Compact Cylinder

wire and case) 10 to 60C Ambient temperature Enclosure IEC60529 standard IP67 Lead Wire Lead wire length indication (Example) D-M9BW L Lead wire length Nil M L Z 0.5 m 1 m 3 m 5 m Note 1) 1 m (M): Available D-M9(V) only The D-M9M and M9VM (lead wire length: 1 m) will be available with products delivered from August 2008 onwards.

IZH10.eng

Auto power-OFF extension When the is pressed for 6 s. or more with the power supply off, the continuous operating time with no button operation will extend to 15 min. (When this auto power-off extension is activated, indications on the display will keep flashing for 3 s.) Mounting of the high voltage measuring handle (option) 1. Insert the sensor into the handle in the direction shown.

MXU

Universal mounting Vertical mounting (Body tapped) Axial mounting (Body tapped) Lateral mounting (Body through-hole) Lateral mounting (Body tapped) 3 in parallel (Dispenser) Positioning of pin Transferring of component parts Absorbing precisely 8-3-1 2 Compact Slide Series MXU 6, 10, 16 How to Order MXU F9BW S 30 10 Number of auto switches Nil S 2 pcs. 1 pc.

MXU

Universal mounting Vertical mounting (Body tapped) Axial mounting (Body tapped) Lateral mounting (Body through-hole) Lateral mounting (Body tapped) 3 in parallel (Dispenser) Positioning of pin Transferring of component parts Absorbing precisely 8-3-1 2 Compact Slide Series MXU 6, 10, 16 How to Order MXU F9BW S 30 10 Number of auto switches Nil S 2 pcs. 1 pc.

Pneumatic Transfer System Series MF

6 7 X 244 to 254 262 to 279 Y Note 2) I 10 15 J 6 7 X 233 to 244 224 to 241 Y Note 2) J 6 7 X 240 to 251 236 to 253 Y Note 2) H 298 339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C C Y Y B G A 90 B 90 B G A D Note 1) 90 G A H X X X D Note 1) D Note 1) B B B F E F F E A H A

Compact Guide Cylinder

mm 0 1 4.

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

-3- 1. Specification 1.1 AC servo motor 1.1.1 How to order L E J S 100 T9 B 500 T X400 Lead [mm] Motor type Stroke [mm] H 50 200 200 T9 AC servo motor to to A 25 1500 1500 B 10 *Refer to the applicable stroke table.

Electronic Pressure Switch Series (Separate Type)

.S. or less (0 to 50C: based on 25C) 2% F .S. or less (0 to 50C: based on 25C) 5% F.S. or less (0 to 60C) ZSE30: 0.2 F.S. 2 digits or less ISE30: 0.2 F.S. 1 digit or less Repeatability 1% F .S. or less 0.2% F.S. 1 digit or less 0.5% F.S. 0.2% F.S. 1 digit or less Hysteresis mode: Variable Window comparator mode: Variable Hysteresis mode: Variable Window comparator mode: Variable Variable

Air Cylinder

50 to 500 mm/s 1 Stroke length tolerance +2.0 0 Cushion Non-adjustable air cushion + rubber bumper Port size (Rc, NPT, G) 1/8 1/4 3/8 Mounting Basic Depending on the system configuration selected, the specified speed may not be satisfied. 1 Maximum operating pressure and piston speed are different from the current product (MB series).

Mechanically jointed rodless cylinder Basic short type (Rubber bumper), Basic standard type (Air cushion) Slide bearing guide type (Air cushion)

80 to 1000 mm/s 80 to 1500 mm/s Warning 1.

SYJ Series

side (mm2) Note 3) S at P1=0.7MPa, P2=0.5MPa PB 2.1 5.8 Effective area at supply AEA 4.5 12.6 side (mm2) Note 4) S at P1=0.7MPa, P2=0.5MPa BEB 4.5 12.6 Note 1) Set the pressure within the operating pressure range of the solenoid valve.

Multistage Ejector Series ZL112/212 1

kPa 13.3 kPa 10 10 0 0 1 2 3 4 5 6 7 8 9 10 11 12 1 2 3 4 5 6 Time to reach vacuum (S) Time to reach vacuum (S) The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for workpieces, etc., starting from atmospheric pressure in a 1 sealed tank.

Low Torque Metal Seal Type Rotary Joint Low Torque Metal Seal Type Rotary Joint Low Torque Metal Seal Type Rotary Joint Low Torque Metal Seal Type Rotary Joint MQR MQR MQR MQR Series Series Series Series

Vacuum pads are excluded from this 1 year warranty. Vacuum pads are excluded from this 1 year warranty. Vacuum pads are excluded from this 1 year warranty. Vacuum pads are excluded from this 1 year warranty. Vacuum pads are excluded from this 1 year warranty. A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.

AMX-OM-Q018E

Table 3-1.

Controller setting Software (ACT Controller)

The AREA 1 and AREA 2 in the setting items define this output range. The input condition is that the AREA 1 and AREA 2 should be both in the actuators operating range, and AREA 1 < AREA 2. < [B] In position> This is the condition that turns on the [INP] (in position) output signal.

AMX-OM-Q015E

Table 3-1.

CQM

1 !2 !3 !4 !5 !6 !

VVX31/32/33

cm3/min or less 0.1 cm 3/min or less (1) 10 6 Pam 3/s or less VX33 Note 1) Differs depending on the operating conditions such as pressure, etc.

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~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

ZISE10.eng

Display to show the standard product Names of individual parts 1 s Output (OUT1) display (Green) Output (OUT2) display (Red) Display to show the unit specification button (SET) 1 s Connector LED display ZSE10(F)/ISE10 Display to show the product Pin No. of the Connector button (UP) Socket Housing DC(+) Brown 5 Pin No. 1 s button (DOWN) Display to show the pressure range OUT1 Black 4 OUT2