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IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Series ZFB Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Metric size 3/16" 20 22 20 22 30 30 75 40 100 62 ZFB101-05 ZFB101-07 ZFB201-07 ZFB301-11 ZFB401-13 1/4" 1/4" Inch size (2) 3/8" 1/2" Specifications Fluid Air/Nitrogen Negative pressure 0.5MPa 0 to 60C (Non-freezing) 30m 0.15MPa Nylon/Soft Nylon/Polyurethane

Rubber seal 5 Port Solenoid Valve Series SYJ7000

M8 connector 50 Series SYJ7000 How to Order Connector Assembly for L and M Plug Connector How to Order M8 Connector Cable : SY100-30-4AFor DC V100-49-1: SY100-30-1AFor 100 VAC : SY100-30-2ACable length For 200 VAC 300 mm 1 : SY100-30-3AFor other voltages of AC 500 mm 2 1000 mm 3 2000 mm : SY100-30-A 4 Without lead wire 5000 mm 7 (with connector and 2 of sockets only) Lead wire length Nil

Sine Rodless Cylinder Series REA

200 300 300 200 Usable range 100 100 Usable range 20 30 40 50 50 40 30 20 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Note: 1N = 0.2248lbf 1kg = 2.2046lb 1in = 25.4mm 1in = 2.54cm 100 80 REA63 REA50 50 40 30 REA40 REA32

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Connection Female Thread: G Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 Winding direction Sealant tape Expose approx. 1 thread 2. The gasket can be reused up to 6 to 10 times.

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

HRL

-Am-20 (CH1) HRL100-Am-20 (CH1) 0.6 0.6 60 60 0.5 0.5 50 50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump

C95Series

Single clevis 1.58 2.35 3.87 5.52 9.44 13. 13 Refer to table below lor IN side.

99

50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) FGH100-10 {Rc1} FGH200-10 {Rc1} FGH300-10 {Rc1} 0.05 0.05 0.05 Pressure drop (MPa) Pressure drop (MPa) Pressure drop (MPa) 0.01 0.01 0.01 0.005 0.005 0.005 0.001 10 30 50 70 100 0.001 10 30 50 70 100 0.001 10 30 50 70 100 Flow rate (L/min) Flow rate (L/min) Flow rate (L/min) 66 High

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

L Size Screw M4 M4 M6 M8 M8 L 13 16 22.5 24.5 28.5 10 15 20 30 40 3 Series CRQ2 Construction Standard type Sizes 10, 15 Standard type Sizes 20, 30, 40 Parts list Parts list Description Material Note No. Description Material Note No.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

EXH Diagrams (a) to (d) show the combination with peripherals. 13-5-9

Process Pump

With nut PAF341 S S 13 0 1 X68 Fitting type Fitting type Products using stainless steel parts (Body tightening bolts, switching valves, etc.)

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

13 11 13 13 25 30 30 32 40 40 36 46 46 12 15 15 7 9 9 6.5 8.5 8.5 57 (65) 66 (74) 71 (79) 19.5 22.5 25 40 43 46 46 50 53 73.5 82 87 The figures in parentheses are the normally open type. 24 25 Series VX Safety Instructions The following safety instructions are intended to prevent a hazardous situation and/or equipment damage.

MIW/MIS

Kit components main parts MIS12-10D MI-A1201-10 MI-A1202-10 MI-A1203-10 MIS12-20D MI-A1201-20 MI-A1202-20 MI-A1203-20 MIS12-30D MI-A1201-30 MI-A1202-30 MI-A1203-30 MIS20-10D MI-A2001-10 MI-A2002-10 MI-A2003-10 MIS20-20D MI-A2001-20 MI-A2002-20 MI-A2003-20 MIS20-30D MI-A2001-30 MI-A2002-30 MI-A2003-30 Standard Finger Tapped on upper and lower faces Tapped on all faces 3 12 13 14 20 Seal kit

MRQ

Operating pressure [MPa] Cylinder output F[N] Load weight [kg] 150 15 Allowable side load on the piston end Unit: N 100 10 Stroke of linear part Size 40 40 50 4 5 5 10 15 20 25 30 40 50 75 100 32 40 32 14 14 13 13 13 12 12 11 10 9 20 25 30 2 2.5 3 23 23 22 21 21 20 19 18 16 15 2) Using the cylinder body installed vertically: To operate the rotary cylinder with the cylinder body installed

Escapements Series MIW/MIS

Kit components main parts MIS12-10D MI-A1201-10 MI-A1202-10 MI-A1203-10 MIS12-20D MI-A1201-20 MI-A1202-20 MI-A1203-20 MIS12-30D MI-A1201-30 MI-A1202-30 MI-A1203-30 MIS20-10D MI-A2001-10 MI-A2002-10 MI-A2003-10 MIS20-20D MI-A2001-20 MI-A2002-20 MI-A2003-20 MIS20-30D MI-A2001-30 MI-A2002-30 MI-A2003-30 Standard Finger Tapped on upper and lower faces Tapped on all faces 3 12 13 14 20 Seal kit

10

F F MHL2-10D Z-X85 MHL2-16D Z-X85 1 2 1 2 MHL2-10DZ-X85 MHL2-16DZ-X85 25 25 70 60 70 60 20 20 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 15 15 40 40 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 10 10 0.4 MPa 0.4 MPa 0.30 MPa 0.3 MPa 20 20 5 5 10 10 0 0 10 20 30 40 50 60 70 0

ZQ-OM01401

(2) B () ZQ 1VQ110 L -5 L -A (1) (1) L L 0.3m LO L 22 - No.ZQ-OM01401-B Assy N.C.N.O.Assy 1) SY100-30-4A-6 300mm 6 600mm (1) (1) 10 1000mm 15 1500mm Assy 20 2000mm A X T6 61 -13 A6 25 2500mm 30 3000mm (1) 50 5000mm N.C.N.O.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Internal Pilot Manifold L Dimension n: Stations L n 2 110.5 100 86 12 3 123 112.5 96.5 13 4 135.5 125 107 14 5 148 137.5 117.5 15 6 160.5 150 128 16 7 173 162.5 138.5 17 8 173 162.5 149 12 9 185.5 175 159.5 13 10 198 187.5 170 14 11 210.5 200 180.5 15 12 223 212.5 191 16 13 235.5 225 201.5 17 14 235.5 225 212 12 15 248 237.5 222.5 13 16 260.5 250 233 14 17 273 262.5 243.5 15 18 285.5 275

Multi-Axis Step Motor Controller

Parallel I/O Connector I/O 1 Wiring example NPN JXC73 PNP JXC83 24 VDC Load 24 VDC Load OUT0 10 OUT0 10 1 1 +COM1 +COM1 OUT1 30 OUT1 30 Load Load 21 21 +COM2 +COM2 OUT2 11 OUT2 11 Load Load 2 2 IN0 IN0 OUT3 31 OUT3 31 Load Load 22 22 IN1 IN1 OUT4 12 OUT4 12 Load Load 3 3 IN2 IN2 OUT5 32 OUT5 32 Load Load OUT6 13 OUT6 13 Load Load 23 23 IN3 IN3 OUT7 33 OUT7 33 Load Load 4 4 IN4 IN4 OUT8 14

MK

D-A7lH, A80H D-A73C, A80C D-F7l, J79 D-F7lV, J79C D-A79W D-F9l D-F9lV D-F9lWV D-F9lW D-F9BAL D-P5DW D-A9l D-A9lV D-A7, A8 Model B 6.5 7 6 8.5 11.5 14.5 A 28.5 29 33 24 28.5 28.5 B 7 7.5 6.5 9 12 15 B 4 4.5 3.5 6 9 12 B 11 11.5 10.5 13 16 19 B 4.5 7.5 10.5 B 5 7.5 10.5 13.5 B 9 11.5 14.5 17.5 A 34.5 25.5 30 30 B 8 10.5 13.5 16.5 A 19.5 24 24 A 28 28.5 32.5 23.5 28 28 A 25.5 26 30 21