Rotary Actuator

$Applicable shaft type: W $Applicable shaft type: W (mm) Y L2 L4 max Size (mm) E3 = E1 = Y = 10 X L1 L3 max Size 3 to 8 Y-1 5-( 8-Y) to (Y-1 ) L2 = 10 15 L4 = 9-(14-X) to (X-3) 5 to 14 X-3 3 to 9 Y-1.5 6-( 2-Y) to (Y-1.5) L1 = L3 = 15 20 10-(18-X) to (X-4) 8 to 18 X-4 3 to 10 Y-1.5 7-(10-Y) to (Y-1.5) 20 30 10-(20-X) to (X-4.5) 10 to 20 X-4.5 5 to 13 Y-2 8-(13-Y) to (Y-2 ) X = 30 40 10 to

Stability of suction position,

W = P x S x 0.1 x 1/t W = 1 g = 0.0098 N 0.0098 = P x 0.13 x 0.1 x 1/4 S = p/4 x (0.4)2 = 0.13 cm2 P = 3.0 kPa t = 4 (Horizontal lifting) According to the calculation, 3.0 kPa or more of vacuum pressure can adsorb the workpiece. (3) Based on the workpiece shape and type, select: Pad type: Flat type with groove Pad material: Silicone rubber (4) According to the results above, select a vacuum

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

M5 x 0.8 VQD1151-M5 0.06 0.31 0.22 0.05 0.10 0.22 0.07 Base mounted (With sub-plate) U W VQD1151M5 0.28 0.27 0.07 0.25 0.27 VQC Construction SQ Component Parts JIS Symbol VQ0 (A) 4 (B) 2 No q w e r t y u i o !

Air Cylinder Series CM2

-H -R -W N L Stroke Axial foot style: CBM2L Bore size LH B 4 x LD 2 x LC LT X Y Y X LS + Stroke Z ZZ + Stroke LZ LX -H -R -W N L Stroke N L Stroke Head side flange style: Rod side flange style: CBM2F Bore size -H -R -W CBM2G Bore size 4 x FD Mounting hole C2 2 x FD Mounting hole FY B FX FZ Z + Stroke FT FT Z 20 to 32 40 -H -R -W N L Stroke Single clevis style: CBM2C Bore size CD U L RR CX

1

: A22 Symbol: A26 Symbol: A23 T W1 L L L L CP95 RD 30 DA 30 30 DA H1 H1 DA E NCM H1 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 30 DB DB NCA B C1 H B C T B RD T X LA H C1 DW X L H C1 X L X L K L LB -X W E L 30 30 30 L DC 30 Symbol: A30 Symbol: A29 Symbol: A28 Symbol: A27 20L L H1 Data 30 30 30 30 H1 W H1 DA E DA W Symbol: A9 Symbol: A10 Symbol: A11 Symbol: A12 X C0.5 R sphere T T C1

SYJ300/500/700

P, R port thread type S 20 20 stations A A X port (External pilot type) M5 x 0.8 A port size Nil Rc X P R A port M5 x 0.8, C4 R port M5 M5 x 0.8 + + + + F G 1/8 C4 4 One-touch fitting A A P port X P R N NPT P port 1/8 N3 5/32" One-touch fitting 1/8 T NPTF X port (External pilot type) M5 x 0.8 R port A port M5 x 0.8, C4 Note) For more than 8 stations, supply/exhaust air to/from both sides

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Setting digit Explanation Initial value _ _ x x Regenerative option selection 00: Regenerative option is not used. 00h For driver of 100 W, regenerative resistor is not used. For driver of 200 W to 750 W, built-in regenerative resistor is used. 02: LEC-MR-RB-032 03: LEC-MR-RB-12 _ x _ _ For manufacturer setting 0h x _ _ _ 0h 5 13 5. PARAMETERS Initial value Setting No.

5 Port Solenoid Valve

7 w e r !8 @1 @6 @5 Cable 0.3 mm2 x 25 pins O.D. 1.4 !9 y t @0 u 10 Seal (Length) Polarity Terminal 015 no.

ZP

7 4 x 10 4 x 20 4 x 30 5 x 10 5 x 20 5 x 30 6 x 10 6 x 20 6 x 30 8 x 20 8 x 30 W P. 17 Oval pad 3.5 x 7 2 x 4 4 x 10 U H P. 33 HT P. 33 Heavy-duty pad HB P. 35 HW P. 36 U P. 27 Mark-free pad H P. 28 Related pad S Sponge pad P. 30 Resin attachment K P. 29 Pad with ball spline buffer U P. 24 H P. 37 Heavy-duty ball joint pad HB P. 43 Cyclone pad (Non-contact pad) Made to Order Note) The

Compact Rotary Actuator Series CRQ2

Applicable shaft types: S, W E3 = LL LL E1 = DKey L1 = X = L3 = (mm) (mm) LL 3 4 5 Key dimensions 4 x 4 x 20 4 x 4 x 20 5 x 5 x 25 Size 20 30 40 X 8 to 18 10 to 20 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) L3 max X-2 X-2 Size 10 15 259 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA31 to -XA59: Shaft Pattern Sequencing Shaft pattern sequencing is dealt with a simple

ZP3

w w q q q 7 Nut Structural steel (Trivalent chromated) M6 x 0.75 M8 x 0.75 8 Bushing 9 Fitting 161 A Basic/Compact Type Specific Product Precautions Be sure to read this before handling the products.

Electric Slide Tables

150 st) 22 60 6 5H9 (+0.030 0 ) depth 5 5H9 (+0.030 0 ) depth 5 G x M8 x 1.25 x 16 G x 6.6 A 38 2 x M8 x 1.25 x 16 Top mounting not available 39.8 6 A G x 11 J F 12 (G/21) x J Connector With lock Step Motor Lock cable (3.5) Motor cable (2 x 5) Motor cable 20 20 20 Lock cable (1.5) 65 Cable length 180 117 15 Note 1) Range within which the table can move when it returns to origin.

Aluminum High Vacuum Angle Valve

x 10-9 Nil A B C None w, e w e Seal material XSA 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) XVD Note 1) Values at normal temperature, excluding gas permeation.

Table of Contents

1 Drain q r e w t i u y o !0 !

Modular Design with Uniform Body Style

OUT q (Port size) OUT q (Port size) Port size IN OUT OUT q e OUT w 1/8 Port size IN OUT OUT q e OUT w e Standard Specifications Fluid Air Ambient and fluid temperatures 5 to 60C (No freezing) Proof pressure 1.5 MPa Max. operating pressure 1.0 MPa Dimensions Body type: Standard Body type: Front and back port selectable 2 x P1 2 x P2 2 x P1 2 x P2 B B Center of F.R.L. body C Center of F.R.L

Electric Grippers

A B H LEHZ10(L)K2-4B LEHZ16(L)K2-6B LEHZ20(L)K2-10B LEHZ25(L)K2-14B LEHZ32K2-22B LEHZ40K2-30B 3 4 5 6 7 9 3 4 5 6 7 9 5.7 7 9 12 14 17 5.7 7 9 12 14 17 2 2.5 4 5 6 7 2.9 3.4 4.5 5.5 6.6 9 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 Flat Fingers (C) F C W J K D G 4 x MM, thread length L Thread for attachment mounting A B [mm] G Weight (g) Model J K MM A B C D F When opened When

CRQ2

Applicable shaft types: S, W E3 = LL LL E1 = Key L1 = X = L3 = (mm) (mm) Key dimensions 4 x 4 x 20 4 x 4 x 20 5 x 5 x 25 LL 3 4 5 Size 20 30 40 X 8 to 18 10 to 20 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) Size 10 15 L3max X-2 X-2 11-8-15 16 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA31 to -XA46: Shaft Pattern Sequencing II Shaft shape pattern is dealt with simple

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

0.8 1/8 M5 x 0.8 1/8 P, R port Port size M5 x 0.8 C4 (One-touch fitting for 4) M3 x 0.5 A port M3 x 0.5 Flow characteristics Flow characteristics Effective area (mm 2) Port size 12(PA) 23(AR) Manifold C [dm3/(sbar)] 1 (P), 3 (R) port 2 (A) port b Cv C [dm3/(sbar)] b Cv Body ported for internal pilot 0.9 10-SYJ32M M3 x 0.5 M5 x 0.8 Type 10-SS3YJ3-20 Type 10-SS3YJ341 S41 M3 x 0.5 M5 x 0.8 1.5

Free Mount Cylinder Series CU

across flats L RQ 2 x P through Width across flats L 4 x T counterbore W + Stroke S + Stroke CQM Rod End Nut/Accessory Material: Carbon steel Z + 2 x Stroke MU Part no.

LJ1H

Particle concentration (Particles/ft3) 10 10 Speed: 500mm/s 10 Speed: 1000mm/s 200 150 100 50 25 Vacuuming flow (l/min ANR) Test environment: Nippon Airtek: VS-1603L W x L x H = 620mm x 1550mm x 730mm Fed-st class 10 Approx. 0.3m/s Grease Application Areas Test equipment: Laser particle counter Hitachi Electric Engineering