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Note 2) JIS B 8370: Pneumatic system axiom. 1 The compatibility of pneumatic equipment is the responsibility of the person who designs the pneumatic system or decides its specifications.

A IDFA60-23-T IDFA70-23-T IDFA80-23-T IDFA90-23-T M3.5 8.5mm M4.0 9.5Mm [3.2.5 ] IDFA60/70/80/90 Series 12-3 IDX-OM-W094 T 12.5 IDFA60/70-23-T A B AC 230V50Hz CM OLR FM MC MC2 PRS PRS2 ILS THR C01 C11 TB CN GFCI EDV PE TDR BK WH IDFA80/90-23-T A B A B GR A B AC 230V50Hz SY BU BR YE OR G/Y / IDFA60/70/80/90 Series 12-4 IDX-OM-W094 V 13 V V 13.1 0 () 13.2

Flow Characteristics With DIN terminal block With terminal block Port size Flow characteristics 2 3 (A R) b Cv C [dm 3/(sbar)] 1 2 (P A) b Cv C [dm 3/(sbar)] 26 38 0.38 0.30 7.0 9.8 27 38 0.37 0.32 7.4 9.8 27 40 0.36 0.22 7.3 9.8 25 40 0.37 0.20 6.8 9.6 2 1 (A P) b Cv C [dm 3/(sbar)] 3 2 (R A) b Cv C [dm 3/(sbar)] 1/2 3/4 Port size Effective area (mm2) 2 3 (A R) 1 2 (P A) 235

Disconnect the jumper wire from the remote terminal B (terminal number 6-7) and connect the switch. Automatic return switch (momentary switch).

Disconnect the jumper wire from the remote terminal B (terminal number 6-7) and connect the switch. Automatic return switch (momentary switch).

Specifications Model PFMC7501 PFMC7102 PFMC7202 Fluid Applicable fluid Dry air, N2 (Air quality grade is JIS B 8392-1 1.1.2 to 1.6.2, ISO 8573-1 1.1.2 to 1.6.2.)

Step (3) Select required function for valve unit Select a model from data (B), by determining the functions that are needed for the valve unit in accordance with your application.

Cv b Cv b Cv b Cv S070 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19 0.15 0.47 0.39 0.39 0.47 0.39 0.80 0.55 0.55 0.80 0.55 0.40 0.35 0.35 0.40 0.35 0.27 0.32 0.32 0.27 0.32 0.13 0.10 0.10 0.13 0.10 0.19 0.14 0.14 0.19 0.14 0.48 0.41 0.41 0.48 0.41 0.83 0.65 0.65 0.83 0.65 0.47 0.38 0.38

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 53 54 8.5 14.4 15.5 50 15 17.5 24 12.5 26 22.5 48 Metric size Inch size 15.2 6 8 9.5 16.6 17.5 61 16 19.5 27 13.5 28 65 24.5 52 Collar part arrow 57 8 10 69.5 70 18.5 11 18 21.5 65 17 21 29.5 14.5 30 27 Transparent cover 3 16 1 4 " 1 4 " 3 8 " 1

Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv C [dm3/ (sbar)] b Cv Grommet 0.44 0.40 0.40 0.44 0.40 0.41 0.63 0.63 0.41 0.63 0.13 0.10 0.10 0.13 0.10 0.20 0.14 0.14 0.20 0.14 VK332 0.47 0.41 0.41 0.47 0.41 0.85 0.65 0.65 0.85 0.65 0.47 0.38 0.38 0.47 0.38 0.76 0.41 0.41 0.76 0.41 0.44 0.27 0.27 0.44 0.27 0.26 0.24 0.24 0.26 0.24 0.13 0.10 0.10 0.13 0.10 0.19 0.15 0.15 0.19 0.15 0.47 0.39 0.39

N Body 2Yq 3-3/s s-Y4 6 1 A 1 y 2 9-2 B Brackel D Threaded draln poft (Female) except 220. Port slzo o2% o3-% 04-'/z 06 % to1 741'/z 20-2 Thread 1 Male 2fumale. ,NAMC220, 32O,520 only HowTo Select Flow Characteristics Supply prossure: 71 PSI Supply pressurei 71 tl 12 10.5 I 6 ! e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.)

Example) VHS30-N03-RZ-D Symbol Description Body size 20 30 40 Thread type Nil Rc*1 N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 Nil Flow direction: Left to right a Flow direction Semi-standard R Flow direction: Right to left Nil Name plate in imperial units: MPa b Pressure unit Z*2 Name plate in imperial units: psi *3 *3 *3 *1 EXH port thread type: G *2 For thread type: NPT This product

N Body 2Yq 3-3/s s-Y4 6 1 A 1 y 2 9-2 B Brackel D Threaded draln poft (Female) except 220. Port slzo o2% o3-% 04-'/z 06 % to1 741'/z 20-2 Thread 1 Male 2fumale. ,NAMC220, 32O,520 only HowTo Select Flow Characteristics Supply prossure: 71 PSI Supply pressurei 71 tl 12 10.5 I 6 ! e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.)

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

0 Normally Closed/Single unit Electrical option Nil None Port size S With surge voltage suppressor L With indicator light 02 03 04 Rc 1/4 Rc 3/8 Rc 1/2 With light/surge voltage suppressor Z Refer to the table (1) given below for availability.

No.HRX-OM-T004-B Operation Manual Communication function Thermo chiller HRS090 Series Keep this manual available whenever necessary 2019 SMC CORPORATION All Rights Reserved To the users Thank you for purchasing SMCs Thermo chiller (hereinafter referred to as the product).

Conditions: Operating pressure 0.5MPa, Operating oil Turbine oil Class 1 (ISO VG32), Piping length 1m AS420-02, 03, 04 AS500-06 AS2000-01, 02 AS600-10 AS3000-02, 03 AS4000-02, 03, 04 Circuit 4.12-12