Series SV

3-position 0 3 Regulator port P port A port (P port control type A port regulated) B port (P port control type B port regulated) P P port A port (P port control type A port regulated) B port (P port control type B port regulated) P Option A1 A1 With pressure gauge (for odd no. station) With pressure gauge (for even no. station) Without pressure gauge 05 B1 B1 Option 06 00 M1 With pressure

Possible to transfer a workpiece at low-speed.

Shortened shaft Reversed shaft W W XA11 W W W W W XA12 W W XA13 W W W W XA14 W 10, 15 20, 30, 40 XA15 XA16 XA17 W 10, 15 10, 15, 20, 30, 40 XA18 W W W 10, 15, 20, 30, 40 10, 15 W W W W W XA20 XA21 W Stepped round shaft with double-sided chamfer 10, 15 XA22 Stepped round shaft with double-sided chamfer Right-angle chamfer Double key 20, 30, 40 Combination Chart of Made

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

Electric Actuator with Integrated Guide

Power supply Single phase 200V AC (A type) or Single phase 100V AC (A1 type) MC NFB Servomotor HC-PQ C P U V W L1 U V Servo amp MR-CA or SM L2 E W MR-CA1 The cable length between the controller and servo amp is 2m or less. 24VDC Z CN1 EMG Note 7) Shuts off with alarm signal when servo ON is turned OFF.

MNB

GA GC GD Rc(PT)BP unlocking port Front cylinder port Unlocked when pressurized W GR GL GL 1 GE Rc(PT)P ??

CLA

'I. 78 11 48 11 7 11 58 131 100 J -750 20-750 37 40 116 140 'I. '/4 92 CX cz Without boot With boot H Z ZZ os f h , i9"'" size MM N P PG PH PL PW RR S U W .co 1110 (mm) X1US Z ZZ i 40 7 115 20 27 Y. 42 11 20 45 10 153 16 8 10'g' '-'"'' 15l:'. 29.5 51 234 244 43 112 59 242 252 50 30 % 46 10 21 50 12 168 19 0 'v 0 63 V. 16 31 % 48.5 13 23 60 16 182 23 0 W O , 80 37 'I, 55 15 23 70 20 208 28

7.4

V Rc1/8 V V 2 V 1(P), 3(R) 4 V Piping specifications 1/8" V 5/32" V Port size M3 V M5 V V 2 V V V Note 1) V 4(A), 2(B) 3.2 V V Note 1) 4 V V V Note 1) V 1/8" V V V 5/32" V V V Type of wiring C Kit: Connector C Kit: Connector S Kit: Serial transmission (EX510) C Kit: Connector Connector kit Connector kit Direct EXH outlet with built-in silencer V Page 755 Blanking plate assembly V V V Page

CLS

100 V Relay, PLC Reed switch Solid state switch A54 100 V, 200 V Yes A33 PLC 12 V Terminal conduit 24 V 2-wire A34 100 V, 200 V Relay, PLC A44 DIN terminal Diagnostic indication (2-color indication) Lead wire length symbols: 0.5 mNil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z Grommet A59W Y59A 3-wire (NPN) IC circuit 24 V 5 V, 12V Y7P 3-wire (PNP) Grommet J51 100 V, 200

Plug-in Unit

Description Function SV24V R +24 V solenoid valve 1 0 0 3 5 2 0 0 0V solenoid valve SV0V 2 BUS 3 1 1 12 +24 V SI and input blocks SW24V 3 1 1 X 4 1 2 2 P 0 V SI and input blocks SW0V 4 PWR 3 3 Ground connection E 5 1 PROFIBUS-DP: M12...5 pins (Plug) Example of the cable set with socket: SMC: EX500-AP...S (See page 2-2-25.)

1

MY1B P . 8-11-16 MY1M P . 8-11-40 MY1C P . 8-11-56 MY1H P . 8-11-72 MY1CW P . 8-12-14 MY1MW P . 8-12-14 Stroke adjusting unit For applicable symbol, refer to the table below. Note) For MY1H, the parts are packed together when shipped. Stroke Note) Indicates the stroke prior to mounting the stroke adjusting unit.

Series CE1

P P P P P P P P P P P 25 to 300 20 24V DC P P P P P P P P P P 25 to 400 32 P P P P P P P P P 25 to 600 40 P P P P P P P P P 25 to 600 50 P P P 25 to 600 63 P P P 4.4-2 Stroke Reading Cylinder Series CE1 Applications Parts inspection Confirmation of press-fit Measures part dimensions, differentiates between good and defective articles, and prevents the mingling of different parts, etc.

ZQ

Note 4) The pitches of P, PE and V ports are determined assuming the use of the Series KJ one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. Please refer to the catalogue to confirm the sizes of the fittings to be used. 5 6 P EXH ZP ZCU AMJ V V V PE Misc.

10

v 25A CG1 v v MBlR V CG3 v v v v v v 10v 20JMB v v XAl MB MB v v v v v v v XB5 v v v v v XB6 MB1 v v v v v XB13 CA2 v v XC3 v XC4 CS1 v v v v v XC5 CS2 v XC6 Note 8) Note 8) v XC7 v v v XC8 v v v XC9 v v XC10 Note 4) Note 4) v v v v v XC11 v v v v v XC12 v v XC14 Note 3) v v v v v XC22 XC26 v v XC27 v v v v XC29 XC30 v v XC35 v XC65 XC68 XC88 XC89 XC91 Dv v v

JIS Standard Hydraulic Cylinder

wire 12 V F5BA1 F59F 4-wire (NPN) IC circuit IC circuit IC circuit 5 V, 12 V Diagnostic output (2-color indicator) A96 A93 A90 100 V 100 V or less 100 V, 200 V 200 V or less 3-wire (NPN equiv.) 5 V Yes Grommet Relay PLC No Yes No A54 A64 A59W 12 V 2-wire 24 V A33 A34 A44 Terminal conduit PLC Relay PLC Yes 100 V, 200 V Grommet DIN terminal Diagnostic indication (2-color indicator) B59W

Soft Start-up Valve

Simple Specials System Please contact your local sales representative for more details. 2 *1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) AV 00 20 02 B B 1 D q w e r t y u i o A *1 CE compliant Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V

Table of Contents

When the release valve w is OFF , the supply pressure from port Po is blocked, and the air which was being supplied to the manifold side port P passes through the release valve and is X Pressure switch discharged from port R1. P' 3. The pressure switch is piped into the outlet side of the release valve w. (It operates when the Air filter regulator release valve w is energized.)

Auto Switch Guide

RZQ Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL MI W S CEP1 CE1 Auto Switch Mounting Bracket Part No.

VQ4000

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 24 VDC 1 W DC (42 mA), 0.5 W DC (21 mA) 3 position exhaust center 12 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) 2 position double (Metal) (A) 4 (B) 2 (A) 4 (B) 2 100 VAC Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) Power consumption (Current) 110 VAC Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 1 (P) 5 (R1) 3 (R2) 200 VAC Inrush 2.4 VA (12 mA), Holding 2.4

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

Vacuum

Response time determination by calculation: T . = V x 6 0 ' o T r = 3 1 adsorption response time to 63% of P" (sec), adsorption response time to 95% of P" (sec), volume of piping from eiector to pad (4: T1 tt 2 2.