EX510

Output unit How to Order EX510-FC 10 10.16 0.40 Cable length (L) 01 02 05 10 20 60 1 m 2 m 5 m 10 m 20 m 60 m Brown: +24 V Black: Communications + White: Communications Blue: 0 V L Note) (Reference: AWG18) Note) Branch cable length is a maximum of 20 m. Use the cable by cutting it into lengths of 20 m or shorter. w Branch connector (Unit 1 pc.)

Series: 25A-ZSE20, Rated Pressure Range: C (0 to -101 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specifications: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ZSE20, Rated Pressure Range: 0 to -101 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specifications: SI Unit Only, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation Manual: -

Soft Start-up Valve AV2000/3000/4000/5000 1

N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 VY1 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 G 22 29

HRX-OM-X071

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

0.01

Piping tubing length 0.4 0.8 Response time (sec) Response time (sec) Piping tubing length 10 m 0.3 0.6 8 m 8 m 5 m 0.2 0.4 5 m 3 m 3 m 0.1 0.2 1 m 0 0 0.35 0.05 0 0 0.16 0.02 0.3 0.25 0.2 0.15 0.1 0.14 0.12 0.1 0.08 0.06 0.04 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated

VM

plunger VM220-02-05 VM230-02-05 Polyacetal roller Hard steel roller Roller plunger VM220-02-06 VM220-02-06S VM230-02-06 VM230-02-06S Cross roller plunger VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Polyacetal roller Hard steel roller Toggle lever VM220-02-08 VM230-02-08 VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y VM220-02-30R VM-30AR Red Push button (Mushroom) VM-30AB Black

VXD21/22/23

PAX PB Model Grommet Electrical entry Conduit Conduit terminal DIN terminal Q N 60 62 62 Applicable flange N Q L K J B C H F E D A M 90 (100) 101 (111) 106 (116) N 25.5 28 28 M 82 (92) 93 (103) 98 (108) N M 82 (92) 93 (103) 98 (108) M 82 (92) 93 (103) 98 (108) Normally open Normally closed VXD2270 VXD2380 VXD2390 VXD2272 32A 40A 50A VXD2382 VXD2392 48 50 50 95 97 97 62 64 64 160 170 180 135

A

ON OFF IN SMC OUT R 7 Spacer L type bracket Spacer with L type bracket T type bracket Spacer with T type bracket Spacer with L type bracket Spacer with T type bracket T type bracket L type bracket L type bracket Spacer with L type bracket Applicable model T type bracket Spacer with T type bracket Applicable model Applicable model Model Y20T AV2000 B210T Y20L AV2000 AV2000 Y20 B210L Y30T AV3000

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

M L2 Pressure range Piping specification Symbol Description ISE70G 0 to 1 MPa ISE75G 0 to 2 MPa ISE76G 0 to 5 MPa ISE77G 0 to 10 MPa Symbol Description 02 Rc1/4 N02 NPT1/4 F02 G1/4*1 Option 3 Symbol Description Nil Operation manual Y None *1 ISO 1179-1 compliant Orifice K Operation manual + Calibration certificate Symbol Description Nil None T Yes*1 T Calibration certificate *1 Orifice

Pressure Relief 3 Port Valve With Locking Holes

Y600(T) and Old AC20 to AC60.

IDG

Tubing size (O.D. x I.D.) mm: 12 x 9 IDG30 IDG50 0 m 20 1 m 19 3 m 17 5 m 16 Note) In cases other than above model numbers, if the tube length is 5 m or less, an increase of the outlet air at the atmospheric pressure dew point will be 1C or less. Refer to pages 14-19-28 to 29. Construction Refer to pages 14-19-30 to 31.

Free Mount Cylinder for Vacuum Series ZCUK

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ How to Order Vacuum Pad Note) Refer to page 1252 for combination of cylinder and pad. In the case of pad direct mounting In the case of rod end male ZPT U N 02 B4 ZP U N 04 X11 Vacuum entry (Mounting thread diameter) Pad dia. (mm) Pad dia. (mm) Thread dia.

A-HEC-OM-J004

Function 5.4 Operation of Controller 5-7 A_HEC-OM-J004-4 Chapter 5 Operation PV [Tips] SV Status when temp. upper/lower deviation limit alarm occurs (at the time of shipment from the factory) O U T 1 O U T 2 Lights up when A L 2 C O M R D Y D I A L 1 temp. upper / lower deviation limit alarm occurs. AL1 LED lights up when temp. upper/lower deviation limit alarm occurs.

VT317

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil no. PVT317-001GBPVT317-G PVT317-001GB-L06 PVT317-G-06 PVT317-001CBPVT317-C Coil assembly with terminal part no.

Stainless Steel One-touch Fittings Series KG

Mounting hole T(M) L1 L2 Nylon Urethane 1 8 KGE04-01 16 35 25 40 29 14 16 27.5 31 28 31.5 33.5 27.5 33 11 15 11 15 17 7.5 13 4 M12 1 13 5.6 5.6 14 1 4 KGE04-02 17 1 8 1 4 3 8 1 8 KGE06-01 KGE06-02 KGE06-03 KGE08-01 17 6 M14 1 13.1 13.1 17 15 17 19 26.1 18.0 28 27 48 17 1 4 KGE08-02 M16 1 8 18.5 17 19 3 8 KGE08-03 15 19 35 1 4 KGE10-02 34.5 36.5 41.5 29.5 53 67 12.5 14 10 21 M20 1 21 22 24

Water-cooledThermo-chiller

M Contact input/output signal M Serial RS-485 communication M Analog communication (Refer to Options on page 118.) M DeviceNet communication (Refer to Options on page 118.) Wetted parts adopt the materials compatible for various circulating fluids. (Stainless steel, EPDM, etc.)

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Note 5) The surface treatment of the lock nut option-J (round type) is electroless nickel plating. 487 Series AS Elbow Type M3 port M5 port U10/32 port Applicable tubing O.D. d (Hexagon width across flats) (Hexagon width across flats) Applicable tubing O.D. d 2 tubing type AS121F-M3-02 AS121F-M5-02 D2 Applicable tubing O.D. 2 A L4 D1 L3 M T L1 (Hexagon width across flats) H D3 Metric Size

Series KG Stainless Steel One-touch Fittings

Mounting hole T(M) L1 L2 Nylon Urethane 1 8 KGE04-01 16 35 25 40 29 14 16 27.5 31 28 31.5 33.5 27.5 33 11 15 11 15 17 7.5 13 4 M12 1 13 5.6 5.6 14 1 4 KGE04-02 17 1 8 1 4 3 8 1 8 KGE06-01 KGE06-02 KGE06-03 KGE08-01 17 6 M14 1 13.1 13.1 17 15 17 19 26.1 18.0 28 27 48 17 1 4 KGE08-02 M16 1 8 18.5 17 19 3 8 KGE08-03 19 15 35 1 4 KGE10-02 34.5 36.5 12.5 14 41.5 29.5 53 67 10 21 21 M20 1 22 24

Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C01 (Rc1/8), Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A)