Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting), Operation Manual: K (Operation

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: K (Operation Manual, Calibration

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT 1/8), Connector Type: S (M12 Connector Type), Bracket: A4 [Bracket D for M12 Connector Type (ZS-46-A4)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Piping Specification: N01 (NPT 1/8), Connector Type: S (M12 Connector Type), Bracket: A5 [Bracket E for M12 Connector Type (ZS-46-A5)], Operation Manual: K (Operation Manual, Calibration Certificate)

Bernoulli Gripper

V V V V V KQ2H06-M5G1 V KQ2H06-01GS1 V V KQ2H08-01GS V V Male connector Stainless steel One-touch fittings KQ2S04-M5G1 V V V V V V V KQ2S06-M5G1 V V V KQ2S06-01GS1 V V KQ2S08-01GS V V Hexagon socket head male connector Male connector KQG2H04-M5 V V V KQG2H06-01S V V KQG2H08-01S V V One-touch fittings/ Stainless steel 316 KQG2S04-M5 V v V V V V V KQG2S06

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

Modular F.R.L. Unit

Note 2) Drain guide: G1/4 (applicable to AC25 to 60) AW + [S] + AFM AC20D to 40D AC10: M5 x 0.8 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AC50: 3/8 AC55: 1/2 AC60: 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR Port size M5 01 02 03 04 06 10 M5 x 0.8 1/8 1/4 3/8 1/2 3/4 1 AC20C to 40C AF + AFM + [T] + AR AC20 to 40 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] 3-

Modular F.R.L. Unit

AC10 AC20 AC25 AC30 AC40 AC50 AC55 AC60 : M5 x 0.8 : 1/8 : 1/4 : 1/4 : 3/8 : 3/8 : 1/2 : 1/2 AC10 to 60 AF + [T] + AR + AL T T-interface AC10B to 60B AF + [T] + AR AC20C to 40C AF + AFM + [T] + AR AC20 to 50 AF + AR + AL + [V] AC20A to 40A AW + AL + [V] 3-port valve for V residual pressure AC20B to 50B AF + AR + [V] release AC20C to 40C AF + AFM + AR + [V] Accessories AC20D to 40D AW + AFM

SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 Series Assembly part no.

Electric Actuator/Slider Type

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be obtained by the following equation.

MXS

Combination of Options v: Possible X: Not possible Functional option F R P FR FP Adjuster option v v v v v v v (3) v (3) v (3) AS v v v X X X X AT v v v (3) X X X X A v X X X BS v v v X X X X BT v v X X X X X B v Note 3) For combination of buffer mechanism style and stroke adjuster at extension end style, the buffer stroke is shortened by the adjusted length with the stroke adjuster at extension

AC

pressure exhaust 3 port valve 1/8 1/4 3/8 1/2 3/4 AW + AL + V V AF + AR + V AF + AFM + AR + V AW + AFM + V Note 1) If indicating more than one symbol, place the desired symbols in alphabetical order.

One-touch Fittings

Symbol Size Tubing connection 001 Same diameter tubing Symbol Model Oval type Round type H Male connector v v S Hexagon socket head male connector v v F Female connector v v L Male elbow v v LU Branch male elbow v V Universal male elbow v v W Extended male elbow v v T Male branch tee v v Y Male run tee v v D Male delta union v v U Branch Y v UD Double branch Y v M5 M5 x 0.8 01 R1/8, Rc1

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method AS 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSGl-M5 M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSGl-U10/32 10-32UNF VNote 4) V V V V V V AS-FE KE AS2ll1FSGl-l01 1/8 V V V V VNote 4) V V V V AS2ll1FSGl-l02 1/4 VNote 4) V V V V VNote 4) V V V V AS-FG AS-FG R NPT Note 1) Sealant

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

IC circuit A56 5 V Reed switch Solid state switch A53 12 V Grommet Yes Relay, PLC 24 V A54 2-wire 100 V, 200 V Diagnosis indication (2-color) A59 W F59 3-wire (NPN) 5 V, 12 V IC circuit F5P 24 V 3-wire (PNP) J59 12 V 2-wire J51 100 V, 200 V Relay, PLC Yes Grommet F59 W 3-wire (NPN) 5 V, 12 V IC circuit Diagnosis indication (2-color) F5PW 3-wire (PNP) J59 W 24 V 2-wire F5BA

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

IC circuit A56 5 V Reed switch Solid state switch A53 12 V Grommet Yes Relay, PLC 24 V A54 2-wire 100 V, 200 V Diagnosis indication (2-color) A59 W F59 3-wire (NPN) 5 V, 12 V IC circuit F5P 24 V 3-wire (PNP) J59 12 V 2-wire J51 100 V, 200 V Relay, PLC Yes Grommet F59 W 3-wire (NPN) 5 V, 12 V IC circuit Diagnosis indication (2-color) F5PW 3-wire (PNP) J59 W 24 V 2-wire F5BA

CQ2

Standard Bore (mm) Stroke range (mm) (mm) A B C D E F G H I J K1 K2 L M N p Q S U V Z Th9 0 0.052 44.4 6 6 10.5 M3 X 0.5 3.5 M5 X 0.8 15.5 37.4 35.5 1.5 5.2 32 5 22 3.5 25 19.5 5 to 30 12 15 0 0.052 48 41 10 15 8 8 M4 X 0.7 3.5 M5 X 0.8 41.5 1.5 6 38 6 28 3.5 29 22.5 5 to 30 16 20 0 0.052 10.5 18.5 48 55 46 7 10 M5 X 0.8 4.5 M5 X 0.8 2 8 47 8 36 5.5 36 24.5 5 to 50 20 13 0 0.052

1

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 v v V v v IC circuit 3-wire (PNP) M9PAV1 M9PA1 v v V v v 2-wire 12 V M9BAV1 M9BA1 v v V v v Water resistant (2-color indicator) 1 Water resistant type auto switches can be mounted on the above models