Electric Actuators

(B contact) 2 pcs.

NCA1

SQUARE FLANGE BORE ROD KK A B V W Y ADD STROKE MM SM LB P 1 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 2 1/4 1 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 2 1/4 2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 2 1/4 2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 2 1/4 2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 4 2 1/4 2 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 1/8 2 3/8 2 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 1/

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(NPN) b-v G39 1 e , i,,",, 2-wi," K39 -1 i DiagnostiC Indication I'" 3-~,e (NPN) 1 5V, 12 \ M9NW Relay, PLe 3-w", (PNP) It . ~ .. (2-ColOr indication) 2-~-,"24 V I ( ~ .' Grommet , , 3-wi,.

Air Cylinder NCA1 Series

FRONT SQUARE FLANGE BORE ROD KK A B V W Y ADD STROKE MM SM LB P 1 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 2 1/4 1 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 2 1/4 2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 2 1/4 2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 2 1/4 2 1 3/8 1-14 1 5/8 2 5/8 1 1/4 2 9/16 4 2 1/4 2 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 1/8 2 3/8 2 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16

1

V V V v v IC circuit 3-wire (PNP) M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NAV1 M9NA1 v v V v v IC circuit 3-wire (PNP) M9PAV1 M9PA1 v v V v v 2-wire 12 V M9BAV1 M9BA1 v v V v v Water resistant (2-color indicator) 1 Water resistant type auto switches can be mounted on the above models

Round Type Hydraulic Cylinder

Solid state auto switch Connector IC circuit 3-wire (NPN) 2-wire 5 V, 12 V 12 V Terminal conduit Relay PLC Yes 24 V 3-wire (NPN) Diagnostic indication (2-color indicator) IC circuit 5 V, 12 V 12 V 3-wire (PNP) 2-wire Grommet 3-wire (NPN) IC circuit Water resistant (2-color indicator) 5 V, 12 V M9PAV1 M9PA1 3-wire (PNP) 2-wire M9BAV1 M9BA1 12 V 5 V, 12 V 5 V H7NF A96 A93 A90 B54 B64 C73C

RSQ

3-wire (NPN) 3-wire (PNP) J 5 V, 12 V IC circuit Grommet 2-wire 12 V DConnector 3-wire (NPN) 3-wire (PNP) Relay, PLC 24 V IC circuit Diagnostic indication (2-color indication) 5 V, 12 V -X Grommet Water resistant (2-color indication) 12 V 2-wire 20H7BA 4-wire (NPN) With diagnostic output (2-color indication) H7NF IC circuit 5 V, 12 V Data Solid state switches marked with are produced

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

, B , C ) 27 2.5 2 3-R1.5 2-4.5 through 12.5 37 8 6.5 10.3 6.5 31 4.2 2 31.5 2 36h9 0 0.062 27 16 9 5 4.5 Angle adjustment bolt 2-4.5 through 3-R1.5 2-M3 x 0.5 1 5 Adjustment: Max. 7.5 0.5 B port A port +0.025 0 3-3H9 long groove depth 2.5 4g6 0.004 0.012 ( A , B , C ) 9h9 0 0.036 29 4-M4 x 0.7 depth 8 2-M3 x 0.5 depth 4 0 0.062 36h9 Top ported: MSUA1-SE A port B port 9.5 2-M3 x 0.5 8.5 11

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

3 4 5 NPN 2 outputs + 1-5 V output NPN 2 outputs + 4-20 mA output NPN 2 outputs + Auto-shift input PNP 2 outputs + 1-5 V output PNP 2 outputs + 4-20 mA output PNP 2 outputs + Auto-shift input IS Sensor connector (e-con connector) C ISG ZSM Unit specifications Note) At the factory, the connector is not attached to the cable, but packed together with it for shipment.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

5 V, 12 V 12 V Relay, PLC 24 V Grommet 5 V, 12 V Diagnostic indication (2-color indication) IC circuit 12 V 3-wire (NPN equivalent) A96V A96 5 V IC circuit DGrommet A93V A90V A93 A90 100 V Relay, PLC 24 V 12 V 2-wire IC circuit 100 V or less -X Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other

Digital Flow Switch (Manifold type)

] Model Minimum Maximum PF3W704/PF3W504 0.5 4 PF3W720/PF3W520 2 16 PF3W740/PF3W540 5 40 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V Current output 2.4 mA 4 mA 20 mA 21.6 mA -61No.PF-OMW0004-B Dimensions Position of the front/mounting hole Integrated type (basic type): PF3WB (mm) A B Flow range a (L/min) Open Close Open Close 0.5 to 4 (symbol 04) 33 14 33

Compact

1 t q r e A A B !6 @3 @6 @5 @4 @6 @2 @4 @5 @1 i y u C-C A-A !8 !3 B @7 !2 C w !7 C !5 !0 o Motor option: With lock !3 !1 !2 @0 !9 Component Parts Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

(PNP) 2-wire IC circuit 5 V,12 V Reed switch Solid state switch 12 V IC circuit 5 V,12 V Yes Grommet Diagnostic indication (2-color indication) Relay, PLC 24 V 12 V IC circuit 5 V,12 V Water resistant (2-color indication) 12 V 3-wire (NPN equiv.)

Compact Cylinder

M9B M9NWV M9PWV M9BWV M9NAV M9NW M9PW M9BW M9NA IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indication) Grommet 24 V Yes 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9PA M9BAV M9BA 12 V 3-wire A96V A96 (NPN equivalent) 5 V IC circuit Yes Grommet A93V A90V A93 A90 IC circuit 100 V Relay, PLC 2-wire 24 V 12 V No 100 V or less Solid state

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

RD SD LRUN PW P SYJ 44 54.5 B B B B B SZ X SMC SMC SMC 27 VP4 46 (External pilot port) 2 x Rc 1/8 54 S0700 1(P), 5(R1), 3(R2) port 6 x Rc 1/2 VQ Pilot valve manual override D side U side VQ4 1 2 3 4 5 6 7 n Stations VQ5 VQC VQZ SMC SMC 139 123 SQ 104 B B B B B B B 79.5 14.5 63.5 49.5 VFS A A A A A A A VFR 19 33 54 2 VQ7 4(A), 2(B) port 2n x Rc 1/4, 3/8 EX123: 2 x G 1/2 EX124: 4 x G 1/2 Use

Compact Vacuum Unit Ejector/ Vacuum Pump System

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment for machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety, etc. *2) Labor Safety and Sanitation Law, etc.

AC

3 Valve spring Stainless steel 11.5 X 8.5 X 1.5 JIS B2401 P3 28 X 25 X 1.5 14.5 X 10.5 X 2 JIS B2401 P5 35 X 31 X 2 Valve O ring NBR 1 O ring !2 Bracket A 2 O ring NBR Bracket ass'y Bracket 136312 136412 2 1 set 2 Bracket B Hex. socket head cap screw O ring NBR !3 2500 3000 A B How to Order (1) When adding n stations to ARM : Regulator n pcs.

Plug-in Unit

(Serial transmission kit: EX126) 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 4-G 1/2 Conduit port VQC SMC SMC SMC SMC SMC SMC SMC SQ 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 VQ0 13 55.5 42.7 43.5 20.5 VQ4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 33.5 11.5 15.7 12 2-Rc 1/8 (Pilot exhaust port) VQ5 (6.5) 21.5 2-Rc 1/8 (External pilot port) 27 2n-Rc 1/4, 3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4:

HRS100/150

as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 97 Thermo-chiller Standard Type HRS100/150 Series

VS 8-2/VS 8-4

Output circuit Surge voltage 24 V 0 V sol.1: Energized 2 V or less R Surge voltage Internal circuit 0V sol.2: De-energized 2 V or less Surge voltage R 24 V 0 V Large capacity Load: Energized 2 V or less R Countermeasure parts Diode (Anode) + (Cathode) Relay Switching element Power supply circuit breaker OFF C Valve R Leakage voltage Power supply 24 VDC Leakage voltage Figure 2.