Vacuum Module Series ZX

Vacuum switch unit Filter unit Release flow rate adjusting needle Manual operation Vacuum switch Electrical entry Ejector exhaust Electrical entry PV/V port size Pilot valve Components Vacuum switch unit Valve unit N.C. type Ejector unit ZX1 1 10 5 L Z E C K1 L Vacuum switch unit Ejector unit 1 10 L Z E C K3 5 ZX1 Valve unit N.O. type Vacuum switch unit ZX1 1 10 E C Ejector unit CE compliant

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Note 2) The withstand voltage specifications for the wiring unit section is JIS C 0704, Grade 1 or its equivalent. Note 3) CE-compliant: For DC only.

CXT

Long Stroke Stroke range (mm) Y X Z Bore size (mm) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150, 175, 200, 250, 300 44 11 11 8-27-8 9 Platform Cylinder Series CXT Dimensions: 32, 40 (N) X + Stroke S + Stroke H 4-M8 x 1.25 4-8.7 through, counterbore 14 depth 8 HP Depth 12 HG 12 Back side 4-M10 x 1.5 depth 15 (N) T PA T MX d

ZX

For ejector system Nil L Grommet (0.6 m) S 0.3 to 0.7 B 0.5 to 1.2 Combination of supply valve and release valve Grommet (3 m) C Connector (0.6 m) CL Connector (3 m) CN Without connector Unit for replacement Pilot valve Voltage Manual operation Light/Surge voltage suppressor Electrical entry (2) Manifold base (5) Vacuum switch unit 15 C 0X ZSE2 D 05 ZZX1 R A C Piping specifications Stations

Soft Start-up Valve

Caution Without light SY100-61-1 SY100-61-1-C With light Rated voltage Voltage symbol Part number Part number (For AV) (For AVL) DC24V 24V SY100-61-3-05 SY100-61-3-05-C DC12V 12V SY100-61-3-06 SY100-61-3-06-C AC100V 100V SY100-61-2-01 SY100-61-2-01-C AC200V 200V SY100-61-2-02 SY100-61-2-02-C AC110V 110V SY100-61-2-03 SY100-61-2-03-C AC220V 220V SY100-61-2-04 SY100-61-2-04-C

Turntable Cylinder Series MGT

M12 M14 162 202 240 16.5 14.5 18 13.5 15.5 19 16.5 19 23 78 91.5 111.5 15 15 20 12 18 25 16 22 25 49 56.5 66 M6 X 1.0 M8 X 1.25 M8 X 1.25 22 26 32 58 54 62 39 46 56 M10 X 1.5 M12 X 1.75 M14 X 2.0 8.6 10.6 12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st

Compact Guide Cylinder Series MGQ

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGC Made to Order Specifications (For details

Filter Regulator

NPT C2SFN-2J(Z)-A NPT C2SF-2(Z)-A -13- C Note 1) C Note 1) Option symbol Semi-standard symbol 6 C 6C Semi-standard: Semi-standard: C Piping port Piping port (9) Part No. (9) Part No. thread ty pe thread ty pe Rc Rc AD27-D AD27-C-D G G NPT AD27(-Z)-D NPT AD27-C(Z)-D Appearance and part No.

Environment

Size Lead Order no. 19 63 A/B/C LE-D-2-5 Piston rod GR-S-010 (10 g) GR-S-020 (20 g) L LE-D-2-6 * Apply grease on the piston rod periodically.

MU

Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.

IZx-OMP0064

IZF10 C AC adapter AC adapter (AC cord attached) G1 AC adapter (Without AC cord) G2 IZS41 C AC adapter G1 G2 AC adapter (AC cord attached) AC adapter (Without AC cord) IZS41 CF Made to Order Transition wiring cable How to Order 05 08 Full length 8m Full length 5m Full length 2m 02 CF-X13 IZS41 Transition wiring cable length Symbol Cable full length 01 Full length 2m 02 Full length

MU

Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

(mm) MRHQ D 21 24 27 32 38 42 54 A Model MHS2-16D MHS2-20D MHS2-25D MHS2-32D MHS2-40D MHS2-50D MHS2-63D B C 11 13 15 18 21 24 32 E 0.5 5.5 MA 2 x A screw depth B 5.4 M2 x 0.4 0.6 (B) 5.2 D0.8 C 1 M3 x 0.5 8 D (E) F-F 551 Parallel Style Air Gripper/3-Finger Type Series MHS3 16, 20, 25, 32, 40, 50, 63, 80, 100, 125 How to Order Bore size 16 to 25 M9BW 20 MHS3 D 3 fingers Number of fingers 3

Integrated Controller

Model EQY16 EQY25 EQY32 Lead A B C H A B C H A B C Work load [kg] 1 1.5 3 1 2.5 5 10 2 4.5 9 18 9. When an actuator is operated with one end fixed and the other free (ends tapped or flange), a bending moment may act on the actuator due to vibration generated at the stroke end, which can damage the actuator.

51

C d9 (Shaft dia.)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Circuit for DC Circuit for AC Light A A() [+] SOL SOL C(+) [] C ZNR Light Due to the use of non-polar light, the VQZ series has no polarity. Refer to p.1.12-26 for latching style. Connection of Lead Wire (Not necessary if ordering lead wire pre-connected model.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

A External pilot type R (2) B C A Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-40.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

DC circuit AC circuit Indicator light A() [+] A SOL SOL C( + ) ZNR Indicator light [] C Locking type (Tool required) VQZ100 No polarity by adopting non-polar light. Connection of Lead Wire If the manual override is turned by 180 clockwise and the mark is adjusted to 1, then pushed in the direction of an arrow (), it will be locked in the ON state.

POWER CLAMP CYLINDER

G 45 F 60 E 75 D 90 C 105 B 120 A 135 19 - Clamp Arm code List 20 - Use M12-4 pin socket (female) A cord. 21 - CKZ5T series How to Order Base type CKZ5T 50 135 T Proximity switch Bore size Arm opening angle T TURCK 50 50 equivalent 15 15 P P&F 63 63 equivalent 30 30 W None 45 45 Cylinder port 60 60 Nil G 75 75 TN NPT 90 90 TP Rc 105 105 120 120 135 135 Replacement Mouting hole Clamp arm

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2 39.5 60 12 3.2 33.5 5.8 2 39.5 75 17 4.2 36.5 7.5 3 50 75 17 4.2 36.5 7.5 3 50 13-5-6 7 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Body Ported Type (Without silencer): ZH05D --to ZH15D --S L S L