Exhaust Cleaner for Clean Rooms AMP Series

8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

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Consult factory for strokes less than 10mm. 6.1 16 External Feedback Lever (IP6000 type) Stroke Order Code Unit Number Size M Size N P368010-20 5 9/10" 4 9/10" 10~85 mm (Nil) 5 M N P368010-21 7 2/3" 4 1/3" 35~100 mm (E) P368010-22 10 4/5" 4 1/3" 50~140 mm (F) DIMENSIONAL DRAWINGS S E R I E S I P 6 0 0 0 / I P 6 1 0 0 IP6000 TYPE: LEVER TYPE FEEDBACKNO TERMINAL BOX (FM Model) IP6000 TYPE:

Floating Joint/Stainless Steel Type Series JS

How to Order J S 32 10-125 Stainless steel type Dust cover material Symbol Nil S Material Fluoro rubber Silicon rubber Applicable cylinder bore size (mm) Nominal thread size Applicable cylinder bore size (mm) 10 10, 16 20 25, 32 40 50, 63 Symbol Applicable cylinder thread nominal size M4 x 0.7 M5 x 0.8 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 Symbol 10 16 20 32 40 63 4-070 5-080 8-125 10-

MWP_E

Checks 3-1-1.

VHS

with a warning tag. 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Body size 2 3 4 5 1/8 3/8 1/2 1 SMC Interface part is required if attached to a modular FRL.

VFRA3000, 4000 Series

No.VFR3000-OMH0005-B 5 Port Air Operated Valve PRODUCT NAME VFRA3000, 4000 Series MODEL/ Series Contents Safety Instructions -2, 3 Precautions on Design -4 Selection -4 Mounting -5 Piping -5 Lubrication -6 Air Supply -6 Operating Environment -7 Maintenance -7 Specific Product Precautions -8, 9 Trouble shooting -10 Remedy -10 -1VFR3000-OMH0005-B Safety Instructions These safety instructions

MA2

A210 10 MHR2 Cylinder bore For MA2 With adapter Air connection size 10 mm 15 mm 10 15 Auto hand changer M3 M3 x 0.5 <10/16> MHZ Tool adapter A210 D 16 MHZ2 Y69A N Transportable mass MHF Transportable mass 3 kg 2 Cylinder bore MHL For MA2 With adapter 10 mm 16 mm 10 16 MHR Finger position MHK Standard Narrow type Nil N MHS Auto switch type Without auto switch Nil MHC D-Y69A (3-wire) Y69A

Air Suction Filter With One-touch Fittings ZFB Series

IN side, OUT side 4 10 20 30 50 75 75 Weight (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Unrestricted 360 piping tube mounting on the IN side Metric size Easily replaced filter element Easy installation and removal with One-touch fittings 3 16 1 4 1 4 3 8 1 2 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13

Oil Filter FH150 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM Model Port size (Rc) Rated flow rate (L/min) Model/Rated Flow Rate FH FH FH150-02 FH150-03 FH150-04 5 1/4 HOW 10 3/8 20 1/2 Description Part no.

ASx-OMT0060

Name Material Remark 1 Body A PBT 2 Body B Brass Electroless nickel plating 3 Handle POM 4 Needle POM 5 End cover Brass Electroless nickel plating 6 Spring Steel wire 7 U-seal HNBR 8 O-ring NBR 9 Needle O-ring NBR 10 Y seal NBR 11 Seal for fitting NBR 12 Cassette 16 Seal NBR For G thread only. 11 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249

AS_FS Inline

10 10 12 12 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Restrictor (Without check valve) With One-touch ttings Example) AS2002FS-04-X214 With indicator 10Clean Series 1 For selecting applicable tubing O.D., refer to the Model shown above. 2 Use 1/8" tubing.

AP64

compatible materials of construction for the gas Vacuum to 3500 psig (24.1 MPa) 3 psi (0.023 MPa) differential 2) 3500 psig (24.1 MPa) 4000 psig (27.6 MPa) 10 psig (69 MPa) -10 to 71 C (No freezing) 0.4 max 2 x 10-11 Pam3/sec 2 x 10-11 Pam3/sec 3) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 5 in. (0.13 m) Face seal, Tube weld 0.122 in.3 (2 cm3) 0.02 kg 4) Inboard leakage Outboard leakage

JSXFA

3 mm or larger and less than 5 mm Port size: 06, 10 For the pilot valve orice diameter, 5 mm or larger is recommended.

Residual Pressure Release Valve

KEA12 KEB12 KEA06 KEB06 KEA08 KEB08 KEA10 KEB10 Without a push button guard With a push button guard Rc thread with a push button guard AS-F Example of circuit diagram (Residual exhaust of air cylinder) Model KEC-03 KEC-02 TMH Applicable tubing O.D. or connection thread 12, Rc 3/8 8, Rc 1/4 14 6 10 2 1 3 2 1 ASD Applicable tubing material Fluid Operating pressure range Ambient and fluid

•

Hysteresls mode When the values of Pl and P2 are the same or when PI > P2 within 3 diglls.the hysteresIs will be automatICally 3 digits for 1 he set value of PI. . WII1dow comparator mode .. Shock resistance 100G to X.Y.

Process Pump

PAB*-OMY0018 PRODUCT NAME Process Pump MODEL / Series / Product Number PA5010 Contents Safety Instructions -P.2 to 3 Names and functions of parts P.4 Precautions P.5 to 9 Applicable Fluids P.10 Specifications P.11 Performance Curve P.12 to 13 Working Principle P.14 Maintenance Parts P.14 Piping and Operation P.15 Dimensions P.16 1 Safety Instructions These safety instructions are intended

CC

The speed will be approximately 1.4 times the date given on p.4.12-3.

Compact Electro-pneumatic Regulator Series ITV0000

(mm) 10 9 8 7 6 5 4 3 Manifold stations n L1 L2 2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 8

PSxx-OMT0005CN

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

AR425 to 935

Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 1/4, 3/8, 1/2 3/4, 1 1 1/4, 1 1/2 2 145.5 155 216 241 39.5 43 75 90 73 78.5 94.5 109.5 3 7 5 10 1/4 1/4 1/4 1/4 67 78 110 140 46.5 85 48 52 80 90 B24P B25P 80 98 126 160 14-4-17