VHS20/30/40/50

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 5-8-22 5 Series VHS Specific Product Precautions Be sure to read before handling. Air Supply Precautions on Design Warning Warning 1.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Symbol Option None Exhaust cleaner: For D side mounting Exhaust cleaner: For U side mounting Nil CD CU SB SD SU W Manifold Refer to pages 2-5-40 to 2-5-43. (2) 5 Plug lead unit (2) Kit type Direct exhaust with silencer box: Exhaust from both sides Direct exhaust with silencer box: D side exhaust Direct exhaust with silencer box: U side exhaust IP65 enclosure C Stations kit (Connector) (2) 01

VXR21/22/23

. / . 01$ 2 0 VXR239 2 0 17-3-53 2 The VX series will be revised shortly. Series VXR21/22/23 Normally Closed (N.C.)

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Analog voltage 1 to 5 V Analog voltage 1 to 5 V Or IO-Link hub (Commercially available) Process Data Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH11 measured value: 16-bit signed integer Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Measurement data of sensors for 4 channels are combined and cyclically sent as a process data.

Power Valve: Economy Valve Series VEX5

Grommet (G) 4 x M6 Thread depth 12 2 x 112, 2 Port 2 (A), 1 (P) Silencer (P3) 2 Port 3 (R) For bracket mounting Refer to page 2449. 4 x 7 Mounting hole 243 (Air operated) Max. 22.5 Min. 14 2448 Power Valve: Economy Valve Series VEX5 External Pilot Piping Caution Refer to front matter 53 for Safety Instructions and pages 3 to 8 for 3/4/5 Port Solenoid Valve Precautions.

Rotary Actuator/Vane Style Series CRB1

Note 2) Solenoid valve dimensions: 2 position single solenoid, ( ): 2 position double solenoid. 3 5 F2 (When double solenoid is mounted) (mm) C2 C3 A1 A2 B1 B2 B3 C1 D1 D2 E1 E2 F1 F2 G R Model (Size) CVRB1BW 50 CVRB1BW 63 CVRB1BW 80 CVRB1BW100 120 (136.5) 60 (61) 78 67 18 36 2.8 82.5 12 24 11.5 30 52 (53) 104 (120.5) 25 1/8 102 (136.5) 60 (61) 98 82 18 36 2.8 82.5 16 24 11.5 30 52 (53) 104

AC Servo Motor Driver (CC-Link Type)

Positioning Mode in Setup Software . 46 5.6.1 Positioning Mode . 47 5.6.2 Motor speed Configuration . 48 5.6.3 Acceleration/deceleration Time Configuation . 49 -1- 5.6.4 Move distance Configuration and Operation . 50 5.7 Positioning (Point Table) Operation using the Setup Software . 51 5.7.1 Point table List . 51 5.7.2 Point table Data . 52 5.7.3 Point table (Target position) Configuration . 53

AC Servo Motor Driver (CC-Link Type)

Signal ON Selection Parameter Configuration . 42 5.5.2 Initial I/O Signal Allocation . 45 5.5.3 Signal Allocation using Setup Software . 45 5.5.4 Allocation Examples . 46 5.5.5 I/O Signal Allocation Check. 48 5.5.6 Parameter setting when using it by I/O signal (CN6 connector use) . 49 5.6 Positioning Mode in Setup Software . 51 5.6.1 Positioning Mode . 52 5.6.2 Motor speed Configuration . 53

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

Series 10-, 21- AF-A Air Filter

70 70 90 90 8.4 13 12.5 12.5 13 13 5.4 6.5 8.5 8.5 11 11 22 23 26 25 35 35 27 35 52 52 66 66 30 41 50 50 70 70 20 26.7 35.5 35.5 45 47.5 25 35 40 40 30 30 30 38.4 38.4 20 26.7 35.5 35.5 45 47.5 9.8 14 18 20 24 24 91.4 121.9 153.9 155.9 226.9 240.9 40 53 70 75 90 95 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

Vacuum Filter AFJ Series

104.1 14 26.7 30 35 26.7 41 35 23 6.5 13 53 2.3 30 AFJ40 1/4, 3/8, 1/2 70 136.1 18 35.4 38.4 40 35.4 50 52 26 8.5 12.5 70 2.3 35 785 AFJ Series Specific Product Precautions 1 Be sure to read this before handling the products.

D. P. Lube ALD600/900 Series

D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

Air-hydro Unit

CC CC Lube-plug 4 x T Mounting hole Rc 1/8 Pilot air connection port (Stop valve side) Rc 1/8 Pilot air connection port (Stip valve side) Manual push button Oil port size Rc Oil draining hole Rc 1/4 Throttle valve locking screw (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL EA EB EL F H GA GB GL KA KB KL M CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G 3/8 186 1/2 64 104 86 88 53

51

(mm) Rod Flange Symbol F GB B A AL B1 C D FT FX FD ZZ E GA H H2 H1 I J MM KA NA P S Bore size (mm) 20 25 32 40 50 63 80 100 12 15 15 20.5 26 26 32.5 32.5 14.5 17.5 17.5 23.5 29 29 35.5 35.5 8 10 12 14 18 18 22 26 12 14 18 25 30 32 40 50 5 6 6 8 11 11 13 16 79 85 87 93 121 121 151 152 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 14 16.5 20 26 32 38 50 60 2 2 2 2 2 2 3 3 28 32 38 46 58

CL

ML1C 25 Bore size (mm) Auto switch model D20 20 25 32 40 32 20 D-B5/B64 D-G5/K5 BA-01 BA-02 BA-32 BA-04 25 20 -X 10 D-C7/C80 D-H7 BMA2-020 BMA2-025 BMA2-032 BMA2-040 20Mounting screws set made of stainless steel The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

CNG

Bore size (mm) Mounting bracket Bore size (mm) Auto switch model 20 25 32 40 20 25 32 40 Axial foot D-C7/C8 CNG-L020 CNG-L025 CNG-L032 CNG-L040 BMA2-020 BMA2-025 BMA2-032 BMA2-040 D-H7 Flange CNG-F020 CNG-F025 CNG-F032 CNG-F040 D-B5/B6 Trunnion pin CG-T020 CG-T025 CG-T032 CG-T040 BA-01 BA-02 BA-32 BA-04 Clevis D-G5NTL CG-D020 CG-D025 CG-D032 CG-D040 Mounting screws set made of stainless

Multi-channel Digital Sensor Monitor ( compatible)

Panel mount adapter (Model: ZS-26-B) Panel mount adapter + Front protective cover (Model: ZS-26-01) 48 conversion adapter (Model: ZS-26-D) : The panel mount adapter can be rotated by 90 degrees for mounting. : Front panel of this Controller meets IP65 (if 48 conversion adapter is used, it meets IP40).

4-channel Flow Monitor ( compatible)

Panel mount adapter (Model: ZS-26-B) Panel mount adapter + Front protective cover (Model: ZS-26-01) : The panel mount adapter can be rotated by 90 degrees for mounting. : Front panel of this Controller meets IP65. However, if the panel mount adapter is hold enough with screw and the instrument is not seated correctly, water might enter.