Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 32x222, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Standard, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Full MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/0.5m Lead Wire and No Connector, End Lock: -
Base Type: For Plug-in Metal Base, Mounting Option: -
Base Type: For Plug-in Metal Base, Mounting Option: -
Base Type: For Plug-in Metal Base, Mounting Option: -
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 2 (Kalrez® 4079), Auto Switch & Connector: A (2 pcs D-A93 w/0.5m Lead Wire and No Connector)
The AFW is available for US and Canadian customers only.8 threaded models to 1,500 SCFM (3"NPT), Three filtration/coalescing grades available as well as activated carbon, Differential pressure indicator and float type auto drains are standard, Modular connectivity permits compact assembly , 232 psi max. operating pressure, 2 UNIT CONN KIT, FILTER, L25, 0.09072 lb
DIAPHRAGM ASSEMBLY, 2 PORT VALVE, K52, 150.00000 lb
The SX series unique design combines both solenoid assemblies (when using double solenoid 2/3 position) on the same side of the valve, opposite the ports, allowing for greater space savings and simplified wiring access.
Fluid: air , Operating pressure range (MPa): 0.15 to 0.7 , Ambient and fluid temperature: -10 to 50° C (no freezing) , Maximum operating frequency: 10Hz, VALVE, AIR/PILOT, VALVE, SYJ300 SOLENOID VALVE 3-PORT, 2A, SYJ300 OTHER SIZE RATING, 0.10595 lb