AR20-B to AR60-B

H H Center of piping Center of piping Center of piping Dimensions Model Standard specifications Optional specifications Square type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B Note 1) C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28 x 1

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 28 27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 28 27.8 42.5 35 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B dimension is the length when the filter regulator

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 28 27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 28 27.8 42.5 35 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B dimension is the length when the filter regulator

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Square embedded type pressure gauge Option Round type pressure gauge J J J J H Dimensions Center of piping H H Center of piping H Center of piping Center of piping Standard

MU

Data Clevis Pin, Knuckle Pin Rod End Nut l Bore size (mm) Bore size (mm) l d B Dd9 H L C D d Part no.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

E F A B H Applicable bore size (mm) Applicable bore size (mm) Part no.

Series M Miniature Fittings M3, R(PT) 1/8, M5

Series KB Piping Module 4 Plug/Cap Plug: KBP H (Hex.) L2 Weight (g) L1 D A Part No. KBP1 KBP2 KBP3 KBP4 11.5 16.8 21.0 28.6 30.4 29.5 23.0 25.5 27.0 8 10 14 19 19.0 12.5 14.0 15.0 5.6 6.8 13.4 24.0 5.0 Cap: KBC H (Hex.) 14 17 19 24 L2 Weight (g) Part No.

IDX-OM-W053

CM PE FM1 PRS P FM2 PE CM FM 12 OLR PTC PTC ILS PRS TB PE GFCI EDV 6 3 6 6 4 2 6 4 7 A A 7 1 7 2 A m 3/h(ANR) 1) (50/60Hz) 0.32/0.375 10 1ANR 65% 2 7 3 7 1 8 C 8 C 8-1 8-2 1) 2) 8-3 8 1 9 G G 9-1 9 1 10 H 10 H 10-1 ( ) 10-2 () AD48-2-A 10 IDFA6E-20-H N.O. () 0.151.0MPa 10 1 10 H IDF-S1941 () 1 AD48-2-A 1 1) 2019 3 2019 2 SERIAL No.XP IDF-S1940

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Speed Controller: Standard Type Series AS In-line Type 1

1/2 1,670 25.5 1,670 25.5 242 AS5000-02 1/4 2,840 44 2,840 44 40, 50, 63 80, 100 233 AS5000-03 3/8 4,270 66 4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C.

Metering Valve with Silencer Series ASN2 1

Dimensions (Hexagon width across flats) Dimensions Min L1 H Screw D D Model Max 20.5 20.5 30 34.2 37 49 ASN2-M5 ASN2-U10/32 ASN2-01 ASN2-02 ASN2-03 ASN2-04 8 8 12(12.7) 17(17.5) 19 24(23.8) 23.3 23.3 35 39.2 42 54 10 10 15 20 25 30 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Screw D Note) (in parentheses) are the dimensions of NPT screw specifications. Caution Be sure to read before handling.

Speed Controller: Standard Type Series AS In-line Type 1

1/2 1,670 25.5 1,670 25.5 242 AS5000-02 1/4 2,840 44 2,840 44 40, 50, 63 80, 100 233 AS5000-03 3/8 4,270 66 4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C.

P

Adaptor connection thread Symbol Pad dia. 1 02 to 08 B5 2 10 to 16 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [qAdaptor] R S ZP 04 A5 [wR type adaptor] Symbol S Pad dia. 02 to 16 L 20 to 50 With Buffer ZP R 16 K20 A10 06 UGN [Pad model no.]

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.

Compact Cylinder with Lock Series CLQ

Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no. (mm) 9 50 18 6.5 10 YB-03 32, 40 80 UA C d1 d2 H K L UT Weight (g) Part no.