1

(59) 77 (83) 32 59.5 (65.5) 40 10.5 10.5 7.5 57.5 (63.5) 87.5 (93.5) 40 64 (70) Bore size GA GB S ZZ Bore size ZZ 20 9 5 41 (46.5) 62 (67.5) 20 47.5 (53) 25 11 5 43.5 (49) 67.5 (73) 25 50 (55.5) 32 10.5 5 43.5 (49.5) 67.5 (73.5) 32 50 (56) 40 11 5 50.5 (56.5) 80.5 (86.5) 40 57 (63) ( ): Dimensions of built-in magnet type 6 JCM Series Basic (Female Thread on Both Covers) (B) Stroke Port

Compact Cylinder

58 16 28 33 38 43 49 54 20 53 61 68 75 83 90 98 105 112 120 20 40 47 55 62 69 77 84 91 99 106 25 73 82 91 100 109 119 128 137 146 155 25 55 64 73 83 92 101 110 119 128 138 32 122 135 149 162 176 189 203 216 230 243 32 94 108 121 135 148 162 175 189 202 215 40 184 201 217 233 250 266 282 299 315 331 40 145 161 177 194 210 226 243 259 275 292 50 332 357 383 408 433 458 483 508 533 50 284

Soft Start-up Valve

74 108 53 Width across flats 36 80 [mm] Optional specifications With bracket With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18

Industrial Filters

Symbol Element length Number of arranged elements 4 7 9 18 22 29 34 37 53 83 04 07 09 18 22 29 34 37 53 83 Element length FQ1 A B C D L250 L500 (L250 x 2) L750 (L250 x 3) L1000 (L250 x 4) Symbol Nominal filtration accuracy (m) Note) FN Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 50 70 74 75 100 105 120 EB ES X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Port size Port

Series 10-, 21- AW-B Filter Regulator

70 70 90 15.4 8 10.5 10.5 13 5.4 6.5 8.5 8.5 11 43.9 45.8 54 55.5 65.8 34 40 54 54 66 30 41 50 50 70 30 38.4 38.4 47.5 63 66.4 74.3 74.3 80.3 26 29.4 37.3 37.3 43.3 44 44 44 44 44 72.4 85.6 91.7 93.2 175.5 11 10.5 10.5 8 6.5 91.4 121.9 153.9 155.9 242.6 25.5 24.8 28.9 30.4 42.2 40 53 70 75 95 5 3.5 1.5 1.2 3.2 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1/8 1/8 1/8 1/8 1/8 M28 x 1 M38 x

JIS Standard Hydraulic Cylinder

x 1.25 76 145 52 10 27 19 11 43 35 1/2 46 142 14 45 17 18 115 35 18 108 60 52 55 25 to 1400 63 30 20 M12 x 1.5 90 165 63 10 27 19 14 43 35 1/2 52 148 18 50 19 20 132 41 19 106 71 65 55 25 to 1500 80 35 20 1/4 stroke M16 x 1.5 110 190 80 11 22 22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 65 80 25 to 1800 100 39 15 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53

Compact Cylinder

IY-G02 CD-MU02 CD-MU03 CD-MU04 Applicable retaining ring C-type 8 for shaft C-type 8 for shaft C-type 10 for shaft C-type 10 for shaft CDH10 (mm) CJ 7 10 10 CI 17 22 27 CH 11 13 13 CF 4 7 10 CE 3.5 3.5 3.5 CB 23 27 31 CA 53 67 85 Size 25 32 40 Part no.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Single vane type/Double vane type CRBU2W40-S/D h 52 64 Keyway dimensions b l h (h9) l b (h9) Model CRBU2W400 0.030 4 20 0 0.030 4 85 38 2 x 5.5 through 2 x M5 x 0.8 through 25h9 0 0.052 10g6 0.005 0.014 11.5 4h9 (New JIS key dimension) 0 0.030 (4P9 Keyway dimension) 0.012 0.042 2 20 30 2 x 5.5 through 2 x 5.5 through 38 20 3 5 5 16 14 (98) 53 B port A port 2 x

CV/MVGQ

50 53 24 16 7 77 21 22 41 8 76 46.5 21.5 42.5 M32 x 2 M14 x 1.5 Dimensions by Stroke Single Acting/Spring Extend MVGQ Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) HX Q Symbol Bore (mm) 20 25 32 40 QY CC Z Z Z S S S Z S ZZ ZZ ZZ ZZ S Z ZZ 20 25 32 40 65.3 19.8 112 137 87 143 168 193 133 158 183 14 RB 70.5 22 112 137 87 147 172 197 137 162 187 14 76.5 25.8

XM, XY

87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 70 P.C.D 58.7 6 x 6.6 114 P.C.D 92.1 8 x 8.4 95 110 XYA/In-line type C D XLA G Fd C XL (K flange) XLQ XM XY XM XY B DXSA XVD H 45 XGT A CYV E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53

Ejector Valve Unit Series ZYY/ZYX

Note 1) Note 2) Max. vacuum pressure Manual override S L 84 kPa 53 kPa Nil D E Non-locking push type Push-turn locking slotted type Push-turn locking lever type Nozzle diameter 07 10 0.7 mm 1.0 mm 1082 Ejector Valve Unit Series ZYY/ZYX How to Order Ejector Valves for ZYX3000 ZA Lead wire/ Voltage suppressor specifications ZX Plug-in type Serial transmission type LOZ ZR LOZ 10 X3 ZY 5 M Z

SJ3A6

-1A-N VZ1000-11-1-l SJ3000-53-2A End block assembly DIN rail End block assembly For U side Refer to page 61.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

JA/JAH/JB/JS

nominal size M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1 M8 x 1.25 M10 x 1 M10 x 1.25 M10 x 1.5 M12 x 1.25 M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 d: Thread nominal size M20 x 1.5 M20 x 2.5 M22 x 1.5 M24 x 1.5 M24 x 2 M24 x 3 M26 x 1.5 M27 x 1.5 M27 x 2 M30 x 1.5 M30 x 2 M33 x 2 M36 x 1.5 M39 x 1.5 M42 x 3 M48 x 1.5 D C B B H H C D CE1 29 29 31 34 34 34 39 39 39 44 44 48 53

CA2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Ht Ht Bore size (mm) Ht 44 52 59 Ht Hs 53 60 67 Hs 30 34 41 48.5 56 Ht 34 38.5 46.5 55 63 Hs 30 34 41 48.5 56 Ht 30.5 35 42.5 51 59 Hs 30 34 41 48.5 56 40 50 63 80 100 30 34 41 49.5 58.5 B 32 A Operating Range Bore size Auto switch model 40 8 50

70astamb1

53 73 73 MB-B03 MB-B05 11 11 MB-B08 Rotating Angle Method for longitudinal mounting of clevis pivot bracket When there is no air cushion, the unit is equipped with rubber bumpers.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

depth 4.5 (Piping port) IN 2-M3 x 0.5 (Through-hole) 2-M3 x 0.5 CX (Through-hole) D2-M5 x 0.8 thread depth 4.5 2-M3 x 0.5 thread depth 4.5 (Opposite side: Same) S (13 + ST) 10 (Piping port) (Opposite side: Same) -X 3 208 6 Data 22.5 11 Z (10 + 1/2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model CXS6-10 CXS6-20 CXS6-30 CXS6-40 CXS6-50 68.5 10 15 23 55 78.5 20 20 33 65 88.5 30 25 43 75 98.5 40 30 53

MG

49 MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB A E DB Over 200 st Over 50 st to 200 st Over 50 st to 200 st Bore size (mm) Bore size (mm) Over 200 st Over 30 st to 100 st Over 30 st to 100 st Over 200 st Over 100 st to 200 st Over 100 st to 200 st 50 st or less 50 st or less Over 200 st 30 st or less 30 st or less 104 104.5 51 51 20 25 53

MTS

(N) Backlash Manual release Head end only 125 211 29 53 82 329 Bore size (mm) Standard stroke (mm) 1 mm Non-lock type only 8 5, 10, 15, 20, 25, 30 12, 16 25, 50, 75, 100 Theoretical Output 25, 50, 75, 100, 125, 150, 175, 200 20, 25, 32, 40 (N) Strokes other than the above are produced upon receipt of order.

EXxx-OMO0027

XML file 53 Setting using TwinCAT System Manager 53 I/O Map 62 Diagnostic 63 Details of diagnostic data 66 Parameter settings using TwinCAT (SDO communication) 68 Accessories 100 -1No.EX-OMO0027-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.