Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY 16-M9NA-XN1A : Produced by Mitsubishi Cable Industries, Ltd. 1 Series XMA, XYA Specifications XMA-16 XMA-25 XYA-25 XMA-40 XYA-40 XMA-50 XYA-50 XMA-63 XYA-63 XMA-80 XYA-80 Model Flange (valve) size 16, CF034 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) Fluid Inactive gas under vacuum Operating temperature C 5 to 60 (High temperature type: 5 to 150
x-cov-450-50 xRAY-450-150 Weld SDatter Covers x-cov-450-r 50 To Mount 6.5mm Prox.
NIL IDF 100 F 30 4 W C 5 G Size K Size Air compressor size Note) 100kW 125kW 150kW 100 125 150 P R Note) The value is referential. Confirm the capability of the compressor used.
(not including sensor accuracy), Response time: 150 ms or less Accuracy (to display value) (25C) 1.0% F.S. or less 1.5% F.S. or less 2.0% F.S. or less 0.5% F.S.
(Not including sensor accuracy), Response time: 150 ms or less Accuracy (To display value) (25C) 1.0% F .S. or less 1.5% F .S. or less 2.0% F .S. or less PF2 0.5% F .S.
180 210.5 226 250 135 140 155 134 146 162.5 20 24 24 VNC5-32F VNC6-40F VNC7-50F 100 105 120 36 42 54 12 12 14 310.5 326 350 278 293.5 317.5 VX Port size: 65F, 80F Flange connection VN VQ Applicable flange 65 80 Model H F E D C B A 1 4 1 4 405.5 441.5 65 80 140 150 204 235 175 185 305.5 341.5 210 240 VNC81 -65F VNC91 -80F 4.2-25 VNC Construction N.C.
I ':"1 6 65 274 1 7 7 1 7 7 6 52 55 -r5 loo . 6 . 202 202 6 8 65 320 227 227 6 47 75 litzs . 70 345 252 252 6 47 150 6 8 370 277 2 7 7 r 1 65 T-slot A dimensions T-slot B dimensions $unies tX$ tilo To 0[dEl' tlect|'ic Acl||at0 AC Servo Motor 100vAc TS45O1N -rslsotl I Nole 1) l Applicable Applicable TarnaFwa Sek I 2OOVAC TS45O1N AppLicable L Applicable 3 -.'
x-cov-450-50 xRAY-450-150 Weld SDatter Covers x-cov-450-r 50 To Mount 6.5mm Prox.
In general, 80 to 100 mesh (150 to 180 m) filters are recommended. When transferring a coagulable liquid, take measures to prevent it from coagulating in the pump. Flammable fluid cannot be used with the process pump with built-in solenoid valve (PB1011A). Do not use in an environment where flammable fumes are present or where flammable liquid may get stuck to the product.
Pressure characteristics*4 2.5% F.S. (0.1 to 1.0 MPa, 0.5 MPa standard) Pressure Electrical Power supply voltage 24 VDC 10% Current consumption 150 mA or less Protection Polarity protection Display accuracy 3.0% F.S. Analog output accuracy 3.0% F.S. Accuracy Repeatability Switch output/Display: 1.0% F.S. Analog output: 1.0% F.S. Temperature characteristics 5.0% F.S.
screen) Line name Expanded flow range Compact, Space saving Wide range of flow measurement with one product Compared with the current PF2A, Flow ratio 78 % reduction Weight 74% reduction 100:1 Mounting space 1100 g a 240 g Compared with PFMC7202-06 and PF2A703H-10 Rated flow ratio is 10 : 1 for current PF2A. 2000 L type 55 Applicable flow range [L/min] PFMC7202 New 1 2 5 10 20 25 50 100 150
Additional weight 0.23/50 stroke Stroke 100 stroke 0.46 + 100 / 50 X 0.23 = 0.92kg Standard Stroke (mm) Size Standard stroke Max. stroke(mm) 25, 32, 40 50, 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 75, 100, 125, 150, 175, 200, 250, 300 300 Contact SMC for any intermediate strokes that are not indicated above, as they will be produced upon receipt of order.
CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.
675 (3000) <150 450 (2000) 040 225 (1000 ) o 14.5(01) 29 (0.2) 43.5 (0.3) 58 (0.4) 72.5 (0.5) PSI (MPa) IN=0.101972 kg, lMpa=10.1972 kg/em, Lock operation options Spring-air Spring Air pressure Locking lock-up lock-up pressure lock-up 1.0mm D.Smm S ioppageaccuracy Operate High accuracy -High accuracy towards .Retainlng force 'Retaining force safety ride interchangeable interchangeable (exhaust
Up to 700 25 150 Up to 700 1500 32 150 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance may not as expected when stroke is longer than recommended stroke even they are available.
Deflection + L F F (Dimension when extended) + M Built-in coil scraper and Lube-retainer MAllowable lateral load graph MSelectable proximity switches CKZP57L TURCK P&F 400 Allowable lateral load [N] 350 300 250 200 MAdjustable connector angle 150 100 CKZP57L: 45, 90 CKZP71: 0, 45, 90 50 0 0 50 100 150 200 250 Offset distance L [mm] CKZP71 0 50 100 150 200 250 300 350 400 450 500
Up to 700 25 150 Up to 700 1500 32 150 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance may not as expected when stroke is longer than recommended stroke even they are available.
, 200 201 to 350 D25 32 40 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200, 250, 300 -X Intermediate stroke is available, too. 20Applicable Auto Switch/Refer to page 9-15-1 for further information on auto switches.
Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 42 42 42 64 63 62 130 129 127 248 243 238 465 454 443 58 59 71 74 145 168 268 288 478 524 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster unit 30 47 90 150 203 30 47 90 150
150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !