SMC Corporation of America
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If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 7 3 Position Cylinder Series RZQ Construction 13 24 21 3 2 1 6 4 8 7 10 19 22 20 12 23 11 9 5 23 18 14 16 17 15 22 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 No. 13 14 15 16 17 18 19 20 21 22 23 24 Note Note Description Material Description Material Hard anodized Aluminum alloy

Note) At rated voltage 16 16 3 Port Solenoid Valve Series SYJ700 Valve Specifications External Pilot Type SYJ700R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port. This model is suitable for low pressure and vacuum applications.

nRc(PT) 1/8 (port A) 23 8 19.5 L: Dimension table n: Stations n L L1 L2 L3 1 37 27 13 2 56 46 32 3 75 65 51 4 94 84 70 5 113 103 89 6 132 122 108 7 151 141 127 8 170 160 146 9 189 179 165 10 208 198 184 11 227 217 203 12 246 236 222 13 265 255 241 14 284 274 260 15 303 293 279 16 322 312 298 17 341 331 317 18 360 350 336 19 379 369 355 20 398 388 374 6 3 Port Direct Operated Poppet Series

Set the unit with the or button. : kPa or MPa : kgf/cm2 : bar : psi : inHg : mmHg Note 1) Note 1) Note1) Calibration is available with series ZSE50 and ZSE60. 16

Jog mode (jg) This is a control mode where the servo motor speed is set to drive the servo motor manually. -16- 4.2 Regenerative optionPr. PA02 Set this parameter when the regenerative power generated is large and the driver's built-in regenerative resistor does not have sufficient regenerative capability.

No.LEC-OM08004 (ACT Controller) / LEC-W Series 1.3 2.5 3.6 3.1 .6 3.2 .8 4.10 4.1 .10 4.2 .13 4.3 .14 4.3.1 .14 4.3.2 .14 4.3.3 .14 4.4 .15 4.5 .15 4.6 .16 4.7 .16 5.17 5.1 .17 5.2 .20 5.3 .22 5.3.1 .22 5.3.2 .24 5.3.3 .25 5.3.4 .26 5.3.5 .27 5.3.6 .28 5.4 .29 5.4.1 .29 5.4.2 .29 5.4.3.29 5.5 .30 2 - ACT Controller/ 1.

No.ZB-OM00301 / ZB No.ZB-OM00301 2 9 12 13 15 16 16 V Assy 17 21 25 26 28 28 29 30 30 31 31 32 35 37 38 39 40 Assy 40 Assy 41 42 1 - No.ZB-OM00301 1) (ISO/IEC) (JIS) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 With connector lead wire ZS-31-B With connector lead wire ZS-31-C : Spacers are included for 4 and 6 stations.

word/16 word 16 word/16 word 12 word/12 word 8 word/8 word 4 word/4 word Settable node number range Diagnosis size set for the input 1 to 61 1 to 62 1 to 63 1 to 64 5 3 word 2 word 0 word Extended cyclic (Ver2.00) 8 times 8 times 8 times 4 times Refer to the SMC website (URL http://www.smcworld.com) to obtain more detailed information about LED display.

. : For wiring method, refer to "Wring" in the "Operation Manual". 7 6 Dimensions (in mm) Settings Mounted by screw 25.7 16 64 54 5 16 70 5 PWR (V) PWR (V) BUS BUS PWR 60 80 PWR 2 M4 : Tightening torque : 0.8 Nm OUTPUT INPUT Perspective drawing (tolerance 0.2) OUTPUT INPUT COM D COM C Mounted on DIN rail COM B DIN rail COM A PWR (V) BUS PWR 9 8 Settings (continued) Specifications Basic specifications

For IRV2000, IRV3000 Zero position Heaven Zero position Ground Fig. (2) Fig. (1) 14-5-16 16 Vacuum Regulator Series IRV1000/2000/3000 Standard Specifications F.R.L.

Recommended tightening torque is between 3 and 4 Nm for R 1/16 and 7 and 9 Nm for R 1/8. Note 2) Water cannot be used as an operating fluid. Because the clearance gap of the air passage of the Bourdon tube is very small. Water will block the gap and cause a malfunction.

VBA4 The required time to increase tank pressure from 0.8 MPa to 1.0 MPa at 0.5 MPa supply pressure is calculated as follows. 1.0 0.5 = = 2.0 P2 P1 P2 P1 P2 P1 0.8 0.5 = = 1.6 P2 P1 1.5 0.5 = = 3.0 1.0 0.5 = = 2.0 0.8 0.5 = = 1.6 P2 P1 P2 P1 With the pressure increase ratio from 1.6 to 2.0, the time of 65 16 = 49 sec. (t) is given for 10 l tank by the graph.

W (44) (Y) Z (X) (V) T R T 25 IN port 23/8 l =280 l =300 : Thread type 2.5 (N) E Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 H H P = J (Pitch) 2 n-1/8 : Thread type L Dimension

Refer to pages 17-2-72/73 regarding manifold additions. 17-2-69 10 Series VDW10/20/30 Dimensions VV2DW2 (25.5) 16 1 4.6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 16 300 11 1 24 33 19.5 (19.5) (: Thread type) 21/4 (IN port) R2.3 4.5 9 L1 L2 L3 1 Stations D side

VNH1 VNH2 VNH3 VNH4 Description Bracket (With bolt and washer) B VNH1-16 VNH2-16 VNH3-16 VNH4-16 How to Order Pilot Solenoid Valves VO301-00 T X302 Light/surge voltage suppressor Rated voltage Nil S Z L With indicator light None With surge voltage suppressor With light/surge voltage suppressor 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz 3 110 VAC 50/60 Hz 4 220 VAC 50/60 Hz 5 24 VDC 6 12 VDC 7

Proof pressure Max. operating pressure Set press. range Air operated Solenoid Ambient and fluid temperature Hysteresis Repeatability Sensitivity Mounting Lubrication Port 01 P A R mm2 02 01 02 03 04 04 06 10 10 12 14 20 02 Port size Rc(PT) 1 11 2 1 4 11 4 1 2 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 590 2 1 300 17 25 1.4 16 0.9 25 1.4 60 3.3 70 3.9 330 18 36 2.0 Cv 16 0.9 130 7.2 160 8.9 180 10

Applicable filter model Element size (mm) Principal Parts Material ZFC100 12 x 8 x L20 I-62S-A ZFC101 Material Description Case ZFC200 16 x 12 x L25 I-63S-A Special clear nylon ZFC201 Cover PBT Note) Spare elements and O-rings for the cover are sold in sets of 10 pieces each.

Vacuum Pressure Switch: ZSE2-0R-15 ZSE2-0R-15 ZSE2-0R-15L ZSE2-0R-15C ZSE2-0R-15CL ZSE2-0R-15CN Indicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer H L SET L SET H 15 15 9 9 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port 3.3

s o.50 o.8e4 o93 0.75 0.18 %-18 0.50 0.95 2.94 106 (1 0.312 %-24 0.50 o.624 0.25 1.12 o.12 0.88 0.88 0.24 %-8 0.62 1.17 3.25 0.la7 Wzo 0.75 0.7i19 o 1.t2 0.25 1.06 'L06 o.25 %-16 ora 1.62 400 150 t1%l o.87 1h-20 o_75 o.749 0.38 1.56 0.25 1.25 1.25 o.25 3l-16 0.88 '1.50 3.69 Double End : NC.