SMC Corporation of America
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q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

Determination of load's kinetic energy (E) E > Es E Es Determination of bore size Review of larger bore size E = m E 2 a ( ) 2 = (Refer to page 1548.) 1000 P Ps P > Ps Determination of pressure for intermediate stop (p) (Refer to page 1548.)

RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 90 95 100 110 120 145 170 100 105 110 120 130 155 180 120 130 140 165 190 125 135 145 170 195 Mounting bolt 8 C Spring washer D Note) When mounting 50 to 63 cylinders from the rod side, be sure to use the attached flat washers because the bearing surface is limited. 9 13.5 12.5

water for welding gun Main line flow control The accumulated pulse output function (100 l/pulse) enables remote monitoring of accumulated flow. 100 l/pulse M/C A COM COM COM B DC12V GND F.G.

L IZF10R-CP 3000+60 0 IZF10R-CPZ 9850+100 0 AC adapter IZF10-CG1 With AC cord +105 100 2144 96 1820 50 44 44 7 1 3 1 AC cord +5 0 300 AC adapter e-con connector F.G. cable (AWG26, Terminal semi-stripped) IZF10-CG2 Without AC cord +105 100 28 2144 96 7 1 3 1 +5 0 300 Inlet IEC60320-C8 e-con connector AC adapter F.G. cable (AWG26, Terminal semi-stripped) IZF10R-CG1 3 2 7 1 300+5 0 F.G. cable

Standard products Nil L R S a b h g d c f e Operating direction Left Right Load weight Light Low Heavy Bore size (mm) Series Guide type Note) Plugs are installed in ports other than those indicated for the model. 6 10 15 20 25 32 40 50 63 L R S Nil Model Clean room rodless CYP High precision guide type Piping port position a b c d e f g h Right Left Right Left Right Left Right Left Operating

22 80 120 189 C F E Breathing port M5 x 0.8 J Integral ttings/LQ1 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-V07(06) 40 40 49.3 68 20.1 LVR40-V11(10) 82.5 82.5 89 115 33 LVR40-V13(12) 82.5 82.5 89 115 33 LVR50-V19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-V07(06) 8 27 56 77 LVR40-V11(10) 14 64.5 100 140.5 LVR40-V13(12) 14 64.5 100

Result area (LER ) ) LEY16RA-100BMLLEY16RA-100 LERH30K-3LLERH30K-3 0 ) LEY16RA-75LEY16RALEY16RA-100 LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 29 No.SFOD-OMT0011CN-A c) Execute Execute b) c) (Apply) d), d) download e) 30 No.SFOD-OMT0011CN-A (2) a View(V) 4.1 (1-1-2) View (V) b c) download e) 31 No.SFOD-OMT0011CN-A

7 SO-015-24 SO-016-9 C-4 SO-010-16 C-6 AS568-048 NLP-32A RCS-10 GMY32 ML1C40G C-7 SO-020-31 SO-015-20 C-4 SO-010-16 C-8 C-150 NLP-40A RCS-12 GMY40 NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR C-7 SO-015-22 SO-015-16 8.3 X 4.5 X 1.9 SO-010-16 SO-010-16 C-100 NLP-25-19A RCS-8 GMY25 $6 $7 $8 $9 %0 %1 %2 %3 %4 %5 %6 %7 %8 %9 Hard anodized Hard anodized Hard anodized M1L025-17A82076

P PNP C E U 1 C E U 5 AC80120V AC100240V DC24V DC24V NPN RS-232C P PNP RS-232C+BCD NPN P PNP C E 1 R *1) (CE1-ROOC) 05 5m 10 10m 15 15m 20 20m *1)() C ()(CE2)(CE2**-*Z ) CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 11 3 100 200 200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400 500 200 400 500 NO mm/s mm/s OK YES NO NO YES

C : Contents revised in several places. D : Contents are added. E : Contents revised in several places. F : Contents revised in several places.

port 1/8, 1/4 (Rc, NPT, G) 2 x P Port size 2 x P Port size F E F E D D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5

Model C [dm3/(sbar)] Av x 106(m2) Cv converted b Cv N.C. 0.04 0.40 0.14 0.96 1 0.04 VDW10 M5 0.07 0.25 0.30 1.7 1.6 0.07 0.09 0.45 0.31 1.9 1.6 0.08 M5 1/8 (6A) VDW20 0.18 0.45 0.58 4.3 2.3 0.18 0.33 0.38 1.2 7.2 3.2 0.30 0.16 0.52 0.52 3.8 2 0.16 1/8 (6A) 1/4 (8A) VDW30 0.30 0.52 1.0 6.7 3 0.28 0.46 0.49 1.5 11 4 0.44 17-2-65 6 Series VDW10/20/30 Construction VDW11 VDW21 i i w w e e r r

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b c B part e f d 2.

Operating model: MHY2-16D Opening time: 0.15 s a = 40 (mm) b = 7 (mm) c = 8 (mm) d = 5 (mm) e = 10 (mm) f = 12 (mm) A part a b Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com c B part e f d 2.

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

COM and COM (Z type: +COM only) SX Rated voltage 24, 12 VDC/100, 110 VAC Note) The withstand voltage specification for the wiring unit section conforms to JIS C 0704, Grade 1 or its equivalent.

Water hammer relieving Check valve mechanism is provided in the E side of the supply orifice D and E and supply into the pressure action chamber B can be controlled with two stages by moving the diaphragm assembly r. After release of the energy, when the open amount of the main valve C becomes small, E is blocked. A low valve closing speed relieves the water hammer.

-2No.PS-OMM0006CN-E 1 1.5 3) 3)1 1 () [] -3No.PS-OMM0006CN-E () () () () -4No.PS-OMM0006CN-E () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (100 ) JIS B 8392-1 1.1.21.6.2:2003 () -5No.PS-OMM0006CN-E * (16 ) / / FG (49 N ) () () M8(3 ) * 6 33 () () 10m DC(-)() ( ) -6No.PS-OMM0006CN-E * ( ) () CE CE -550 (5 ) * ON , 1015 10 /1 2351 LCD -7No.PS-OMM0006CN-E * -8No.PS-OMM0006CN-E

-2No.PF-OMN0011CN-C / 1 1.5 3 3) 1 1 () [] -3No.PF-OMN0011CN-C () () () () -4No.PF-OMN0011CN-C () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL , 100 -5No.PF-OMN0011CN-C * 15 FG (30 N * () 6 33 () () 10 m DC(-)() -6No.PF-OMN0011CN-C * () () CE -7No.PF-OMN0011CN-C * 3 2161 LCD * -8No.PF-OMN0011CN-C PF3W3 0 () A : OUT1 OUT2 A NPN NPN B PNP PNP C NPN 1~5 V D NPN 4~20 mA E