/4" One-touch fitting JIS Symbol M5 x 0.8 female thread is cut inside the pipe.

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AS-FPQ/AS-FPG

Port size M5 01 02 03 04 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

3 Port Solenoid Valve

Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22 3 11 28.5 3.5 5 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Body ported S070C-G-32 Grommet

Vacuum Pad

Dimensions: Pad Unit ZP3P-20PTSF [Weight: 1.8 g] ZP3P-25PTSF [Weight: 2.2 g] 14 7 13 7 17.5 17 20 3 25 3 2 1.6 ZP3P-35PTSF [Weight: 4.7 g] ZP3P-50PTSF [Weight: 12.4 g] 20.5 10 20.5 10 22 19 35 4 50 4 3 4.5 Pad Mounting Dimensions 20PT/25PT 35PT/50PT R R 12.5 1.9 12 2.4 R R R R R R 10 7.5 3 13 10.7 4 R R R part has to be smooth with no corners. 2 ZP3P Series How to Order Vertical vacuum inlet