Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Auto Switch Guide

(Tightening torque of M4 screw should be 1 to 1.2 Nm.) Auto Switch Mounting Bracket Part No. (Including bracket, set screw) Mounting bracket (b) Cylinder series Applicable bore size (mm) 32 40 50 63 80 100 125 140 160 180 200 1. Fix the mounting bracket (A) on the auto switch with the set screw. 2.

MHY2/MHW2

D-Y7 W N B D-Y7BA D-Y69 A B D-Y7 WV N B Protrusion [mm] In-line Perpendicular A B D-Y59 O MHW2-20D S 7 12 5 12 12 O MHW2-25D S 7 11 5 10 11 O MHW2-32D S 4 9 2 8 9 O MHW2-40D S 3 8 1 7 8 Hysteresis Switch operating position (ON) O MHW2-50D S 1 6 5 6 Switch return position (OFF) N B D-Y7BA Auto switch model No. Gripper model No.

4/5 Port Air Operated Valve Series SYJA3000

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Thermo-chiller/Rack Mount Type

Equivalent to 5U (EIA standards*1) 1 Refer to page 1 for details on 19-inch racks. 310 mm Fluid fill port Equivalent to 7U (EIA standards*1) Drain port 399 mm DI filter (Option) Equivalent to 9U (EIA standards*1) Particle filter (Standard) Bypass valve (Standard) 1.1/1.2/1.8/2.4/3.0/5.1 kW (60 Hz) Cooling capacity 0.1C Temperature stability Single-phase 100 VAC (50/60 Hz)/115 VAC (60 Hz)

Air Pilot Operated Series NVSA

I$ODEL NO. 2 , 1 3 (s4) S P & S P A 0 1 1 3 43 y. qB siB s/B s/g 9a SP & SPA 0114 54 B B B B sP & sPA 0115 45 S s I 2 MTNG HOLES .FOOTPRINT' CLASS 1 SUB.PLATE MOUNTED 'SWAY VATVES '49 i.'8 (?

Rotary Cylinder Series MRQ Size: 32, 40 1

C + D = 3.5 + 24.3 = 27.8 l/min B C CRQ2 Rotary motion parts MSQ A D Linear motion parts MRQ 0 1 2 DOperating time (S) 2011-10-7 8 Rotary Cylinder Series MRQ Size: 32, 40 How to Order SO MRQ B S 32 50 C A J79W Number of auto switches Mounting style F: Flange on the rod side B: Basic style Rotation 0 1 2 Linear motion Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

Title not found

o32,a4ol51o IOC) o50 to 61 00/1 0 to 1 0O Singleacting Spring return/extend s 1 2 1 0 6 4 U 5 , 1 0 o50h0.20 Ion.rotating rod Double acting Singl rod o12, @16/5 lD 30 o20, @295to 50 o32, o4ol510 1OO o50, 0631 0 to 1 00 Double rod s12, s1615 lo 30 o20 lo o40l5 to 50 o50, a6310lo 50 @Actuation Doude acting Srngle acting spnng refurn Single acting sprinq extend Larg bore siro Double acting

VXZ

T Conduit terminal Refer to the table (1) given below for availability. Rated voltage 3 2 1 110 VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Model Port size (Rc 1/4) (Rc 3/8) (Rc 1/2) (Rc 3/4) (Rc 1) 02 03 04 06 10 2232 2232 2242 2352 2362 4 5 6 7 8 9 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz Other (Please contact SMC for inquiry.)

Plate Cylinder with Lock Series MLU

Plate Cylinder with Lock Series MLU 25, 32, 40, 50 How to Order Without Auto Switch B 25 30 D F MLU B 25 30 D F J79W S MDLU With Auto Switch Number of auto switches Built-in magnet 2 pcs. 1 pc.

Compact Hydraulic Cylinder Series CH
KGB

thread (mm) A B C D E F G H J K M P Q R S L Bore size (mm) 20 9.5 depth 5.4 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 43 1/8 16.5 6 11.5 25 9.5 depth 5.4 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 49 1/8 17 8 12 32 11 depth 6.5 66 56 10 18 14 M12 x 1.75 15 7 47 6.6 63 1/4 19.5 10 19.5 40 14 depth 8.6 75 65 10 22.4 19 M16 x 2 20 7 52 9 71 1/4 21.5 10 21.5 50 17.5 depth 10.8 81 70 11 28 24 M20 x 2.5 24

5 Port Solenoid Valve Series SV

Common (+, ) Station 1 A side Station 1 B side Station 2 A side Station 2 B side Station 3 A side Substrate for single Station 3 Substrate for double Station 2 Substrate for double Station 1 A and B ports can be individually controlled. Three combinations are available: [N.C./N.C.], [N.O./N.O.] and [N.C./N.O.].

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

High pressure type (Metal seal only) (1) 1 2 3 4 5 6 9 K 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other (0.5 W) Y Low wattage type (2) R External pilot type Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-40. Note 3) For the power consumption of AC type, refer to page 4-14-28.

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

A A Model Mounting Switch operating range A B A B A B 54 MXY6 34 59 5 MXY8 MX 39 67 MXY12 MTS 47 MY Solid State Switch D-M9B(V), D-M9N(V), D-M9P(V) Lead wire entries inside (mm) B B CY Model Mounting Switch operating range A B A B A B 50 MXY6 2 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258

4-channel Flow Monitor ( compatible)

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0:

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230 V (50 Hz) Three-phase 200 V (50 Hz) Three-phase 200/220 V (60 Hz) IDU37E R1 1/2 37 215.4 201.3 IDU55E 55 346.0 296.6 R2 IDU75E 75 441.4 388.4 Refer to the separate catalog.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Drain cock Oil bowl B' C C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth

Guide Cylinder Series MGG

Bore size (mm) P Y Z Y X T W S V R Q R U 20 25 32 40 50 20 25 32 40 50 20 25 32 40 50 Rc 1/8 100mm or more 88 250 to 400 157 80 30 40 12 26 48 12 21 14 82 Rc 1/8 125mm or more 88 350 to 500 175 80 37 13 46 57 31 12 21 14 100 Rc 1/8 150mm or more 90 350 to 600 201 82 37 52 16 38 65 12 21 14 114 Rc 1/8 200mm or more 101 350 to 800 238 92 44 62 20 47 84 12 25 15 138 Rc 1/4 250mm or more 116