3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

323 3 58 68 87.5 98 4 74 84 112.5 123 5 90 100 125 135.5 6 106 116 137.5 148 7 122 132 162.5 173 8 138 148 175 185.5 9 154 164 187.5 198 10 170 180 200 210.5 L1 L2 L3 L4 31 Series VQZ Base Mounted Type Dimensions: VQZ300 VQZ300 (mm) VV3QZ35C Stations Port size (35) (5.5) 2-4.5 Mounting holes 42 (11) Grommet (G) N7T: One-touch fitting for 1/4" n-N7T, N9T, N11T, 02T 34 (7.5) (3) DIN rail

VQ5000

How to Calculate the Flow Rate SOL.A VQZ100-47-A For obtaining the flow rate, refer to pages 2-1-8 to 2-1-11.

MY1

64 11.7 6 11 6.6 M8 x 1.25 B 120 142 MY-S40A M10 x 1.5 55 80 14.8 8.5 14 9 B 142 164 MY-S63A 172 202 M12 x 1.75 70 100 18.3 10.5 17.5 11.5 B A set of side supports consists of a left support and a right support.

Microspeed Cylinder

type in a class 100 clean room.

7

(for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

Compact Type

7 V = up to 800mm/s 0.2 0.1 Weight m (kg) 0.05 0.04 0.03 CXSJM6 0.02 CXSJL6 20 40 0.01 60 0 Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 30 mm stroke 10 11 CXSJM CXSJL Graph V = up to 400 mm/s; up to 30 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

07 27.8 39.3 57 18.5 29.5 41 8 15.2 1/4" 13.2 17 55 23 35.2 40.4 45.4 19 40.2 R 3/8 19.8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 29.5 19.8 19 41 59 21 45.4 31.8 43.3 40.2 40.4 10 18.5 5/16" 15.2 35.2 18.5 57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 12 20.9 3/8" 17.9 21 59 AS421FG-04-10 AS421FG-N04-11 33.6 47.9 100 21 33.6 47.9 10 18.5 3/8" 17.9 21 100 NPT 1/2 28.6 24.5 23.8

MHZ2/MHZJ2

D-Y7NW(V) Auto Switch Weight Table DC (+) Brown [Red] Unit: g Main switch circuit OUT Black [White] D-Y7BW D-Y7PW Model D-Y7NW 11 11 11 Lead wire length 0.5m 54 54 54 Lead wire length 3m DC () Blue [Black] Auto Switch Dimensions D-Y7PW(V) D-Y7W DC (+) Brown [Red] Main switch circuit OUT Black [White] DC () Blue [Black] D-Y7BW(V) OUT (+) Brown [Red] Main switch circuit D-Y7WV OUT () Blue [

Compact Type Dual-Rod Cylinder Series CXSJ

7 V = up to 800mm/s 0.2 0.1 Weight m (kg) 0.05 0.04 0.03 CXSJM6 0.02 CXSJL6 20 40 0.01 60 0 Overhang L (mm) CXSJM CXSJL Graph V = over 400 mm/s; up to 30 mm stroke 10 11 CXSJM CXSJL Graph V = up to 400 mm/s; up to 30 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 25 25 0.1 0.1 20 20 15 15 10 10 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph

ZQ-OM01401

Q1 5 4 () 1) () Q2 1)+COM (4) 7) (2)1U (3)J1,J2, Q2 (11) (P ) L L 0.3m 0 (M5x0.8) LO L 2 4 3 6 (5) 5 4 2) B (12) (2):1U 2)(3)Q1 8) (3)Q2 Assy N C 3) ) (6) ( D [kPa] (2):3M EA NPN2 9) 8) (PD) EB PNP2 0 to -100 EC NPN1 + S EE PNP1 + C FA NPN2 D FB PNP2 -100 to 100 8)VQ100 Ass yP.41 FC NPN1 + FE PNP1 + (3)Q2 (4)LO 9)(3)J1,J2Q2 P.6 (3)C 4) F 3) ZFC 4

EXxx-OMZ0016

EXW1 EXW1 Up to 100 m V.1.0/V.2.0 Available*1 EXW1 EXW1+EX600 *2 V.1.0 NA EXW1 EX600 Up to 10 m V.1.0 NA EX600 EXW1 Up to 10 m V.1.0 NA Available*3 EX600 EXW1+EX600 Up to 10 m V.1.0 NA Available*3 EX600 EX600 Up to 10 m V.1.0 NA Available *1: Available in protocol V.2.0. *2: Up to 100 m between an EXW1 series Base and Remote, and up to 10 m between an EXW1 series Base and an EX600-W series

High Purity Fluoropolymer

P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

Series AP500

Specifications AP501mmA 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) AP510 1 to 100 psig (0.007 to 0.7 MPa) AP506 1 to 60 psig (0.007 to 0.4 MPa) Select compatible materials of construction for the gas Vacuum to 150 psig (1.0 MPa) 500 psig (3.4 MPa) 1000 psig (6.9 MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.06 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

39.3 57 18.5 29.5 41 15.2 13.2 8 1/4" 17 55 23 41.5 46.5 20.9 19 40.2 35.2 R 3/8 NPT 3/8 AS321FG-03-10 AS321FG-N03-09 19 29.5 20.9 41 59 21 31.8 43.3 18.5 15.2 10 5/16" 46.5 41.5 40.2 35.2 18.5 57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 20.9 17.9 12 3/8" 21 59 AS421FG-04-10 AS421FG-N04-11 33.6 47.9 100 21 33.6 47.9 18.5 17.9 10 3/8" 21 100 NPT 1/2 23.8 25.4 28.6 50.1 57.6

IDU/IDF

White) 11 15 22 37 75 55 Note 1) Select an air dryer according to the selection method and not the rated conditions.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

] 100 L/min type 100 L/min type Error display function When an error or abnormality arises, the location and contents are displayed.

CE2

25 to 850 25 to 700 45 30 10 10 10 54 32 26 11 22 20 44 16 11 15 6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37

Slider Type/Ball Bushing Bearing

, 200, 300 (N) 100, 200, 300, 400, 500 15 750 1 axis Operating pressure (MPa) Piston area (mm2) 100, 200, 300, 400, 500, 600 20 Bore size (mm) 1000 0.3 0.2 0.4 0.5 0.6 0.7 100, 200, 300, 400, 500, 600, 800 25 1200 10 15 23 78 31 39 54 46 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axis 15 35 52 176 70 88 123 105 1500 32 20 62 94 314 125 157 219 188 Note) Strokes are manufacturable in 1 mm

End Lock Cylinder Series CBG1

204 100 10 26 M26 x 1.5 23 100 1/2 21 130 40 204 4 End Lock Cylinder Series CBG1 With front lock: CBG1BN Bore size Stroke R GB (mm) Bore size (mm) DL1 GB S TB ZZ 20 19.5 10 (12) 80 (88) 11 117 (125) 25 19.5 10 (12) 80 (88) 11 122 (130) 32 20 10 (12) 81 (89) 10 (11) 123 (131) 40 19 10 (13) 87 (96) 10 (12) 139 (148) 50 23.5 12 (14) 102 (114) 12 (13) 162 (174) DL1 63 23.5 12 (14) 102 (114

Ionizer

V to +400 V +30 V to +100 V Within 30 V 30 V to 100 V 100 V to 400 V 400 V or lower Light ON Positive Static neutralization completion Flash at 4 Hz Detects the electric potential difference and outputs in an analog voltage.