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Current output 4~20mA2.5% F.S. or less Repeatability 0.2% F.S. 2digit or less 0.2% F.S. 1digit or less response time 2.5ms or less (With anti-chattering function:20ms, 160ms and 640ms selection) Hysteresis Hysteresis mode and window comparator mode selection Port size R1/8 (with M5 female) Enclosure IP40 43 Vacuum Regulator Series IRV 60 l/min (ANR) Note) 100 l/min (ANR) Note) 150 l/min (

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Description Body class Symbol Bracket assembly LQ-GBL J, K 1, 2 J type K type 1, 2, 3, 4, 5, 6 L, M L type M type (for short piping) Table 1 Tubing size symbols Part No. Description Replacement parts Tubing O.D.

Plug-in Unit

: Serial transmission L Kit: Lead wire F, L, M and P kits 1 to 12 stations M Kit: Multiple connector C8 (For 8) C10 (For 10) T kit 1 to 10 stations 4150 S kit (without unit) Solenoid weight is not included.

Compact Cylinder with Air Cushion Series RQ

Knuckle Pin (common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel mm Material: Rolled steel mm Part no. Applicable bore size (mm) 20 25 32, 40 50 Applicable bore size (mm) Snap ring l Part no.

Low Profile Guide Type

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. DLead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ For details about auto switches with pre-wired connector, refer to pages 1648 and 1649.

MU

Snap ring m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part No.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

0.1 x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

x mcos + msin P m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Process Pump

min 1 to 20 L/min PA(P) Average discharge pressure 0 to 0.4 MPa 0.2 to 0.5 MPa (for 0 to 60C) Pilot air pressure PAX Air consumption 230 L/min (ANR) or less PB Dry Up to 1 m (inside the pump is dry) Suction lift Wet Up to 4 m (with fluid inside the pump) PAF PAF 80 dB (A) or less (excluding the noise from the quick exhaust and solenoid valve) 80 dB (A) or less (Option: with silencer, AN20

VQC

VVQ2000-F-L Electrical wiring specifications [-K] C3 C4 C6 M5 VVQC1000-19AD S C6 (SUP port) D-sub connector Terminal no. 6 One-touch fitting SOL.

Compact Cylinder with Air Cushion

Knuckle Pin (common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel mm Material: Carbon steel mm Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 Applicable bore size (mm) Snap ring l D d H B C Part no.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

approx. 300 Lead wire l approx. 300 21 27 20 27 Rectifying device AC type 20 27 Rectifying device 14 2 3.2 23.5 20 AC type 20.5 17 54 48 5 11 1 1 6 8 5 M5, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6) Lead wire l approx. 300 SMC SMC 30 40 1 1 Rectifying device AC type 45 25 34 28 Bracket assembly

RQ

Knuckle Pin (Common with double clevis pin) Rod End Nut d d Dd9 C m l L t m t H B Material: Carbon steel Material: Carbon steel Part no. Applicable bore size (mm) 20 25 32, 40 50, 63 80 100 Applicable bore size (mm) Snap ring l D d H B C Part no.

2–4

Nil (Example) A73C 3 m L A73CL 5 m Z A73CZ None.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ DNote 1) When using the 2-color indicator type, please make the setting so that the indicator is lit in red to ensure the detection at the proper position of the air gripper.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size Dd9 d L L1 m t Included retaining ring Part no.

Compact

45 L 15 50 CQ-M3 x 50 L 20 55 CQ-M3 x 55 L 25 60 CQ-M3 x 60 L 30 65 CQ-M3 x 65 L 35 70 CQ-M3 x 70 L 40 75 CQ-M3 x 75 L 45 80 CQ-M3 x 80 L 50 85 CQ-M3 x 85 L 20 5.5 D C 5 45 CQ-M3 x 45 L 10 50 CQ-M3 x 50 L 15 55 CQ-M3 x 55 L 20 60 CQ-M3 x 60 L 25 65 CQ-M3 x 65 L 30 70 CQ-M3 x 70 L 35 75 CQ-M3 x 75 L 40 80 CQ-M3 x 80 L 45 85 CQ-M3 x 85 L 50 90 CQ-M3 x 90 L 25 8 6 MXZ Series Dimensions: MXZ12

Compact Cylinder

F Q H thread effective depth C 4 x N through 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W G M K J 25 to 40 Minimum lead wire bending radius 10 Auto switch H thread effective depth C 4 x N through F Q 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W E M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G