Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

16 17 18.5 30.2 31 32.4 34.4 34.2 34.5 36.4 43.2 23.1 23.9 25.3 25.2 24.9 25.2 27.2 33.9 14.2 11.4 13.2 15.2 10.4 11.4 13.2 15.2 17.9 36.1 12.7 NPT 1/8 19 21 15 32 18.2 34 34.4 35.4 29.4 18.5 40.4 17.5 NPT 1/4 36 20 21 Reference dimensions of 10-32 UNF and NPT threads after installation. 15-9-60 5 Speed Controller for Low Speed Operation With One-touch Fitting, Elbow Type/Universal Type

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

R2 R1 17 17 6-3/8 1, 3, 5 port 26.5 26.5 3-11-7 8 Series EVS7Dimensions EVS7-8-FG-S-M0 174.5 103 174.5 49 (64) 49(64) 103 71.5 31 (42) 31 (42) 2-8 mounting hole 56 56 1 3 5 16 (20) (2 port) 16 (20) (4 port) 16 (23) (22) 16 (11) 10 12 (16) 62(72) 75(86) A B PB 50 62 (72) 75 (86) 14 2 4 1/8-2 port 12, 14 port Manual override 18 (20) (20) 18 PA R1 P R2 44 (58) 44 (58) 3/8, 1/2, 3/4-5 port

Sine Rodless Cylinder Series REBR Direct Mount Type

Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable

Environment

input value) Model Pushing speed [mm/s] Pushing force (Setting input value) LEC S LEY32 LEY16 1 to 4 30% to 85% LEY16A 1 to 4 40% to 95% 5 to 20 35% to 85% 5 to 20 60% to 95% 21 to 50 60% to 85% 21 to 50 80% to 95% 800 LEC SS-T Lead 4: LEY32C 700 Lead 8: LEY32B LEY25 1 to 4 20% to 65% LEY25A 1 to 4 40% to 95% 5 to 20 35% to 65% 5 to 20 60% to 95% 21 to 35 50% to 65% 21 to 35 80% to 95% 600

CQS

, refer to page 7-6-20.

NCA1

Bore size Standard Stroke 1.50 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 2, 2.50 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 3.25, 4 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 How To Order NCA1 MOUNTING BORE STROKE N XB7 Ex: NCA1B 150-0400-XB7 Standard Auto-switch capable not available Low Temperature 21 Series NCA1 Medium Duty Air Cylinder Special Trunnion Location Specifications

Thermo-chiller/Rack Mount Type

HRR050-W-20 30 Facility water flow rate [L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet temperature [C] This is the facility water flow rate at the circulating fluid rated flow and the cooling capacity listed on pages 20 and 21. 24 HRR Series Dimensions Air-cooled Refrigeration HRR010-A-20-m (75 10) 440 (Includes protruding parts) Ventilation air inlet Ventilation air outlet

Speed Controller with

Metric size Inch size Air 1.5 MPa (1.05 MPa Note 1)) 1 MPa (0.7 MPa Note 1)) 0.1 MPa 5 to 60C (No freezing) Applicable cylinder bore size (mm) 2 3.2 4 6 8 10 12 1/2" 3/8" 5/16" 5/32" 1/4" 1/8" AS1002F AS2002F AS2052F AS3002F AS4002F 6, 10, 16, 20 Note) 20, 25, 32 20, 25, 32, 40 40, 50, 63 63, 80, 100 Note 2) Nylon, Soft nylon, Polyurethane Applicable tube material Note 1) In case of AS1002F

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 38.3 42.1 53.8 64.6 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 18.1 20.7 23.6 27.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 50 57 61.4 71.4 28 28 28 30 26 28 28 36 42 42 48 56 47.8 54.8 57.4 65.4 21.2 21.3 25.6 26.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 Knuckle Pin Rod End Nut Clevis Pin

RSQ

1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 T 20 24 36 44 56 U 22.5 24.5 31.5 35 41 V 18 22 20 28 28 W 41.5 48 58.5 66 80 Y 38 47 Z 14 14 19 Bore size (mm) 16 20 32 40 50 Note 4) These figures show the piston rod extended.

Cylinder with Lock Series CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 28 28 28 30 42 42 48 56 20 25 32 40 38.3 42.1 53.8 64.6 28 28 28 30 16 20 22 30 42 42 48 56 35.8 39.8 49.4 58.4 18.1 20.7 23.6 27.3 3.2 3.2 4.5 4.5 13 15 17 21 26 28 28 36 50 57 61.4 71.4 47.8 54.8 57.4 65.4 21.2 21.3 25.6 26.3 3.2 3.2 4.5 4.5 13 15 17 21 20 25 32 40 Knuckle Pin Rod End Nut Clevis Pin

MQQ

FX FZ H 2-FC S + Stroke ZZ + Stroke D-X 20Bore size (mm) FC FT FX FY FZ H ZZ S Data 10 5.5 2.3 33 20 42 28 101 65 16 5.5 2.3 42 24 54 30 114 74 20 7 4 60 34 75 40.5 151 97.5 25 7 4 60 40 75 44.5 160 102.5 10-5-21 21 Series MQM For other dimensions, refer to basic style on page 10-5-20.

MQQ

7 4 60 40 75 44.5 160 102.5 10-5-21 21 Series MQM For other dimensions, refer to basic style on page 10-5-20.

Thermo-chiller

When a load is stable 0.1C 22 CH1 Circulating fluid temperature [C] Circulating fluid temperature [C] 21 20 19 8.5 kW load 18 0 kW load 17 0 10 20 30 40 When a load is stable 0.5C 27 CH2 For HRLE090-A-20 26 Outdoor air temperature: 32C Circulating fluid set temperature: 20C/25C (CH1/CH2) Heat load in the customer equipment: 9.5 kW (CH1, 2 total) Power supply: 200 V 60 Hz Circulating fluid

Slider Type/Ball Bushing Bearing

2 t r @2 @1 #3 #4 @9 #1 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 No.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

MNB

40 20 14 15.5 19 to 600 32 75 18 104.5 58.5 63 1/4 12 45 17.5 35 27 11 75 134.5 56.5 14 20 40 20 14 16.5 23 to 600 32 90 18 119.5 68 80 1/4 18 45 22 40 32 13 95 169 72 22 30 60 25 20 19 33 to 750 37 102 22 150 81 100 1/4 20 55 25 40 41 16 114 189 89 22 30 60 30 20 19 37.5 to 750 37 116 26 170 96 Bore size (mm) N S U V T P J MM GR GE GF K L Q RR H VA W Z ZZ 32 27 154 13 6.5 34 1/8 10.5 M6

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

2-M2 x 0.4 depth 3 For magnet mounting 4.7 2.5 6-M3 x 0.5 depth 4 15 15 L (mm) N MXP10-10 MXP10-20 SMXP10#1 (#1 + #3) SMXP10#2 (#2 + #4) L K J V H S Z G M W Model 20 20 52.4 44 32 10 60 8 21 6.5 40 MXP10-10 36 36 82.4 74 50 20 90 20 39 7.5 65 MXP10-20 9 Precision Air Slide Table Series MXP Dimensions MXP10/With Shock Absorber Z 3 2-M3 x 0.5 depth 5 V K 5 N M Stroke: S Max. 19 MXP10-10B