5 Port Solenoid Valve Series SY3000/5000/7000/9000

50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector Sonic conductance C [dm3/(sbar)] L plug connector 24 V Note 4) Series M8 connector Pressure center 12 V DIN terminal Closed center Exhaust center 6 V Grommet 4/25/3 (A/BEA/EB) Double 5 V Single { } 3 V SJ P.108 SY3 20 0.65 SY Body ported Base mounted Body ported Base mounted SY5 20 2.4 SV SY7 20 3.3 SYJ SY9 20 SZ 8.6 P

Aluminum High Vacuum Angle Valve

(NW) Right flange surface Left flange surface D K (DN) E H V I G L H A V V M A C U U Flange side r Temperature specifications/Heater t Auto switch type Symbol Nil Auto switch model Without auto switch (without built-in magnet) Remarks Symbol Nil Temperature 5 to 60C Heater With 100C heater With 120C heater D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(

MY1

m2 x g x X M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

V100

circuit 0.35 (With indicator light: 0.4) Power consumption (W) DC 0.1 (With indicator light only) External pilot 1.4 (With indicator light: 1.5) 100 V 110 V [115 V] 200 V SYJ31 R 2 4 SYJ32 R 2 4 1.6 (With indicator light: 1.7) (A) 2 (A) 2 Apparent power (VA) AC [1.7 (With indicator light: 1.8)] X X 2.3 (With indicator light: 2.4) 220 V [230 V] 2.5 (With indicator light: 2.6) 1 (P) 3 (R)

Solid State Auto Switches

or less (0.8 V or less at 10 mA load current) 0.8 V or less 4 V or less Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less at 24 VDC Leakage current Operating range .

Free Mount Cylinder

Load voltage Auto switch model Lead wire length (m) Indicator light Wiring (output) Special function Electrical entry AC DC Pre-wired connector 0.5 (Nil) 3 (L) 5 (Z) Applicable load Type Perpendicular In-line 3-wire (NPN equivalent) 5 V A96V A96 IC circuit Yes Yes Reed switch Solid state switch Grommet 100 V 24 V 12 V 5 V, 12 V A93 A90 M9N M9P M9B F9NW F9PW F9BW A93V A90V M9NV M9PV M9BV

CA2

Reed switch Solid state switch 5 V IC circuit Z76 Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Yes Relay, PLC 24 V 2-wire 100 V, 200 V Diagnostic indication (2-color indication) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V 100 V, 200 V 2-wire 3-wire (NPN) 3-wire (PNP) IC circuit Relay, PLC 5 V, 12 V Diagnostic indication (2

Compact 5-Port Solenoid Valve

(A)4 2(B) 4(A) 2(B) 6 0.91 V 3(EB) (EA)5 1 (P) 24 VDC 5(EA) 3(EB) 1(P) JSY3000 N.O. valve x 2 pcs. 3-position closed center (A)4 2(B) 2(B) 4(A) 8 2.77 V V 10 (EA)51 3(EB) (P) 3(EB) 5(EA) 1(P) JSY5000 3-position exhaust center N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) (A)4 2(B) 12 6.59 V V 12 (EA)51 3(EB) (P) 3(EB) 5(EA) 1(P) V Standard v Option G Made to Order Manifold Options MIndividual

Rotary Actuator/Vane Type

CRJ X Y1 X Y1 h L1 b CRA1 Z Z b (h9) h (h9) L1 4 0 0.030 4 0 0.030 20 2 x Q2 B port A port 2 x Q3 CRQ2 B port A port 2 x Q3 A A MSQ F A parallel key is used instead of single flat for size 40.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Mounting Basic Foot Flange Double* clevis * A T-bracket is used with double clevis (D). Mounting nut V V V Rod end nut V V V V Clevis pin V Standard Single knuckle joint v v v v Double knuckle joint* v v v v Rod end cap (Flat/Round type) v v v v T-bracket v Option * A pin and retaining rings are included with double clevis and/or double knuckle joint.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-Z7 D-Z80 D-F7(V) D-J79(C) D-F7W(V) D-F7BA(V)L D-F7NTL D-F79F D-F9(V) D-F9W(V) D-F9BA(V)L D-Y59 D-Y69 D-Y7P(V) D-Y7W(V) D-Y7BAL D-P5DW 13 13 13 12 12 13 10 10 12 12 12 12 11 11.5 9 11.5 9.5 9.5 9.5 14 14 14 15 15.5 CUJ 6 9 9 8.5 6.5 6.5 7 6 5.5 6 5.5 5 6 CU CQS 5.5 6.5 5.5 6.5 5.5 5.5 CQM CQ2 11.5 11.5 11.5 12 12 RQ 5.5 5.5 5.5 6 6 5.5 5 5 5 5 MU Since this is a guideline including

NCQ8

NCDQ8A(B)Z-(C)(M) (in) NCDQ8A(B)Z-100T(M) (025st to 100st) (in) D-A9, D-A9V D-M9(V), D-F9W(V) D-A9, D-A9V D-M9(V), D-F9W(V) D-F9BAL D-F9BAL Bore size Bore size A B HS A B HS A B HS A B HS A B HS A B HS 056 075 106 150 200 250 056 075 106 150 200 250 0.24 0.14 0.33 0.31 0.2 0.35 0.04 0.08 0.12 0.12 0.2 0.28 0.71 0.81 0.96 1.18 1.45 1.6 0.39 0.3 0.49 0.47 0.35 0.51 0.2 0.24 0.28 0.28 0.35 0.43

Table of Contents

V B A B A P1 Hysteresis setting trimmer 28.1 Pressure setting trimmer 28.5 25 15.8 8 Accessory (packed together) 1. Silencer (AN203-KM81 pc.) 51 26 16 2.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Lead wire length (m) Auto switch model Load voltage Indicator light Type Electrical entry Wiring (Output) Pre-wire connector Applicable load Special function Applicable bore size (mm) 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC 80, 100 20 to 63 3-wire (NPN equivalent) IC circuit 5 V C76 Reed switch Solid state switch Grommet B54 C73 C73C 100 V, 200 V 100 V Yes Yes 12 V Relay, PLC 2-wire 24 V

Table of Contents

Type Electrical entry Applicable load Load voltage Lead wire length (m) Indicator light Auto switch model Lead wire type Applicable size Wiring (Output) 5 (Z) DC AC 0.5 (Nil) 3 (L) None (N) 90 Parallel cord 5 V,12 V 5 V,12 V,24 V 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V IC circuit Reed switch No Heavy-duty cord 90A 97 Parallel cord 2-wire 93A 100 V For 10 and 15 T99 Relay, 24 V Grommet

CXS

I M 1 G 0.2 (G) A H P 6.3 5 NN OO (Hexagon head bolt) PP (Hexagon nut) E N X (Hexagon socket head cap screw) F (Through) V (Opposite side: Same) (L) (Z) TT QQ (G) T Q U R UU (Piping port) (Opposite side: Same) (I) (L) (Z) N W C (mm) M N OO A B C D E G H I J K L NN P F Model 2-5.5 through 2-9.5 counterbore with depth 5.3 2-M4 x 0.7 with depth 6 64 25 62 23 11.5 50 28 6 12 12 30 10 M6 x 1.0

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Type Electrical entry Applicable load Load voltage Lead wire length (m) Indicator light Auto switch model Lead wire type Applicable size Wiring (Output) 5 (Z) DC AC 0.5 (Nil) 3 (L) None (N) 90 Parallel cord 5 V,12 V 5 V,12 V,24 V 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V IC circuit Reed switch No Heavy-duty cord 90A 97 Parallel cord 2-wire 93A 100 V For 10 and 15 T99 Relay, 24 V Grommet

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Type Electrical entry Applicable load Load voltage Lead wire length (m) Indicator light Auto switch model Lead wire type Applicable size Wiring (Output) 5 (Z) DC AC 0.5 (Nil) 3 (L) None (N) 90 Parallel cord 5 V,12 V 5 V,12 V,24 V 5 V,12 V, 100 V 5 V,12 V, 24 V,100 V IC circuit Reed switch No Heavy-duty cord 90A 97 Parallel cord 2-wire 93A 100 V For 10 and 15 T99 Relay, 24 V Grommet

MB

24 V 12 V 2-wire Water resistant (2-color indication) Y7BA Grommet 4-wire (NPN) Diagnostic output (2-color indication) F59F IC circuit 5 V, 12 V Magnetic field resistant P5DW 2-wire Lead wire length symbols: 0.5 m Nil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z Solid state switches marked with a are produced upon receipt of order.

Environment

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.