7

(V2) (U2) E C 32 VX2 25 T B VXK G1/2 R VXD VXD A VXZ IN OUT N SMC 8 x 18 VXS VXB F S D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5

VS 8-2/VS 8-4

8 Manifold Block Assembly Standard 18 mm and 26 mm sizes mixed MBS8020 01 D M MBS80 0 01 D 2 With/Without tie-rod Size 2 4 Size 18 mm Size 26 mm With/Without tie-rod Cylinder port size 01 01B Side ported 1/8 Bottom ported 1/8 Nil Nil -1 Included None 1 Included None Thread type Wiring specifications D S Double wiring Single wiring Rc NPTF G Note) Nil T F Note) Conforms to ISO1179-1 Thread

MU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 These are provided as standard for double clevis and double knuckle joint. 7-8-19 20 Series MDU Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A7, D-A8 25, 32 40, 50, 63 20 30.5 HS Auto switch D-A7H, D-A80H D-F7, D-J79 D-F7W, D-J79W D-F79F, D-FBAL D-F7NTL 25, 32 40, 50, 63 22 30.5 HS HS Auto switch Connector

Aluminum High Vacuum Angle Valve

8-1 8-2 9 10 O-ring Part No.

LEC-OM07605CN

D 4 DB 16.E 5 DB 16.F 6 DB 8 2 8.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

MU

CD-MU02 CD-MU03 CD-MU04 CD-MU05 These are provided as standard for double clevis and double knuckle joint. 7-8-19 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-A7H, D-A80H D-F7, D-J79 D-F7W, D-J79W D-F79F, D-FBAL D-F7NTL D-A79W, D-F7WV, D-F7V D-F7BAVL 21 Series MDU With Auto Switch Proper Auto Switch Mounting Position (Detection at stroke end) and

•

Flat wi1h rib mm Model ;A ;B .c F:M5 x O .8 F:M6 x l F: }l 1 Y Model ;A ;B c F:M 6x l F :lJllxl251 F: ~ E Y D E . G .D. E G D E 0 D ..1 D Flat Flat wit. h rib ZPTIOg 10 ! 12 I 12 5 21 8 6 21 8 6.2 27 ZPT40g 40 43 18.5 6 8 6.2 32 6.5 3.3 2PTSOl!

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(A, B port) 35 One-touch fitting (A, B port) Applicable tubing O.D. : 6, 1/4" : 8, 5/16" (4.9) 2 x 3.2 (For mounting) (Light/surge voltage suppressor) 35 + 36 28 25 16.1 21 31.5 [38.5] 1.6 P R2 R1 18 1/8 (P, R1, R2 port) 27.2 L plug connector (L): 10-SYJ7223-L-01 M plug connector (M): 10-SYJ7223-M-01 DIN terminal (D, Y): 10-SYJ7223-D Y-01 M8 connector (WO): 10-SYJ7223-WO-01 Approx. 300 (Lead

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(Refer to the table below) U D U D Cylinder port size Kit designation/Electrical entry/Cable length 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) 03T 04T BT 03 04 B CM F L Kit (D sub connector kit) Kit (Lead wire kit) Note) Indicate on a manifold specification sheet in case of mixed sizes.

MNB

(different sides or same side) 15 25 1 pc. 10 Auto Switches / Proper Mounting Position and Height for Stroke End Detection Reed switch Solid state switch A B Hs A B Hs Ht Ht Auto switch mounting position Auto switch mounting height D-A5 D-A6 D-A59W D-F5, D-J5 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5, D-A6 D-A59W D-F5NTL D-F5W, D-J59W D-F5BAL, D-F5NTL Bore size (mm) Bore size (mm) Hs Ht Ht Hs B

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A59W D-F5NTL Bore size (mm) A B A B A B A B Hs Hs Hs Ht Hs Ht 74.5 125 0 0 2 2 4.5 4.5 9.5 9.5 116 126 69.5 70 75.5 80 140 0 0 2 2 4.5 4.5 9.5 9.5 124 134 76.5 76.5 81 88 160 0 0 2 2 4.5 4.5 9.5 9.5 134.5 144.5 87.5 87.5 89 96 180 3.5 1.5 7.5 5.5 10 8 15 13 144 154 97.5 97.5 97 107.5 200 6 4 10 8 12.5 10.5 17.5 15.5

Compressed Air Preparation Filter

-D/AM20-D/AMD20-D 1/8, 1/4 40 142.3 17.5 21 25 21 30 27 22 5.4 8.4 60 2.3 28 159.6 AFF30-D/AM30-D/AMD30-D 1/4, 3/8 53 178.1 21.5 26.5 30 35 26.5 41 35 25 6.5 13 71 2.3 32 219.8 AFF40-D/AM40-D/AMD40-D 1/4, 3/8, 1/2 70 223.5 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 263.3 AFF50-D/AM50-D/AMD50-D 3/4, 1 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AFF60-D/AM60-D/AMD60-D

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

5 5.5 5.5 7 A 20 25 32 40 AL 18 22 22 24 D 15.5 19.5 19.5 21 ZZ H H2 H1 B2 B1 80 80 82 108 E 8 10 12 14 KA FL 10.5 10.5 10.5 13.5 GA 8 8 8 11 GB 6 8 10 12 WA 31 31 31 36 WB 13 13 13 16 NA M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 NN 24 30 34.5 42.5 P M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 S 1/8 1/8 1/8 1/4 Bore size 26 26 26 31 41 45 45 50 8 8 8 10 121 125 127 158 13 17 17 22 26 32 32 41

MGP

Bracket Series MGPL (mm) Standard dimension E st30 30D d 6 8 1 3 13 19 43 49 12 16 (mm) Note 8) In cases where the brackets, etc., mounted on the guide rod end enter into the body when the cylinder is operating, dimension d must be less than dimension D to prevent the brackets from contacting the body.

VQC

block only Input block SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 23 12 20.5 8 77.5 95.5 75.5 61.5 1.5 43.5 11.5 21.5 (6.5) 27 31 38.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 2-Rc 1/8 (Pilot EXH port) Formulas: L1 = 25n + 106, L2 = 25n + 241 (for 1 input block.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

(same side) 100 + 55 100 + 55 110 + 55 120 + 55 20 + 55 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 2, 4, 6, 8 15 100 110 120 1 pc. 100 1 or 2 pcs. (different sides/same side) 15 120 120 130 140 D-F5W, D-J59W D-F5BA D-F5F D-F5NT (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 130 + 55 "n" pcs.

Sine Cylinder Series REC

Range (mm) Auto switch model Bore size (mm) 20 25 32 40 D-A9 7 8 8 6 D-M9 D-M9W 4 5 4 4 D-C7/C80 D-C73C/C80C 8 9 10 10 D-B5/B64 D-B59W 8 9 10 10 13 14 14 13 D-H7/H7W D-H7NF/H7BAL 4 4.5 5 4 D-H7C D-A3/D-A44 D-G39/D-K39 D-G5NTL D-G5NBL 7 9 10 8.5 9 9 10 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

Sine Cylinder Series REC

Range (mm) Auto switch model Bore size (mm) 20 25 32 40 D-A9 7 8 8 6 D-M9 D-M9W 4 5 4 4 D-C7/C80 D-C73C/C80C 8 9 10 10 D-B5/B64 D-B59W 8 9 10 10 13 14 14 13 D-H7/H7W D-H7NF/H7BAL 4 4.5 5 4 D-H7C D-A3/D-A44 D-G39/D-K39 D-G5NTL D-G5NBL 7 9 10 8.5 9 9 10 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

Rotary Actuator/Vane Type

E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.