SMC Corporation of America
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Load in direction of rod extension Load in direction of rod retraction m 0.3MPa Graph 5 F 0.4MPa Graph 6 m 0.5MPa Graph 7 F 19 Cylinder with Lock Series CNG Model Selection Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 200 200 100 100 40 30 40 50 30 40 50 32 40 25 Load weight: m (kg) Load weight: m (kg) 20 20 20 32 10 10 25 20 5 4 3 5 4 3 2 2 1 1 0.5 100 500 400 300 200

Mounting, Operation P.10 1) Operating air P.10 2) Precaution on design P.11 3) Mounting P.13 4) Operating environment P.13 5) Piping P.14 6) Cushion P.15 7) Speed control P.16 8) Direction control P.16 4. Maintenance P.17 1) Inspection P.17 2) Overhaul P.18 3) Disassembly P.18 4) Assembly P.19 5) Expendable supplies P.20 6) Replacement procedure of seal P.21 7) Inspection P.22 5.

[I (mm) c l BonI.1iIi (mm) A L[) R N X Y LG L 0 ~ t::;r H LH L1 . 50s 107 .2 15 39 18 9 5 Ml0Xl.S 14.7 43.5 MSl(l .25 14 M8x 1.25 B 15 46 18 Ml0xl.5 16.2 43.5 Ml0xl .5 18 9 11 5 Ml0Xl.5 63 112.7 M12xl .75 22 M12xt.75 19.5 11 53.5 13 7 MI6X2.0 59 20 21 80 133 .5 Rod Side Flange: COQ2FP 0-0 OM-DO 4-oFO 40 Thread d Ih A SpeCIal cap bolt 4-N . rBote size A L 0 R N FD FT FV FX F2 Ll H C !

85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8

(different sides, same side) 10 (0.4) 5 (0.2) 15 (0.6) 1 pc. 5 (0.2) 5 (0.2) 10 (0.4) Theoretical Output/Double Acting Type OUT IN Unit: N Operating Pressure MPa (psi) Bore size (mm) Operating direction 0.7 (101.5) 0.6 (87) 0.5 (72.5) 0.4 (58) 0.3 (43.5) 0.2 (29) IN 16933 14514 12095 9676 7257 4838 180 OUT 17812 15268 12724 10179 7634 5089 IN 21112 18096 15080 12064 9048 6032 200 OUT 21991

connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override

85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 SMC 10.5 14 SMC 1/8, 1/4-2 ports 3, 5 port 21 21 21 21 1/8, 1/4-2 ports 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 4 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6 mounting holes 37 Manual override M8

3-4 5 5 Port Air Operated Valve Series VZA4000 Specifications Fluid Air SA VZA4121, 4141 Operating pressure range (MPa) 0.15 to 1.0 2 3 4 2 3 4 0.15 to 1.0 VZA4 21, 4 41 0 to 1.0 VA VZA4121, 4141 Pilot pressure range (MPa) 2 3 4 2 3 4 VZA4 21, 4 41 0.1 to 1.0 SA Impact/Vibration resistance m/s2 Note) 150/50 Operating pressure Pilot pressure Note) Impact resistance: No malfunction from test

History History Version Preface Contents Chap.1 Chap.2 Chap.3 Chap.4 1.0 Feb/19/21 Feb/19/21 Feb/19/21 Feb/19/21 Feb/19/21 Feb/19/21 Record of Changes Version Contents Date 1.0 First edition Feb/19/21 INR-244-831 i Preface Preface Thank you very much for purchasing SMC Thermo-con.

MSQB-OM02-A PRODUCT NAME Rotary Table MODEL / Series / Product Number MSQB1,2,3,7 Contents 2 Safety Instructions 18 Outline 18 How to order 19 Specifications 19 Weight 19 Effective torque 20 Internal construction and parts 20 MSQ1 to 7 21 Basic circuit 21 Circuit structure 21 Recommended models 22 Mounting 22 Load restrictions 22 Unit used as flange mount 23 Direction and Angle of Rotation

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Light/Surge Voltage Suppressor Piping Caution Caution 1. Preparation before piping Before piping is connected, it should be thoroughly blown out by air (flushed) or washed to eliminate cutting chips, cutting oil, and other debris from the pipe inside. 2.

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.

14 17 R 1/4 41.2 46.2 46.7 51.7 18.5 AS22 1FE-02-08SK 18.5 36.4 27.2 8 15.2 39 AS-FE AS-FE AS22 1FE-02-10SK 21 44.5 18.8 35.3 10 18.5 42 AS32 1FE-03-06SK 17 39.3 27.8 6 12.8 57 KE AS32 1FE-03-08SK 18.5 41 29.5 8 15.2 60 14 19 R 3/8 46.5 51.5 51.7 56.7 23 19.8 AS32 1FE-03-10SK 21 43.3 31.8 10 18.5 62 AS-FG AS32 1FE-03-12SK 22 44.3 32.8 12 20.9 64 AS42 1FE-04-10SK 21 47.9 33.6 10 18.5 103

DC() Blue(Black) Dimensions Operation Range ( l Dimension) (mm) Bore size 6 4 10 5 5 Actuator series 63 50 20 25 32 40 15 16 5 5 5 CDJ2 CDVJ3, 5 CDLJ2 CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, REC CDG1, MGG RSDG MGC RHC, MLGC 5 5 5.5 6 7.5 7 7 7 5 5 5.5 6 6 6 5 5 4 5 4 5.5 4.5 Note) Average value at normal temperature including hysteresis.

1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Side port Rc3/8 Bottom port Rc1/4 FHG Bottom port Rc3/8 1 (P) 5 (R1) 3 (R2) Port R is Rc3/8 (A) 4 (B) 2 Seal type FJG Nil R Metal seal Rubber seal 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Options FPG Nil N None Indicator light Indicator light with surge voltage suppressor Individual pilot exhaust 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Z FIG V 5 (R1) 3 (R2) 1 (P) Optional

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to main text for more detailed precautions on every series. 5. Set the pressure of the compressed air to zero before an inspection.

6 @3 @6 @5 @4 @6 @2 @4 @5 @1 i y u C-C A-A !8 !3 B @7 !2 C w !7 C !5 !0 o Motor option: With lock !3 !1 !2 @0 !9 Component Parts Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.