Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Electric Actuators

Ball screw 0.03 80 3 100 Slide screw 0.05 200 2 Guide rod type Series LXP 200 3 Slide screw 0.05 100 4 Without motor brake 30 Ball screw 0.03 6 80 Ball bushing guide 100 Slide screw 0.05 Sanyo Denki Co., Ltd. 200 2 200 3 Slide screw 0.05 100 4 With motor brake 30 Ball screw 0.03 5 80 100 Slide screw 0.05 200 3 High rigidity slide table type Series LXS 200 4.5 Slide screw

MGZ Series

(same side) Reed switch D-Z73, Z76, Z80 20 1 pc., 2 pcs. (different sides) 60 2 pcs. (same side) D-Y59A (B), Y69A (B) Y7P (V) 20 1 pc., 2 pcs. (different sides) 70 2 pcs. (same side) D-Y7NW (V), Y7PW (V) Solid state switch Y7BW (V) 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

SMC Electronic Switch Series Variations

300 0 100 200 300 0 100 200 300 0 Detection distance (m) Detection distance (m) Detection distance (m) Example 1) When requiring 300m detection, select the detection nozzle of 1.0 with supply pressure 0.2MPa.

Rotary Cylinder Series MRQ Size: 32, 40 1

Reed switch: D-A7/A8 Solid state switch: D-F7/J7 ( ) Series MRQ An air cushion is also available.

VQC

SD0 SDA1 SDA2 Serial kit without SI unit Serial kit for Remote I/O 1 to 8 stations (16 stations) FD0 FD1 FD2 FD3 D-sub connector kit (25P) without cable Serial unit: EX126 D-sub connector kit (25P) with 1.5 m cable 1 to 12 stations (24 stations) Serial kit for DeviceNet/PROFIBUS-DP/CC-LINK D-sub connector kit (25P) with 3.0 m cable P SDVB Serial kit for CC-LINK 1 to 8 stations (16 stations

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

200200 300 34 84 122 172 50 4 4.5 3 6 16 22 46 40 M8 x 1.25 92 24 48 124 200 300 36 86 124 174 66 5 6 4 8 20 24 48 50 M10 x 1.5 28 52 128 200 300 38 50 88 124 174 110 80 5 6 4 8 20 24 63 M10 x 1.5 MLGPM (slide bearing)/A, DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB

VCA

AXT632-69-1 AXT632-69-2 VVCA40-3A-06-2 VVCA40-3A-06-1 OR-3200-200-H VCA45--VVCA40-6-n VVCA40-4A-06-2 VVCA40-4A-06-1 Material Mounting screw (side port) Mounting screw (side port) q q Steel Steel Mounting screw (front port) Mounting screw (front port) End plate assembly (D side, side port) End plate assembly (D side, side port) w w Aluminum Aluminum End plate assembly (D side, front port)

Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: P (Air Pressure Lock-up)

Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 500mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: P (Air Pressure Lock-up)

Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 600mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: P (Air Pressure Lock-up)

Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 700mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: P (Air Pressure Lock-up)

Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 450mm, Option: N [w/o Rod Boot, w/o Cushion (Not Valid for Air-hydro), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 125mm, Option: N [w/o Rod Boot, w/o Cushion (Not Valid for Air-hydro), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 700mm, Option: N [w/o Rod Boot, w/o Cushion (Not Valid for Air-hydro), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 800mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 100mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 175mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 250mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]