Flow Control Equipment

Male thread Suitable screw torque (Nm) Hexagonal width (mm) Adjustable spanner nominal (mm) 1/4 4.5 M3 M5 10/32-UNF 100 1/6 8 150 7 to 9 14 1/8 200 12 to 14 17 1/4 200 22 to 24 21 3/8 200 28 to 30 24 1/2 1Nm=10.2kgf/cm Tightening torque for lock nuts Caution qSuitable screw torque for a hexagon lock nut is shown in the table below.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

MGZ Series

(same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

Electric Actuators

Ball screw 0.03 80 3 100 Slide screw 0.05 200 2 Guide rod type Series LXP 200 3 Slide screw 0.05 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 Sanyo Denki Co., Ltd. 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 High rigidity slide table type Series LXS 200 4.5 Slide screw

SMC Electronic Switch Series Variations

300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

VQC

SD0 SDA1 SDA2 Serial kit without SI unit Serial kit for Remote I/O 1 to 8 stations (16 stations) FD0 FD1 FD2 FD3 D-sub connector kit (25P) without cable Serial unit: EX126 D-sub connector kit (25P) with 1.5 m cable 1 to 12 stations (24 stations) Serial kit for DeviceNet/PROFIBUS-DP/CC-LINK D-sub connector kit (25P) with 3.0 m cable P SDVB Serial kit for CC-LINK 1 to 8 stations (16 stations

Rotary Cylinder Series MRQ Size: 32, 40 1

Reed switch: D-A7/A8 Solid state switch: D-F7/J7 ( ) Series MRQ An air cushion is also available.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

200200 300 34 84 122 172 50 4 4.5 3 6 16 22 46 40 M8 x 1.25 92 24 48 124 200 300 36 86 124 174 66 5 6 4 8 20 24 48 50 M10 x 1.5 28 52 128 200 300 38 50 88 124 174 110 80 5 6 4 8 20 24 63 M10 x 1.5 MLGPM (slide bearing)/A, DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB

VCA

AXT632-69-1 AXT632-69-2 VVCA40-3A-06-2 VVCA40-3A-06-1 OR-3200-200-H VCA45--VVCA40-6-n VVCA40-4A-06-2 VVCA40-4A-06-1 Material Mounting screw (side port) Mounting screw (side port) q q Steel Steel Mounting screw (front port) Mounting screw (front port) End plate assembly (D side, side port) End plate assembly (D side, side port) w w Aluminum Aluminum End plate assembly (D side, front port)

Compact manifold regulator ARM5 Series

250 0 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-309 (One-touch

Compact

l Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

VXD21/22/23

TI/ TIL Table (2) Rated Voltage-Electrical Entry-Electrical Option Table (1) Connection Size and Applicable Model PA Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G Connection Applicable model VXD2142-03 VXD2142-04 VXD2152-06 VXD2262-10 VXD2272-32 VXD2382-40 VXD2392-50 Size PAX C D, T G, C T

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Enter together in order, counting from station 1 on the D side.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

M5 x 0.8 12-CY3B10 10 500 50, 100, 150, 200, 250, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B50 50 12-CY3B63 63

Compact Hydraulic Cylinder

Auto Switches: Proper Mounting Positions and Mounting Heights for Stroke End Detection D-M9 D-M9W D-M9AL D-A9 D-M9V D-M9WV D-M9AVL D-A9V CHQ CHQ CHK 32 to 100 20 CHN Approx. U CHM 25 CHS CH2 Approx. U B A CHA B A Related Products D-F7 D-F7W D-J79 D-J79W D-A7 D-A7H D-A8 D-A8H D-F7V D-F7WV D-F7BA D-F7BAV D-F7NT D-F79F D-J79C D-A73C D-A80C 32 to 100 DApprox. U B A Approx.

ZP

D. Applicable tube O. D.

RHC

O.D. 6.8 to 11.5) G 1/2 (Applicable cable O.D. 6.8 to 11.5) 10-6-16 16 High Power Cylinder Series RHC Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Proper Auto Switch Mounting Position Auto Switch Mounting Height D-B5/B64 D-B59W D-G5/K59 D-B5 D-B64 D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-G5 D-G5W D-G5NTL D-G5BAL D-K59 D-K59W D-B59W D-A33 D-A44 D-G39 D-K39

7ND9071en

Ex ta II 2 G Ex ib, II 2 D Ex tb II 3 G Ex nA, II 3 D Ex tc II 3 G Ex ic, II 3 D Ex tc cCSAus: Non incendive ATEX / IECEx: II 2 G Ex d , II 2D Ex tb IIIC cCSAus: Explosion proof TYPE ND9203HE2 REV 2.4 CLASS I, DIV 1, GPS B, C, D; CLASS II, DIV 1, GPS E, F, G; CLASS III; T4...T6, ENCLOSURE TYPE 4X; Ex d IIC T4 T6, AEx d IIC T4...T6; Ex tb IIIC T100 C IP66, AEx tb IIIC T100 C IP66 CSA 08.1980091

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D-Y7P D-A3D DF5 . modsl . gIM fc1iv .. ' 5[ ~F D-M9DWV D-Y7PV D-G39 D-A44 D--A6D D-J59W O-Y70W D-F5BAL .. , I 'Di M90 W DM9DAVL D-K39 D-A59W O-Y70WV D-F59F .