Set Flow: 50 (20~50l/min), Thread: Rc(PT), Port Size: 04 (1/2), Terminal Box: 1 [Terminal Box (Contact 1ab)], Neon Lamp: 0 (w/o Neon Lamp)

Set Flow: 10 (1~10l/min), Thread: Rc(PT), Port Size: 04 (1/2), Terminal Box: 1 [Terminal Box (Contact 1ab)], Neon Lamp: 0 (w/o Neon Lamp)

Set Flow: 20 (10~20l/min), Thread: Rc(PT), Port Size: 04 (1/2), Terminal Box: 1 [Terminal Box (Contact 1ab)], Neon Lamp: 0 (w/o Neon Lamp)

Size: 40 (1/2), Thread: M Thread, Rc(PT), Port Size: 04 (1/2), Accessory: None, Option 1: 10 (1000cm³ Tank w/Switch Lower Limit ON)

Special Applications: Clean Room Compliant, Size: 40, Backflow Function: None, Thread: Rc, Port Size: 1/2, Accessory: -, Specifications: -, Pressure Unit: -

Body Size: 1/2, Type: Universal, Control Type: Meter-in, Indicator Direction: 180°, Thread: R, Port Size: 1/2, Width Across Flats: 9mm, Tubing: ø10, Seal: -

Nozzle Diameter: ø2.0mm, Vacuum Pressure: -48 kPa, SUP: One-touch Fitting ø10, VAC: Screw-in Rc 1/2

Size: 42, Type: Rapid Supply and Exhaust Function, Thread: Rc, Port Size: 1/2, Tubing O.D: ø10

Size: 42, Type: Pressure Reduction Function, Thread: Rc, Port Size: 1/2, Tubing O.D: ø10

Body Size: 1/2, Type: Elbow, Control Type: Meter-out, Indicator Direction: 0°, Thread: R, Port Size: 1/2, Applicable Tubing O.D.: ø10, Seal: -

.: 1/2, Types of Screw: R, Applicable Tube O.D. mm(mm): 10, Applicable Tube O.D. inch size(inch): -, Body Size: 4, Sealing Method: No Sealant, Hex Size H (H1)(mm): 9, Indicator window direction: 90°, Made-to-order specifications: None

.: 1/2, Types of Screw: R, Applicable Tube O.D. mm(mm): 10, Applicable Tube O.D. inch size(inch): -, Body Size: 4, Sealing Method: No Sealant, Hex Size H (H1)(mm): 9, Indicator window direction: 0°, Made-to-order specifications: None

.: 1/2, Option: None, Types of Screw: R, Applicable Tube O.D. mm(mm): 10, Applicable Tube O.D. inch size(inch): -, Body Size: 1/2 Standard, Made-to-order specifications: None

.: 1/2, Option: None, Types of Screw: R, Applicable Tube O.D. mm(mm): 10, Applicable Tube O.D. inch size(inch): -, Body Size: 1/2 Standard, Made-to-order specifications: None

.: 1/2, Option: None, Types of Screw: R, Applicable Tube O.D. mm(mm): 10, Applicable Tube O.D. inch size(inch): -, Body Size: 1/2 Standard, Made-to-order specifications: None

.: 1/2, Option: None, Types of Screw: R, Applicable Tube O.D. mm(mm): 10, Applicable Tube O.D. inch size(inch): -, Body Size: 1/2 Standard, Made-to-order specifications: None

PF2M7.eng

PF2M7-B.eng:PF2M7-B.eng.qxd 21/04/09 14:02 1 Before Use Digital Flow Switch PF2M7## Wiring Wiring of connector Connections should only be made with the power supply turned off. Use separate routes for the product wiring and any power or high voltage wiring. Otherwise, malfunction may result due to noise.

PF3A7xxH_eng

If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes) before operation.

FGX-OMZ0008

It cannot be cleaned. 10/12 FGX-OMZ0008 Replacement of element should be performed according to the procedure below. 1 Removal of the element.(See Fig.2 1) Stop operation. AIR VENT 2) Check following before maintenance.

Stations: 10 (10 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Switch: 5 (Remote Sensor Unit), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: Flow Adj.