SMC Corporation of America
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8 1 4 3 8 , 3 8 1 2 EA, EB 3 8 1 2 3 8 1 2 1 4 3 8 VSA420 VSA430 Common EXH Common EXH standard standard Piping specifications/Side ported is only available.

Note 1) 200 V type only. 400 V type is provided with an earth leakage breaker as standard. Note 2) 200 V type only. 400 V type is CE-compliant as standard. Additionally, combination with option B is not necessary. An earth leakage breaker is equipped as standard.

Note 1) The tightening torque for the hexagon socket head cap screw (M3 x 14 L) is 0.5 to 0.6 Nm. Note 2) The tightening torque for the hexagon socket head cap screw (M2.5 x 5 L) is 0.25 to 0.35 Nm.

The brown lead wire or terminal No.1 is (+), and the blue lead wire or terminal No.2 is (). [In the case of model D-97, the side without indicator is (+) and the blue line side is ().] 1) If connections are reversed, a switch will operate, however, the light emitting diode will not light up.

1 !3 @2 q $4 #3 #1 #0 @1 $2 !7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) 4.34 (110.2) Hastelloy is a registered trademark of Haynes International.

5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 1 1 2 3 4 CN0 1 2 3 4 CN1 1 2 3 4 CN2 1 2 3 4 CN3 1 2 3 4 CN4 1 2 3 4 CN5 1 2 3 4 CN6 1

M3 M3E m x g FE L2 From above, n = 1 + 2 + 3A + 3B = 0.1 + 0.082 + 0.35 + 0.28 = 0.812 From n = 0.812 1, it is applicable. 8-16-9 9 Series CY1F Model Selection 3 a Calculation Example 2 Operating Conditions Cylinder: CY1F25 Terminal butter mechanism: Standard (shock absorber) Mounting: Vertical mounting Speed (average) : a=300 [mm/s] Load mass: m = 3 [kg] (excluding weight of arm section

Valve Mounting 1 2 3 1 2 3 0 1 0 1 After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque listed below. When a 3 port valve is mounted on a 5 port manifold, The "A" port is the working port. The "B"port can either be plugged or unplugged.

For details on this standard, refer to page 9. * The surface finish of the outer surface of the container is equivalent to No. 2D**1.

Confirm that the power supply voltage is enough and that it is within the specifications before wiring. Transition wiring cable length (same cable length) m Power supply cable length: 3 m Transition wiring cable length (same cable length) m Power supply cable length: 10 m Bar length symbol 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 2.

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Note) When connecting port is either M5 or 10-32 UNF thread, it is not available with seal. With gasket is provided as standard.

Modify the detecting position while the auto switch is secured at the position of (3) in the figure. a Auto switch mounting screw M3 x 0.5 x 8 L (For BQ-1) Auto switch Set screw (Unused) r u t c e y Auto switch mounting bracket d Auto switch mounting screw M2.5 x 0.45 x 6 L b Square nut (For BQ-1) w Cylinder q BQ-1 and BMU1-025 are a set of a and b shown above.

Sensor is not connected or wired incorrectly. Not applicable 1 Not applicable 1 Not applicable 1 Turn the power off and on again. If the failure cannot be solved, contact SMC. 1 Displayed if an internal data error has occurred. System error 1 Not applicable 1 1 1: The switch output will be OFF when an error is generated.

Example 1) When the pressure in the rear and the front of the cylinder differs: Example 2) When the air supply is cut off and releasing the inlet pressure to the atmosphere, the residual pressure release of the outlet side can be ensured for a safety purpose. 12 1 1 2 2 1 2 1 3 1 2 1 L 14 2 4 12 10 5 1 3 How to Order Refer to page 65 for size 10.

1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !

37 N.C. 1 N.C. 1 27 27 COM3 18 COM3 18 N.C. 1 N.C. 1 8 8 COM3 19 COM3 19 N.C. 1 N.C. 1 COM3 38 COM3 38 28 28 COM4 20 COM4 20 N.C. 1 N.C. 1 9 9 COM4 39 COM4 39 N.C. 1 N.C. 1 29 29 COM4 40 COM4 40 1 Cannot be connected 1 Cannot be connected I/O 2 Input Signal I/O 2 Output Signal Name Details Name Details BUSY1 Busy signal for axis 1 +COM3 +COM4 Connects the power supply 24 V for input/output

(8.5) Most sensitive position Note 1) Operating load is an induction load.