Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve), Calibration Certificate
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve), Calibration Certificate
Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: None (Straight), Port Size: C6 (ø6), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate
Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: N2 (NPT1/4), Output Specification: A (Out 1: NPN; Out 2: NPN), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve)
Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: L (No Flow Adjustment Valve, Rear Ported), Port Size: 01 (Rc1/8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment
Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: None (Straight), Port Size: C8 (ø8), Output Specification: C (Out 1: NPN; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: T (Panel Mount Adapter, w/o Flow Adjustment Valve)
Actuation: 2 (2-position, Double), Body Type: 0 (Body Type), Pilot Valve Exhaust: 3 (Pilot Valve Exhaust), Pilot Type: Internal Pilot, Coil Type: T (w/Power-saving Circuit, Continuous Duty Type), Rated Voltage: 5 (24 VDC), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor, Positive Common), Clean Design Manifold: H (Clean Design Manifold), Wiring Specification: WO (w/o M12
Precision Cylinder Series MTS 5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty. Note Material Qty.
IY W Lead screw is securely locked on the opposite side of the motor.
IP65 enclosure is standard Easy to use terminal block type Terminal block How to Order Valve + Sub-plate VQ2 1 0 0 5 W 02 Entries are the same as for standard. Thread type Nil RC N NPT T NPTF Enclosure F G Dustproof Nil IP65 (dusttight/splash proof) W Note) Note) Valve specifications are IP65.
Actuation: 2 (2 Position Double), Mounting/Porting: 0 (Base Mounted), Seal: 0 (Rubber), Pilot Specification: Internal Pilot, Back Pressure Check Valve: None, Pilot Valve: Standard (0.7MPa), Coil Specification: T (w/Power Saving Circuit, Continuous Duty Type), Voltage: 5 (24VDC), Light/Surge Suppressor/Common Specification: NZ (w/Light Surge Voltage Suppressor, Negative Common), Manual Override
. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: T (Pressure Sensor / -100 to 100 kPa / Analogue Output 1 to 5 V), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual
. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: T (Pressure Sensor / -100 to 100 kPa / Analogue Output 1 to 5 V), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 08 [ø8 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual
Actuation: 4 (3 Position Exhaust Center), Mounting/Porting: 0 (Base Mounted), Seal: 0 (Rubber), Pilot Specification: Internal Pilot, Back Pressure Check Valve: None, Pilot Valve: Standard (0.7MPa), Coil Specification: T (w/Power Saving Circuit, Continuous Duty Type), Voltage: 5 (24VDC), Light/Surge Suppressor/Common Specification: NZ (w/Light Surge Voltage Suppressor, Negative Common), Manual
Model: -100 to 100kPa, Piping: R 1/8, w/M5 Female, Output: NPN Open Collector 2 Outputs, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector & Connector Cover, Bracket/Panel Mount Adapter: None, Operating Manual/Certificate: NON + T, Made to Order: -
Model: -100 to 100kPa, Piping: R 1/8, w/M5 Female, Output: NPN Open Collector 2 Outputs, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket A, Operating Manual/Certificate: NON + T, Made to Order: -
Model: -100 to 100kPa, Piping: R 1/8, w/M5 Female, Output: NPN Open Collector 2 Outputs, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket B, Operating Manual/Certificate: NON + T, Made to Order: -
Model: -100 to 100kPa, Piping: R 1/8, w/M5 Female, Output: NPN Open Collector 2 Outputs, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Bracket C, Operating Manual/Certificate: NON + T, Made to Order: -
Model: -100 to 100kPa, Piping: R 1/8, w/M5 Female, Output: NPN Open Collector 2 Outputs, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: Panel Mount Adapter, Operating Manual/Certificate: NON + T, Made to Order: -
Model: -100 to 100kPa, Piping: R 1/8, w/M5 Female, Output: NPN Open Collector 2 Outputs, Display Unit: w/Unit Display Switching Function, Lead Wire: Lead Wire w/Connector, Bracket/Panel Mount Adapter: None, Operating Manual/Certificate: NON + T, Made to Order: -