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Air operated style fluid control valve Vacuum valve Vacuum pad 2(A) 1(P) 2(A) 1(P) 2(A) 1(P) 2(A) 3(P) 3(R) 3(R) 3(R) 1(R) Atmospheric air or micro pressure for vacuum release 22 Multi-purpose Valve Series VCA Direct Operated 2 Port Solenoid Valve for Air Improved durability (Nearly twice the life of the previous series) Operating resistance of moving parts reduced for improved longevity

Ionizer

V to +400 V +30 V to +100 V Within 30 V 30 V to 100 V 100 V to 400 V 400 V or lower Light ON Positive Static neutralization completion Flash at 4 Hz Detects the electric potential difference and outputs in an analog voltage.

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100

Compact Guide Cylinder End Lock Type SeriesMGP

40, 50, 63 P P P P P P P P P P P P MGPL Ball bushing Front lock Locking type Series MGP How to Order MGP M H Z73 N 100 32 Compact guide cylinder Number of auto switches Nil S 2 pcs. 1 pc.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 100 Non-lube Double acting, Double rod (40 to 63) 20 25 32 40 50 63 80 100 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction Flow Rate of Vacuum Suction Type (Reference values) Specifications Bore size (mm) Item 20 25 32 40 50 63 80 100 Size Suction flow rate L/min (ANR) 20/25/32/40 50/63/80/100 1.5 MPa 1.0 MPa

5 Port Air Operated Valve SYA3000/5000/7000 Series

3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated Valve SYA3000/5000/7000 Series Specifications Air 0.15 to 0.7 100 kPa to 0.7 100 kPa to 0.7 (0.7 x P + 0.1) to 0.7 P: Operating pressure range 0.1 to 0.7 0.2 to 0.7 10 to 60 (No freezing.)

Low Maintenance Filter Series FN1

(20m) .005 .005 .001 10 30 50 70 100 .001 10 30 50 70 100 Q (l/min) Q (l/min) Filtration Efficiency (Initial Value) Fluid: Potable water Flow rate: 20l/min Liquid temperature: Room temperature Test dust: AC course Amount of dust: 0.2mg/min Test method: Per P/A test method (sanitary test stand, HIAC particle counter) 100 100 ) m ) ) m m 0 ) 0 m (2 (2 (5 (5 20 20 05 05 -0 S0 S0 S0 0S 00080

Soft Start-up Valve AV2000/3000/4000/5000 1

Operation of solenoid valves in the outlet side To operate solenoid valves mounted on this products outlet side (A port side), first confirm that the outlet sides pressure (P) has increased to become equal to the inlet sides pressure (P). 6.

Compact Vacuum Ejector Series ZQ

for applicable tubing diameter of 8) 3.5 2-R1.75 Release valve P PE 13 (Pitch) P =10 L2 L1 Release flow adjusting screw 8 P PE Exhaust part 2-3.5 62.8 (Body mounting hole Note 1)) 3 75 Suction filter With L type plug connector Vacuum pressure switch PE P EXH S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO

Compact Hydraulic Cylinder Series CH
KGB

(M) 50 (M) 100 x 125l CHKGB32 M6 x 65l 125 45 (M) 5 (M) 65 x 130l x 70l 130 50 (M) 10 (M) 70 x 155l x 75l 155 75 (M) 15 (M) 75 x 180l x 80l 180 100 (M) 20 (M) 80 M14 x 100l x 85l CHKGB80 100 5 (M) 25 (M) 85 x 105l x 90l 105 10 (M) 30 (M) 90 10.5 x 110l x 95l 110 15 (M) 35 (M) 95 x 115l x 100l 115 20 (M) 40 (M) 100 x 120l x 105l 120 25 (M) 45 (M) 105 x 125l x 110l 125 30 (M) 50 (M) 110 22

Refrigerated Air Dryer

psi (0.7 MPa) 62 (106) 59 (100) 65 (110) P. 90 to 96 80 (136) 71 (120) 86 (147) NPT 1 120 (205) 107 (182) 130 (221) NPT 11/2 173 (294) 161 (273) 181 (308) R407C (HFC) 258 (438) 226 (384) 297 (504) NPT 2 353 (600) 300 (510) 406 (690) Note) Air flow capacity for each dew point is indicated. 2.

SYA3000/5000/7000

center 02 With sub-plate 3 3 8 With sub-plate 03 3 position exhaust center 4 3 position pressure center 5 1728 5 Port Air Operated Valve Series SYA3000/5000/7000 Specifications Fluid Operating pressure range MPa Air 0.15 to 0.7 100 kPa to 0.7 100 kPa to 0.7 (0.7 x P + 0.1) to 0.7 P: Operating pressure range 0.1 to 0.7 0.2 to 0.7 10 to 60 (No freezing.)

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

Rotary Cylinder Series MRQ Size: 32, 40 1

Size of linear motion parts Output of rotary motion parts (at 0.5 MPa) Linear motion stroke (mm) Rotating angle 100 30 75 5 10 15 20 25 40 50 80 to 100 32 1.02 Nm 170 to 190 80 to 100 1.91 Nm 40 170 to 190 A connecting port can be selected from two positions that are available on the rotation unit.

AIR CYLINDER

Mounting, Operation P.10 1) Operating air P.10 2) Precaution on design P.11 3) Mounting P.13 4) Operating environment P.13 5) Piping P.14 6) Cushion P.15 7) Speed control P.16 8) Direction control P.16 4. Maintenance P.17 1) Inspection P.17 2) Overhaul P.18 3) Disassembly P.18 4) Assembly P.19 5) Expendable supplies P.20 6) Replacement procedure of seal P.21 7) Inspection P.22 5.

2–4

-RA Both ends tapped (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33 7.5 10.5 45 43 34.4 Rc1/8 NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1

5 Port Solenoid Valve Series SQ1000/2000

2.9 (0.16) SQ1530 20 or less 100 Metal seal 26 or less Dust proof Pressure Enclosure center 3.2 (0.18) SQ1531 25 or less 100 Rubber seal 33 or less Note 1) In case of low temperature, use dry air with no condensation.

RSH/RS1H

load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral

RSH/RS1H

900 0.3 MK(2) 63 80 Load weight m [kg] Load weight m [kg] Load weight m [kg] Load weight m [kg] 0.2 800 800 50 0.1 700 700 RS Q G 600 600 0 500 100 200 300 400 RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] =

Electro-Pneumatic Positioner Series IP8000/8100

D. 9 to 11:P368010-27 At accessory H: (with external scale plate) 100 44 46 IP8100-01 (With terminal box) OUT2.Rc1/4 110 38 192 251 110 40 35 58 218 OUT1.Rc1/4 SUP.Rc1/4 23.5 43 23.5 38 39 11 9 39 OUT2 MPa 0% 50 42 20 162 117 25% MPa 65 A 15 122 ELECTORO PNEUMATIC IP8100 P O S I T I O N E R DA 50% 22.5 75% 100% 125 View A 12 168 8 2 x M8 x 1.25 depth12 Female thread for side mounting 2 x