Possible to transfer a workpiece at low-speed.

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BP1000

Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4

BP1000

Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Code Bonnet Standard Panel Installation 3) Code

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

ZR

Example) ZR100-K15MZ-E . 1 ZR1-RV3 . 1 13-3-37 37 Series ZR Valve Unit: ZR1-V Specifications ZR1-V Valve unit part no.

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 125mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: J59W--Solid State, 2-color Indication, 2 Wire, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 175mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: J59W--Solid State, 2-color Indication, 2 Wire, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: D (Built-in), Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 80mm, Thread: TN (NPT), Stroke: 500mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 500mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewied Connector: -, Number: -

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: J59W--Solid State, 2-color Indication, 2 Wire, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: J59W--Solid State, 2-color Indication, 2 Wire, Lead Wire or Prewied Connector: 3m, Number: 1 pc.

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: -, Number: -

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 80mm, Thread: NPT, Stroke: 400mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: 3m, Number: -

Cylinder

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CRQ2

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CG5-S

X165US inch rod option dimensional changes R V Integral clevis type (E)/CG5ENS Dim.

Guide Table Series MGF ø40, ø63, ø100 1

Bore size/ Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.