Multistage Ejector (N)ZL Series

G1/2 1/2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).

Safety Instructions

Do not connect the ground wire to a water pipe or a gas pipe due to a risk of explosion. 2.

EXxx-OMT0014_E

Input (Only connector "0") 2 1 2 Input No.1 1 3 Power supply (0 V) 1: Input No.1 is connected to the pin No.2 of the input connector "0", 2 input signals can be directly inputted the input connector "0". 2: N.C.: Not connected 5 3 4 Input 4 Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Depth of counterbore RB F Q Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I J

IN20267

TYPE Class Instance Attribute Size Description Output 100 100 3 1 INT Position set-point Input 150 150 3 2 INT 2 bytes measured position, 2 bytes diagnostics Figure 16-1 Explicit Messaging 41 - IN20267 Installation and Handling 17. Air supply 17.1. Use clean air.

Multistage Ejector Series ZL

G1/2 1/2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Refer to Figure 2 and 3. [Figure 3] [Figure 2] 1. Stop operation and reduce the filter's internal pressure to atmosphere. 2. Rotate the cover counterclockwise (O on the cover L marking). Refer to Figure 1. Case Element [Figure 1] Case Cover Cover 5. Adjust the protrusion on the cover and the slit on the case so that they match up, then push the cover into the end of the case.

Electronic Pressure Switch Series (Separate Type)

thread Panel mounting possible Selectable pressure unit Auto shift function URJ TSJ Panel mounting possible Selectable pressure unit Auto shift function Note Page 16-6-1 16-6-7 16-5-1 16-7-1 16-8-1 16-4-5 16-2-1 16-2-15 16-2-45 16-2-28 16-2-36 16-2-48 16-1-4 16-1-5 4 Mechanical Pressure Switch Series Mechanical Pressure Switch Series Model Selection Table Positive Pressure Negative Pressure

Manifold Regulator Modular Type ARM2500/3000 Series

x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5 Hex. socket head cap screw 2 KA00299 KA00961 O-ring NBR 8 How to order (1) When adding n stations to ARM Regulator n pcs.

Slit Valve

2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Pilot Operated Regulator AR425 to 935 Series

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Semi-standard Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30

FGE-C

2 FGES L A FGES L B FGES L C 1) () (R) 12 (MPa) 0.7 () 80(60) 4 4 2)8 4 2)12 (mm) 6570250 6570500 (8 6570250) 6570750 (12 6570250) (MPa) 0.1 SUS304 SUS304 O FGESNBR FGELFKM SS400 (kg) 10 13 18 (L) 14 21 29 1) 2) 3) 3 1) (P5) ( ) 1 (2 ) /4 (1 ) () 2-1 2/12.5Nm / 2- 9/12 FGX-OM-L009-B 2) IN/OUT IN/OUT V P36 4 1) () 2) 0.1MPa() P910 5.

TCU

-1-N-X6 TCU1065l-2-N-X6 L X 3.8 + 200 L X 5 + 200 6 4 N X 12 2 3 to 66 1 3 to 35 37 67 N X 12 TCU0604l -2-N-X6 TCU1208l-1-N-X6 12 8 L X 2.5 + 200 L X 3 + 200 37 N X 18 3 3 to 44 67 N X 24 2 3 to 30 TCU0604l -3-N-X6 TCU1208l-2-N-X6 B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Clear), YR (Orange) l 2.4-5

ZISE10.eng

(Model: ZS-39-R) Take care not to bend the claws of the DIN rail adapter when mounting. Engage the pressure switch with claw 2 of the DIN rail adapter, then press down horizontally on to claw 1 until it clicks.

ALB900

1 1 1 1 1 2 2 2 1 Relay valve Pressure gauge Diaphragm assembly Valve assembly NLP seal PNY seal Wear ring O-ring NBR NBR Cloth-inserted phenol aldehyde resin NBR Glass fiber-inserted epoxy resin !2 1 Bowl assembly 126059-4A 126060 NBR !3 2 Seal Zinc die-casted !4 Lubrication plug assembly 1 126115AP NBR AF11-2 11307 !5 !

EX250-SEN_eng

Communicated at 100 Mbps 1 1 Communicated at half duplex 1 0 1 Communication method 1 White/Orange 2 Orange 3 White/Green 4 5 6 Green 7 8 1 2 3 4 +Tx +Rx -Tx -Rx Communicated at full duplex 1 1 2 1 2 3 1 2 4 SW1 CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: 5 Cable color: Signal name Pin No.

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

IP Address Setting Tool (Interactive Type)

Note: EX600-SEN1/2 does not have L/A (LINK ACT) installed.

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

1% of full span4.4 l/min (ANR) or lessRc 1/4Rc 1/8 (2 locations)?5 to 60C (No freezing)0.35