reduces flow setting time 2 e !3 !4 !5 !2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.
n = 2, 3, 4, 5) D-M9mWV D-M9mAV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) *1 When n is an odd number, an even number that is one larger than the odd number is to be used for the calculation.
an auto switch into the groove from the top*3 15 15 30 30 (3) Tube top mounting 5 10*2 5 10*2 *1 For 5 and 10 mm strokes, lead wires will interfere with mounting surface. *2 For 5 mm stroke, it is possible to mount an auto switch, but 2-color display may not be available. *3 When mounting an auto switch from the top with 5 or 10 mm strokes, use a D-F8 auto switch. (1) Bottom mounting
Indicator to confirm opening and closing of valve is standard equipment. Bellows seal, Manual operation: XMH, XYH Features 1 Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal Series XMA, XYA How to Order XMA XYA M9N 16 A A M9N 25 Angle type In-line type 1 2 3 4 5 6 7 2. Flange type 1.
VQ 2 VKF Port size M5 M5 x 0.8 VQZ Regarding VZ120, R port is a supply port.
If it is combined with a different set of parameters, failure can result. 2.
Y7BW 3-wire (NPN) 2-wire Relay, PLC RB 5 V, 12 V IC circuit 3-wire (PNP) J 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) D2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Solid state switches marked with are produced upon receipt of order.
Terminal block numbers 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2 mm.
Power supply voltage Internal voltage drop Leakage current Load impedance Load voltage at OFF = x 2 pcs. x Load voltage at ON = x 2 pcs. = 24V 4V x 2 pcs. = 16V = 1mA x 2 pcs. x 3k = 6V Example: Load impedance is 3k Leakage current from switch is 1mA Example: Power supply is 24VDC Internal voltage drop in switch is 4V 19 Magnet Field Resistant 2 Color Indication Auto Switches Rail Mount
8 @2 @6 !4 !2 @4 @5 !5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o !3 y !1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.
Before machinery/equipment is restarted, take measures to prevent unexpected operation and malfunction. 2) Vacuum pads are excluded from this 1 year warranty. A vacuum pad is a consumable part, so it is warranted for a year after it is delivered.
stepper motor 5 phase stepper motor 2 5 Number of auto/proximity switches Ball screw B Lead screw type 1 2 1 pc. 2 pcs.
Note 2) The value when a manifold base (5 stations) is mounted. For 2 position type with single action.
PAX PB Tubing size Symbol 03 04 03 04 05 06 07 06 08 10 07 11 10 12 11 13 12 13 19 Body class Tubing O.D. 1/8", 3 4 1/8" 4 3/16" 6 1/4" 6 8 10 1/4" 3/8" 10 12 3/8" 1/2" 12 1/2" 3/4", 19 Body class 1 Symbol 1 2 3 4 5 Body class 1 2 3 4 5 Type of part Symbol U B N Type of part Nut & Insert bushing Insert bushing Nut 2 3 4 5 17-5-53 12 Series LVD Special Tools How to order fitting jigs LQ G
Press the SET button continuously for 2 seconds or more. Setting is completed when the SET button is pressed continuously for 2 seconds or more. Setting is completed when the SET button is pressed continuously for 2 seconds or more. Setting is completed when the SET button is pressed continuously for 2 seconds or more. Enter the setting value.
5 !6 !3 !2 !1 !0 q t r i S u y o !4 !8 !
Brown Brown Load Load Switch 1 Switch 1 Blue Blue Brown Brown Switch 2 Switch 2 Blue Blue Power supply voltage Voltage drop Leakage current Load impedance Load voltage at OFF = x 2 pcs. x Load voltage at ON = x 2 pcs. = 1mA x 2 pcs. x 3k = 6V Example: Load impedance is 3k Leakage current from switch is 1mA = 24V 4V x 2 pcs. = 16V Example: Power supply is 24VDC Voltage drop in switch is
D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5
EX600-DM E EX600-DM F EX600-DY B EX600-DY E EX600-DY F EX600-DX B EX600-DX C EX600-DX D EX600-DX E EX600-DX F 1 1 2 1 1 Description Function 6 6 6 6 2 3 2 3 Displays the status of the unit. 2 2 5 5 5 5 3 3 4 4 1 1 2 1 1 6 6 6 6 2 3 2 3 2 3 5 5 5 5 3 4 4 Valve plate mounting groove 1 1 6 6 Valve plate (EX600-ZMV ) 1 5 2 2 3 5 5 3 Direct mounting (1)When joining six or more units, fix the middle
The warranty period of the product is 1 year after the product is delivered to customer from SMC. 2. For any failure or damage reported within the warranty period which is clearly our responsibility, a replacement product or necessary parts will be provided.